SG10201604126XA - Article handling facility - Google Patents

Article handling facility

Info

Publication number
SG10201604126XA
SG10201604126XA SG10201604126XA SG10201604126XA SG10201604126XA SG 10201604126X A SG10201604126X A SG 10201604126XA SG 10201604126X A SG10201604126X A SG 10201604126XA SG 10201604126X A SG10201604126X A SG 10201604126XA SG 10201604126X A SG10201604126X A SG 10201604126XA
Authority
SG
Singapore
Prior art keywords
handling facility
article handling
article
facility
handling
Prior art date
Application number
SG10201604126XA
Other languages
English (en)
Inventor
Nishikawa Tadashi
Yamashita Ryou
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201604126XA publication Critical patent/SG10201604126XA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02—Control or detection
    • B65G2203/0266—Control or detection relating to the load carrier(s)
SG10201604126XA 2015-05-28 2016-05-23 Article handling facility SG10201604126XA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015109089A JP6332147B2 (ja) 2015-05-28 2015-05-28 物品取扱設備

Publications (1)

Publication Number Publication Date
SG10201604126XA true SG10201604126XA (en) 2016-12-29

Family

ID=57399450

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201604126XA SG10201604126XA (en) 2015-05-28 2016-05-23 Article handling facility

Country Status (6)

Country Link
US (1) US9573768B2 (ja)
JP (1) JP6332147B2 (ja)
KR (1) KR102422566B1 (ja)
CN (1) CN106200570B (ja)
SG (1) SG10201604126XA (ja)
TW (1) TWI684928B (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6531638B2 (ja) * 2015-12-09 2019-06-19 株式会社ダイフク 物品搬送設備
CN108628274B (zh) * 2018-06-29 2020-08-28 河南聚合科技有限公司 一种基于闭环反馈优化的质量控制提升系统平台
JP7081567B2 (ja) * 2019-05-20 2022-06-07 株式会社ダイフク 物品搬送装置
JP7334633B2 (ja) * 2020-01-31 2023-08-29 株式会社ダイフク 物品搬送装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5319353A (en) * 1992-10-14 1994-06-07 Advantest Corporation Alarm display system for automatic test handler
JP2001325994A (ja) 2000-05-15 2001-11-22 Matsushita Electric Ind Co Ltd 無人搬送車及びその電池管理システム
JP4707803B2 (ja) * 2000-07-10 2011-06-22 エルピーダメモリ株式会社 エラーレート判定方法と半導体集積回路装置
JP2003123175A (ja) * 2001-10-17 2003-04-25 Kuniaki Yamamoto 廃ガス排出系管理方法及びシステム
JP2004054357A (ja) * 2002-07-16 2004-02-19 Matsushita Electric Works Ltd 情報転送方法および情報転送システム
JP4117625B2 (ja) * 2005-05-26 2008-07-16 村田機械株式会社 搬送車システム
EP2998894B1 (en) * 2005-07-11 2021-09-08 Brooks Automation, Inc. Intelligent condition monitoring and fault diagnostic system
US9104650B2 (en) * 2005-07-11 2015-08-11 Brooks Automation, Inc. Intelligent condition monitoring and fault diagnostic system for preventative maintenance
JP4534155B2 (ja) * 2005-08-31 2010-09-01 株式会社ダイフク 物品搬送装置
KR101150791B1 (ko) * 2007-09-11 2012-06-13 도쿄엘렉트론가부시키가이샤 정보 처리 장치, 정보 처리 방법 및, 프로그램이 기록된 컴퓨터 판독가능 기록매체
JP5757721B2 (ja) * 2009-12-28 2015-07-29 株式会社日立国際電気 基板処理装置、基板処理装置の異常表示方法、搬送制御方法およびデータ収集プログラム
JP5110405B2 (ja) * 2010-04-07 2012-12-26 村田機械株式会社 走行台車システム
JP2012199724A (ja) * 2011-03-19 2012-10-18 Fujitsu Ltd データ送信装置、データ受信装置、データ送受信装置及びデータ送受信装置の制御方法
JP2013062979A (ja) * 2011-09-14 2013-04-04 Mitsubishi Electric Corp 車両用電源装置
US8881297B2 (en) * 2012-09-06 2014-11-04 Brooks Automation, Inc. Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same
CN103472797B (zh) * 2013-09-11 2016-05-04 上海明华电力技术工程有限公司 一种通讯效率高的风电振动状态监测系统
KR102189780B1 (ko) * 2014-08-11 2020-12-11 삼성전자주식회사 반도체 메모리 장치 및 이를 포함하는 메모리 시스템
CN104298194B (zh) * 2014-09-12 2017-07-21 快意电梯股份有限公司 电梯远程监控系统中采集及传输数据的数据量压缩方法

Also Published As

Publication number Publication date
JP6332147B2 (ja) 2018-05-30
TWI684928B (zh) 2020-02-11
CN106200570B (zh) 2020-04-24
KR102422566B1 (ko) 2022-07-18
CN106200570A (zh) 2016-12-07
JP2016222388A (ja) 2016-12-28
US9573768B2 (en) 2017-02-21
US20160347551A1 (en) 2016-12-01
KR20160140426A (ko) 2016-12-07
TW201705053A (zh) 2017-02-01

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