SE9302985L - Övervakning av tunna filmers tjocklek på ett substrat - Google Patents

Övervakning av tunna filmers tjocklek på ett substrat

Info

Publication number
SE9302985L
SE9302985L SE9302985A SE9302985A SE9302985L SE 9302985 L SE9302985 L SE 9302985L SE 9302985 A SE9302985 A SE 9302985A SE 9302985 A SE9302985 A SE 9302985A SE 9302985 L SE9302985 L SE 9302985L
Authority
SE
Sweden
Prior art keywords
monitoring
coating
lies
thickness
range
Prior art date
Application number
SE9302985A
Other languages
Unknown language ( )
English (en)
Other versions
SE9302985D0 (sv
SE515115C2 (sv
Inventor
Michel Hannotiau
Guy Renard
Robert Terneu
Original Assignee
Glaverbel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel filed Critical Glaverbel
Publication of SE9302985D0 publication Critical patent/SE9302985D0/sv
Publication of SE9302985L publication Critical patent/SE9302985L/sv
Publication of SE515115C2 publication Critical patent/SE515115C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Textile Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Surface Treatment Of Glass (AREA)
SE9302985A 1992-09-15 1993-09-14 Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat SE515115C2 (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (3)

Publication Number Publication Date
SE9302985D0 SE9302985D0 (sv) 1993-09-14
SE9302985L true SE9302985L (sv) 1994-03-16
SE515115C2 SE515115C2 (sv) 2001-06-11

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9302985A SE515115C2 (sv) 1992-09-15 1993-09-14 Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat

Country Status (17)

Country Link
US (1) US5396080A (sv)
JP (1) JPH06201333A (sv)
CN (1) CN1049045C (sv)
AU (1) AU664474B2 (sv)
BE (1) BE1006795A3 (sv)
CA (1) CA2105635A1 (sv)
CZ (1) CZ289962B6 (sv)
DE (1) DE4331355A1 (sv)
ES (1) ES2078864B1 (sv)
FI (1) FI933971A (sv)
FR (1) FR2695721B1 (sv)
GB (2) GB9219450D0 (sv)
IT (1) IT1261253B (sv)
LU (1) LU88402A1 (sv)
NL (1) NL194246C (sv)
PT (1) PT101364B (sv)
SE (1) SE515115C2 (sv)

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DE19735246C2 (de) * 1997-08-14 1999-07-15 Bayern Freistaat Verfahren zur Bestimmung eines Volumens
DE19821401C2 (de) * 1998-05-13 2000-05-18 Storz Endoskop Gmbh Schaffhaus Endoskop zur Inspektion eines Beobachtungsraumes
US6392756B1 (en) 1999-06-18 2002-05-21 N&K Technology, Inc. Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
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DE102004037555B4 (de) * 2004-08-03 2012-09-06 Erlus Aktiengesellschaft Verfahren zur berührungslosen und/oder zerstörungsfreien Prüfung einer photokatalytischen Oberflächenbeschichtung
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CN103930595A (zh) 2011-11-11 2014-07-16 Sio2医药产品公司 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备
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US8855450B2 (en) 2012-02-20 2014-10-07 Cardinal Cg Company System and method for measuring properties of a thin film coated glass
US8666202B2 (en) 2012-02-20 2014-03-04 Cardinal Ig Company System and method for measuring properties of a thin film coated glass
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US9996765B2 (en) 2014-03-12 2018-06-12 The Sherwin-Williams Company Digital imaging for determining mix ratio of a coating
CN106461373B (zh) * 2014-03-12 2019-08-13 宣伟投资管理有限公司 用于涂层预测、施涂和检查的实时数字增强成像
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CN105115430B (zh) * 2015-05-26 2016-08-31 山东建筑大学 一种点栅透射式化学药液涂抹均匀性检测方法及装置
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CN108474739B (zh) * 2016-01-07 2021-10-01 阿科玛股份有限公司 测量基材上沉积的涂层的厚度的光学方法
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CN107179055B (zh) * 2017-05-28 2019-11-01 中国计量大学 用于bopp薄膜生产的薄膜厚度监测方法
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Also Published As

Publication number Publication date
AU664474B2 (en) 1995-11-16
NL194246B (nl) 2001-06-01
IT1261253B (it) 1996-05-09
FR2695721B1 (fr) 1995-02-24
FI933971A (fi) 1994-03-16
SE9302985D0 (sv) 1993-09-14
ES2078864A2 (es) 1995-12-16
SE515115C2 (sv) 2001-06-11
NL194246C (nl) 2001-10-02
ES2078864B1 (es) 1997-05-16
ITTO930654A0 (it) 1993-09-08
GB9318814D0 (en) 1993-10-27
GB9219450D0 (en) 1992-10-28
DE4331355A1 (de) 1994-03-17
GB2270561A (en) 1994-03-16
CZ9301924A3 (cs) 2001-12-12
PT101364A (pt) 1994-12-30
CZ289962B6 (cs) 2002-05-15
GB2270561B (en) 1996-07-17
BE1006795A3 (fr) 1994-12-13
FR2695721A1 (fr) 1994-03-18
JPH06201333A (ja) 1994-07-19
CN1049045C (zh) 2000-02-02
ITTO930654A1 (it) 1995-03-08
CN1085655A (zh) 1994-04-20
LU88402A1 (fr) 1995-04-05
NL9301577A (nl) 1994-04-05
US5396080A (en) 1995-03-07
FI933971A0 (fi) 1993-09-10
PT101364B (pt) 1999-11-30
ES2078864R (sv) 1996-12-16
AU4487393A (en) 1994-03-24
CA2105635A1 (en) 1994-03-16

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