SE9302985L - Övervakning av tunna filmers tjocklek på ett substrat - Google Patents

Övervakning av tunna filmers tjocklek på ett substrat

Info

Publication number
SE9302985L
SE9302985L SE9302985A SE9302985A SE9302985L SE 9302985 L SE9302985 L SE 9302985L SE 9302985 A SE9302985 A SE 9302985A SE 9302985 A SE9302985 A SE 9302985A SE 9302985 L SE9302985 L SE 9302985L
Authority
SE
Sweden
Prior art keywords
monitoring
coating
lies
thickness
range
Prior art date
Application number
SE9302985A
Other languages
English (en)
Swedish (sv)
Other versions
SE515115C2 (sv
SE9302985D0 (sv
Inventor
Michel Hannotiau
Guy Renard
Robert Terneu
Original Assignee
Glaverbel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel filed Critical Glaverbel
Publication of SE9302985D0 publication Critical patent/SE9302985D0/xx
Publication of SE9302985L publication Critical patent/SE9302985L/
Publication of SE515115C2 publication Critical patent/SE515115C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
SE9302985A 1992-09-15 1993-09-14 Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat SE515115C2 (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (3)

Publication Number Publication Date
SE9302985D0 SE9302985D0 (sv) 1993-09-14
SE9302985L true SE9302985L (sv) 1994-03-16
SE515115C2 SE515115C2 (sv) 2001-06-11

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9302985A SE515115C2 (sv) 1992-09-15 1993-09-14 Metod och anordning att anbringa och övervaka tunna filmer och deras tjocklek på ett skivformat substrat

Country Status (17)

Country Link
US (1) US5396080A ( )
JP (1) JPH06201333A ( )
CN (1) CN1049045C ( )
AU (1) AU664474B2 ( )
BE (1) BE1006795A3 ( )
CA (1) CA2105635A1 ( )
CZ (1) CZ289962B6 ( )
DE (1) DE4331355A1 ( )
ES (1) ES2078864B1 ( )
FI (1) FI933971A ( )
FR (1) FR2695721B1 ( )
GB (2) GB9219450D0 ( )
IT (1) IT1261253B ( )
LU (1) LU88402A1 ( )
NL (1) NL194246C ( )
PT (1) PT101364B ( )
SE (1) SE515115C2 ( )

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DE19735246C2 (de) * 1997-08-14 1999-07-15 Bayern Freistaat Verfahren zur Bestimmung eines Volumens
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US8666202B2 (en) 2012-02-20 2014-03-04 Cardinal Ig Company System and method for measuring properties of a thin film coated glass
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Also Published As

Publication number Publication date
ES2078864B1 (es) 1997-05-16
FI933971A (fi) 1994-03-16
FR2695721B1 (fr) 1995-02-24
ES2078864R ( ) 1996-12-16
US5396080A (en) 1995-03-07
DE4331355A1 (de) 1994-03-17
AU664474B2 (en) 1995-11-16
BE1006795A3 (fr) 1994-12-13
GB2270561A (en) 1994-03-16
GB2270561B (en) 1996-07-17
NL194246B (nl) 2001-06-01
ITTO930654A0 (it) 1993-09-08
JPH06201333A (ja) 1994-07-19
PT101364B (pt) 1999-11-30
LU88402A1 (fr) 1995-04-05
SE515115C2 (sv) 2001-06-11
AU4487393A (en) 1994-03-24
NL194246C (nl) 2001-10-02
CZ289962B6 (cs) 2002-05-15
GB9318814D0 (en) 1993-10-27
IT1261253B (it) 1996-05-09
FI933971A0 (fi) 1993-09-10
CN1049045C (zh) 2000-02-02
FR2695721A1 (fr) 1994-03-18
ITTO930654A1 (it) 1995-03-08
SE9302985D0 (sv) 1993-09-14
CN1085655A (zh) 1994-04-20
CA2105635A1 (en) 1994-03-16
NL9301577A (nl) 1994-04-05
CZ9301924A3 (cs) 2001-12-12
ES2078864A2 (es) 1995-12-16
PT101364A (pt) 1994-12-30
GB9219450D0 (en) 1992-10-28

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