SG10201403132RA - Inspection apparatus for article storage facility - Google Patents
Inspection apparatus for article storage facilityInfo
- Publication number
- SG10201403132RA SG10201403132RA SG10201403132RA SG10201403132RA SG10201403132RA SG 10201403132R A SG10201403132R A SG 10201403132RA SG 10201403132R A SG10201403132R A SG 10201403132RA SG 10201403132R A SG10201403132R A SG 10201403132RA SG 10201403132R A SG10201403132R A SG 10201403132RA
- Authority
- SG
- Singapore
- Prior art keywords
- supported
- support portion
- transport container
- placement support
- inactive gas
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Combustion & Propulsion (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013134265A JP5888288B2 (ja) | 2013-06-26 | 2013-06-26 | 物品保管設備の検査装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG10201403132RA true SG10201403132RA (en) | 2015-01-29 |
Family
ID=52114279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG10201403132RA SG10201403132RA (en) | 2013-06-26 | 2014-06-11 | Inspection apparatus for article storage facility |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9541534B2 (ko) |
| JP (1) | JP5888288B2 (ko) |
| KR (1) | KR102230532B1 (ko) |
| CN (1) | CN104249898B (ko) |
| SG (1) | SG10201403132RA (ko) |
| TW (1) | TWI610865B (ko) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5984030B2 (ja) * | 2013-03-05 | 2016-09-06 | 村田機械株式会社 | 測定ユニット及びパージガスの流量測定方法 |
| JP6660937B2 (ja) * | 2015-03-18 | 2020-03-11 | 株式会社日立ハイテクノロジーズ | 点検デバイス |
| WO2016152276A1 (ja) * | 2015-03-26 | 2016-09-29 | 村田機械株式会社 | 物品の支持装置及び支持方法 |
| JP2016213377A (ja) * | 2015-05-12 | 2016-12-15 | 村田機械株式会社 | パージノズル |
| JP6540221B2 (ja) * | 2015-05-18 | 2019-07-10 | 村田機械株式会社 | パージ装置及びパージストッカ |
| CN107851596A (zh) * | 2015-08-04 | 2018-03-27 | 村田机械株式会社 | 净化装置、净化储料器以及净化气体的供给方法 |
| JP6414525B2 (ja) * | 2015-09-02 | 2018-10-31 | 株式会社ダイフク | 保管設備 |
| JP6455404B2 (ja) * | 2015-11-17 | 2019-01-23 | 株式会社ダイフク | 容器搬送設備 |
| JP6551240B2 (ja) * | 2016-01-06 | 2019-07-31 | 株式会社ダイフク | 物品収納棚、及び、それを備えた物品収納設備 |
| JP6638457B2 (ja) * | 2016-02-18 | 2020-01-29 | 株式会社デンソー | 搬送装置 |
| JP6460015B2 (ja) * | 2016-03-07 | 2019-01-30 | 株式会社ダイフク | 容器搬送設備 |
| JP6477579B2 (ja) * | 2016-04-20 | 2019-03-06 | 株式会社ダイフク | 容器支持棚 |
| JP6579067B2 (ja) * | 2016-09-09 | 2019-09-25 | 株式会社ダイフク | 流量測定装置及び流量測定システム |
| JP6631446B2 (ja) * | 2016-09-09 | 2020-01-15 | 株式会社ダイフク | 物品収納設備 |
| JP6614174B2 (ja) * | 2017-02-08 | 2019-12-04 | 株式会社ダイフク | 流量測定システム |
| JP6794898B2 (ja) * | 2017-03-29 | 2020-12-02 | 株式会社ダイフク | 収納棚 |
| KR102021007B1 (ko) * | 2017-11-06 | 2019-09-11 | 크린팩토메이션 주식회사 | 웨이퍼 내장 용기용 퍼지 선반에서의 퍼지 가스 누설 검사 디바이스 |
| US10703563B2 (en) * | 2017-11-10 | 2020-07-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Stocker |
| KR102123583B1 (ko) * | 2019-04-15 | 2020-06-26 | 주식회사 아셀 | 유량측정장치 |
