SG10201509803SA - Article storage facility - Google Patents

Article storage facility

Info

Publication number
SG10201509803SA
SG10201509803SA SG10201509803SA SG10201509803SA SG10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA
Authority
SG
Singapore
Prior art keywords
storage facility
article storage
article
facility
storage
Prior art date
Application number
SG10201509803SA
Inventor
Abe Takeshi
Ueda Toshihito
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201509803SA publication Critical patent/SG10201509803SA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • B65G1/0407Storage devices mechanical using stacker cranes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67288Monitoring of warpage, curvature, damage, defects or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67386Closed carriers characterised by the construction of the closed carrier
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769Storage means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40Safety features of loads, equipment or persons
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG10201509803SA 2014-12-02 2015-11-27 Article storage facility SG10201509803SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014243977A JP6217611B2 (en) 2014-12-02 2014-12-02 Goods storage facility

Publications (1)

Publication Number Publication Date
SG10201509803SA true SG10201509803SA (en) 2016-07-28

Family

ID=56078718

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201509803SA SG10201509803SA (en) 2014-12-02 2015-11-27 Article storage facility

Country Status (6)

Country Link
US (1) US10081491B2 (en)
JP (1) JP6217611B2 (en)
KR (1) KR102500718B1 (en)
CN (1) CN105655274B (en)
SG (1) SG10201509803SA (en)
TW (1) TWI654126B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6443264B2 (en) * 2015-08-12 2018-12-26 株式会社ダイフク Goods storage equipment
WO2018155076A1 (en) * 2017-02-23 2018-08-30 村田機械株式会社 Stocker, and method for forming working scaffolding
DE102020202438A1 (en) * 2020-02-26 2021-08-26 Mias Maschinenbau, Industrieanlagen & Service Gmbh MAST ARRANGEMENT FOR A SHELVING UNIT
JP7494813B2 (en) * 2021-07-08 2024-06-04 株式会社ダイフク Item storage facilities

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640513A (en) * 1992-07-24 1994-02-15 Daifuku Co Ltd Load storage facility
US20070065259A1 (en) * 2005-08-30 2007-03-22 Talley Paul A Automated self storage system
JP4626821B2 (en) 2006-06-08 2011-02-09 株式会社ダイフク Goods storage device
WO2008008727A2 (en) * 2006-07-10 2008-01-17 Applied Materials, Inc. Scheduling method for processing equipment
JP4378659B2 (en) * 2007-06-28 2009-12-09 株式会社ダイフク Goods storage facilities and goods storage facilities for clean rooms
TWM341097U (en) 2008-05-06 2008-09-21 Cyuan Jin Technology Ltd Company Improved structure of electrically-operated folding door
JP5350692B2 (en) * 2008-07-03 2013-11-27 東京エレクトロン株式会社 Substrate processing apparatus and support frame used therefor
JP5403358B2 (en) * 2009-12-10 2014-01-29 株式会社ダイフク Goods storage facility
JP5429559B2 (en) * 2010-02-01 2014-02-26 株式会社ダイフク Warehouse equipment
JP5500371B2 (en) * 2010-07-23 2014-05-21 株式会社ダイフク Goods transport equipment
JP5598734B2 (en) 2012-01-06 2014-10-01 株式会社ダイフク Goods storage facility
JP5713203B2 (en) * 2012-03-27 2015-05-07 株式会社ダイフク Goods storage equipment
TWM487954U (en) 2014-06-20 2014-10-11 chao-xing Zheng Multiple-plate type concealed door structure
JP6304045B2 (en) * 2015-01-06 2018-04-04 株式会社ダイフク Goods storage facility

Also Published As

Publication number Publication date
KR20160066508A (en) 2016-06-10
JP6217611B2 (en) 2017-10-25
US20160152412A1 (en) 2016-06-02
US10081491B2 (en) 2018-09-25
CN105655274B (en) 2020-08-04
CN105655274A (en) 2016-06-08
KR102500718B1 (en) 2023-02-15
JP2016108059A (en) 2016-06-20
TWI654126B (en) 2019-03-21
TW201632436A (en) 2016-09-16

Similar Documents

Publication Publication Date Title
PT3135609T (en) Article transport facility
AU359751S (en) Storage container
GB201415249D0 (en) Storage system
GB2529669B8 (en) Storage system
GB201408726D0 (en) Storage device
GB2539829B (en) Storage system
AU355959S (en) Container
AU359745S (en) Storage container
AU359744S (en) Storage container
AU355958S (en) Container
KR102463265B9 (en) Article transport facility
SG10201507854TA (en) Storage system
PL2944223T3 (en) Storage system
HK1223075A1 (en) Storage case
DK3107507T3 (en) Thermoplastic Article
SG10201509803SA (en) Article storage facility
GB201418996D0 (en) Article
SG11201701659RA (en) Storage device
GB201421189D0 (en) Thermoplastic article
GB201418924D0 (en) Storage bag
GB201415778D0 (en) Storage apparatus
TWM489775U (en) Article storage rack
GB201401675D0 (en) Article case
GB201415566D0 (en) Storage container
GB201415788D0 (en) Objects With Multi-Connectivity