SG10201604294XA - Table for holding workpiece and processing apparatus with the table - Google Patents
Table for holding workpiece and processing apparatus with the tableInfo
- Publication number
- SG10201604294XA SG10201604294XA SG10201604294XA SG10201604294XA SG10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA SG 10201604294X A SG10201604294X A SG 10201604294XA
- Authority
- SG
- Singapore
- Prior art keywords
- processing apparatus
- holding workpiece
- workpiece
- holding
- processing
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015111686 | 2015-06-01 | ||
JP2016096276A JP6719271B2 (en) | 2015-06-01 | 2016-05-12 | A table for holding an object to be processed and a processing apparatus having the table |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201604294XA true SG10201604294XA (en) | 2017-01-27 |
Family
ID=57746391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201604294XA SG10201604294XA (en) | 2015-06-01 | 2016-05-27 | Table for holding workpiece and processing apparatus with the table |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6719271B2 (en) |
SG (1) | SG10201604294XA (en) |
TW (1) | TWI732759B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI634613B (en) * | 2017-12-27 | 2018-09-01 | 億力鑫系統科技股份有限公司 | Carrier disk |
JP7144218B2 (en) * | 2018-07-05 | 2022-09-29 | 株式会社荏原製作所 | Jig and installation method using the jig |
JP2021016913A (en) * | 2019-07-19 | 2021-02-15 | 株式会社ディスコ | Processing device |
CN113910072B (en) * | 2021-10-28 | 2022-11-22 | 华海清科股份有限公司 | Sucker turntable and wafer processing system |
WO2024009775A1 (en) * | 2022-07-04 | 2024-01-11 | 東京エレクトロン株式会社 | Substrate processing device and substrate processing method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5399001B2 (en) * | 2008-04-18 | 2014-01-29 | 株式会社ディスコ | Holding table mechanism of polishing apparatus |
JP5701551B2 (en) * | 2010-09-22 | 2015-04-15 | 株式会社Screenホールディングス | Substrate processing equipment |
-
2016
- 2016-05-12 JP JP2016096276A patent/JP6719271B2/en active Active
- 2016-05-24 TW TW105116073A patent/TWI732759B/en active
- 2016-05-27 SG SG10201604294XA patent/SG10201604294XA/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW201714703A (en) | 2017-05-01 |
JP6719271B2 (en) | 2020-07-08 |
JP2016221668A (en) | 2016-12-28 |
TWI732759B (en) | 2021-07-11 |
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