| WO2022074937A1 (ja) * | 2020-10-05 | 2022-04-14 | 村田機械株式会社 | 流量測定装置 |
| JP7371663B2 (ja) * | 2021-04-27 | 2023-10-31 | 株式会社ダイフク | 検査システム |
| KR102547919B1 (ko) * | 2021-07-28 | 2023-06-26 | 주식회사 에스에프에이 | 웨이퍼 보관용기 적재 시스템 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5472086A (en) * | 1994-03-11 | 1995-12-05 | Holliday; James E. | Enclosed sealable purgible semiconductor wafer holder |
| CN100449682C (zh) * | 2001-05-17 | 2009-01-07 | 株式会社荏原制作所 | 衬底传送容器 |
| US20040191032A1 (en) * | 2002-07-19 | 2004-09-30 | R. Foulke Development Company, Llc | Bi-directional arm and storage system |
| CN100560443C (zh) * | 2004-04-18 | 2009-11-18 | 安堤格里斯公司 | 具有流体密封流路的基板容器 |
| US7328727B2 (en) * | 2004-04-18 | 2008-02-12 | Entegris, Inc. | Substrate container with fluid-sealing flow passageway |
| JP4126619B2 (ja) * | 2006-06-27 | 2008-07-30 | 株式会社ダイフク | 物品保管設備 |
| JP2008108765A (ja) * | 2006-10-23 | 2008-05-08 | Toshiba Corp | 位置調整治具、位置調整方法及び電子装置の製造方法 |
| JP4670808B2 (ja) * | 2006-12-22 | 2011-04-13 | ムラテックオートメーション株式会社 | コンテナの搬送システム及び測定用コンテナ |
| JP2010052920A (ja) * | 2008-08-29 | 2010-03-11 | Dainippon Screen Mfg Co Ltd | 収容器搬送装置 |
| JP5106363B2 (ja) * | 2008-12-02 | 2012-12-26 | ミライアル株式会社 | ウエハ収納容器 |
| JP5155848B2 (ja) * | 2008-12-18 | 2013-03-06 | 日本ケンブリッジフィルター株式会社 | Ｆｏｕｐ用ｎ２パージ装置 |
| JP2011187539A (ja) * | 2010-03-05 | 2011-09-22 | Sinfonia Technology Co Ltd | ガス注入装置、ガス排出装置、ガス注入方法及びガス排出方法 |
| KR101708087B1 (ko) * | 2010-04-22 | 2017-02-17 | 신에츠 폴리머 가부시키가이샤 | 기판 수납 용기 |
| JP2012114371A (ja) * | 2010-11-26 | 2012-06-14 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
| JP5779957B2 (ja) * | 2011-04-20 | 2015-09-16 | 東京エレクトロン株式会社 | ローディングユニット及び処理システム |
| JP5327655B2 (ja) * | 2011-05-31 | 2013-10-30 | 株式会社ダイフク | 搬送設備 |
| JP5984030B2 (ja) * | 2013-03-05 | 2016-09-06 | 村田機械株式会社 | 測定ユニット及びパージガスの流量測定方法 |
| US9257320B2 (en) * | 2013-06-05 | 2016-02-09 | GlobalFoundries, Inc. | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication |
-
2013
- 2013-06-26 JP JP2013134265A patent/JP5888288B2/ja active Active
-
2014
- 2014-05-20 TW TW103117671A patent/TWI610865B/zh active
- 2014-06-11 SG SG10201403132RA patent/SG10201403132RA/en unknown
- 2014-06-11 KR KR1020140070789A patent/KR102230532B1/ko active IP Right Grant
- 2014-06-18 US US14/308,158 patent/US9541534B2/en active Active
- 2014-06-25 CN CN201410287642.4A patent/CN104249898B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104249898B (zh) | 2017-09-26 |
| TWI610865B (zh) | 2018-01-11 |
| JP5888288B2 (ja) | 2016-03-16 |
| TW201505936A (zh) | 2015-02-16 |
| CN104249898A (zh) | 2014-12-31 |
| JP2015012040A (ja) | 2015-01-19 |
| KR20150001624A (ko) | 2015-01-06 |
| KR102230532B1 (ko) | 2021-03-19 |
| US20150000372A1 (en) | 2015-01-01 |
| US9541534B2 (en) | 2017-01-10 |
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