SG10201509803SA - Article storage facility - Google Patents

Article storage facility

Info

Publication number
SG10201509803SA
SG10201509803SA SG10201509803SA SG10201509803SA SG10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA SG 10201509803S A SG10201509803S A SG 10201509803SA
Authority
SG
Singapore
Prior art keywords
storage facility
article storage
article
facility
storage
Prior art date
Application number
SG10201509803SA
Inventor
Abe Takeshi
Ueda Toshihito
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG10201509803SA publication Critical patent/SG10201509803SA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40—Safety features of loads, equipment or persons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG10201509803SA 2014-12-02 2015-11-27 Article storage facility SG10201509803SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014243977A JP6217611B2 (en) 2014-12-02 2014-12-02 Goods storage facility

Publications (1)

Publication Number Publication Date
SG10201509803SA true SG10201509803SA (en) 2016-07-28

Family

ID=56078718

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201509803SA SG10201509803SA (en) 2014-12-02 2015-11-27 Article storage facility

Country Status (6)

Country Link
US (1) US10081491B2 (en)
JP (1) JP6217611B2 (en)
KR (1) KR102500718B1 (en)
CN (1) CN105655274B (en)
SG (1) SG10201509803SA (en)
TW (1) TWI654126B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6443264B2 (en) * 2015-08-12 2018-12-26 株式会社ダイフク Goods storage equipment
WO2018155076A1 (en) * 2017-02-23 2018-08-30 村田機械株式会社 Stocker, and method for forming working scaffolding
DE102020202438A1 (en) * 2020-02-26 2021-08-26 Mias Maschinenbau, Industrieanlagen & Service Gmbh MAST ARRANGEMENT FOR A SHELVING UNIT
JP7494813B2 (en) * 2021-07-08 2024-06-04 株式会社ダイフク Item storage facilities

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0640513A (en) * 1992-07-24 1994-02-15 Daifuku Co Ltd Load storage facility
US20070065259A1 (en) * 2005-08-30 2007-03-22 Talley Paul A Automated self storage system
JP4626821B2 (en) 2006-06-08 2011-02-09 株式会社ダイフク Goods storage device
WO2008008727A2 (en) * 2006-07-10 2008-01-17 Applied Materials, Inc. Scheduling method for processing equipment
JP4378659B2 (en) * 2007-06-28 2009-12-09 株式会社ダイフク Goods storage facilities and goods storage facilities for clean rooms
TWM341097U (en) 2008-05-06 2008-09-21 Cyuan Jin Technology Ltd Company Improved structure of electrically-operated folding door
JP5350692B2 (en) * 2008-07-03 2013-11-27 東京エレクトロン株式会社 Substrate processing apparatus and support frame used therefor
JP5403358B2 (en) * 2009-12-10 2014-01-29 株式会社ダイフク Goods storage facility
JP5429559B2 (en) * 2010-02-01 2014-02-26 株式会社ダイフク Warehouse equipment
JP5500371B2 (en) * 2010-07-23 2014-05-21 株式会社ダイフク Goods transport equipment
JP5598734B2 (en) 2012-01-06 2014-10-01 株式会社ダイフク Goods storage facility
JP5713203B2 (en) * 2012-03-27 2015-05-07 株式会社ダイフク Goods storage equipment
TWM487954U (en) 2014-06-20 2014-10-11 chao-xing Zheng Multiple-plate type concealed door structure
JP6304045B2 (en) * 2015-01-06 2018-04-04 株式会社ダイフク Goods storage facility

Also Published As

Publication number Publication date
KR20160066508A (en) 2016-06-10
JP6217611B2 (en) 2017-10-25
US20160152412A1 (en) 2016-06-02
US10081491B2 (en) 2018-09-25
CN105655274B (en) 2020-08-04
CN105655274A (en) 2016-06-08
KR102500718B1 (en) 2023-02-15
JP2016108059A (en) 2016-06-20
TWI654126B (en) 2019-03-21
TW201632436A (en) 2016-09-16

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