FR2695721B1 - Contrôle de l'épaisseur de couches minces. - Google Patents

Contrôle de l'épaisseur de couches minces.

Info

Publication number
FR2695721B1
FR2695721B1 FR9310761A FR9310761A FR2695721B1 FR 2695721 B1 FR2695721 B1 FR 2695721B1 FR 9310761 A FR9310761 A FR 9310761A FR 9310761 A FR9310761 A FR 9310761A FR 2695721 B1 FR2695721 B1 FR 2695721B1
Authority
FR
France
Prior art keywords
thickness
control
thin layers
layers
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9310761A
Other languages
English (en)
Other versions
FR2695721A1 (fr
Inventor
Michel Hannotiau
Guy Renard
Robert Terneu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Publication of FR2695721A1 publication Critical patent/FR2695721A1/fr
Application granted granted Critical
Publication of FR2695721B1 publication Critical patent/FR2695721B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FR9310761A 1992-09-15 1993-09-08 Contrôle de l'épaisseur de couches minces. Expired - Fee Related FR2695721B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929219450A GB9219450D0 (en) 1992-09-15 1992-09-15 Thin film thickness monitoring and control

Publications (2)

Publication Number Publication Date
FR2695721A1 FR2695721A1 (fr) 1994-03-18
FR2695721B1 true FR2695721B1 (fr) 1995-02-24

Family

ID=10721896

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9310761A Expired - Fee Related FR2695721B1 (fr) 1992-09-15 1993-09-08 Contrôle de l'épaisseur de couches minces.

Country Status (17)

Country Link
US (1) US5396080A (fr)
JP (1) JPH06201333A (fr)
CN (1) CN1049045C (fr)
AU (1) AU664474B2 (fr)
BE (1) BE1006795A3 (fr)
CA (1) CA2105635A1 (fr)
CZ (1) CZ289962B6 (fr)
DE (1) DE4331355A1 (fr)
ES (1) ES2078864B1 (fr)
FI (1) FI933971A (fr)
FR (1) FR2695721B1 (fr)
GB (2) GB9219450D0 (fr)
IT (1) IT1261253B (fr)
LU (1) LU88402A1 (fr)
NL (1) NL194246C (fr)
PT (1) PT101364B (fr)
SE (1) SE515115C2 (fr)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4413745A1 (de) * 1994-04-20 1995-10-26 Gramm Gmbh & Co Kg Verfahren und Vorrichtung zur Kontrolle der Oberfläche von Gegenständen
JP2648098B2 (ja) * 1994-07-29 1997-08-27 日本電気株式会社 薄膜形成装置
JP3308135B2 (ja) * 1994-11-01 2002-07-29 松下電器産業株式会社 インプロセス膜厚モニター装置及び方法
US5835225A (en) * 1994-11-30 1998-11-10 Micron Technology, Inc. Surface properties detection by reflectance metrology
DE19509345A1 (de) * 1995-03-15 1996-09-19 Ver Glaswerke Gmbh Verfahren zum Erkennen und Bewerten von Fehlern in teilreflektierenden Oberflächenschichten
US5619330A (en) * 1995-12-22 1997-04-08 Thomson Consumer Electronics, Inc. Method and apparatus for determining thickness of an OPC layer on a CRT faceplate panel
DE19735246C2 (de) * 1997-08-14 1999-07-15 Bayern Freistaat Verfahren zur Bestimmung eines Volumens
DE19821401C2 (de) * 1998-05-13 2000-05-18 Storz Endoskop Gmbh Schaffhaus Endoskop zur Inspektion eines Beobachtungsraumes
US6392756B1 (en) 1999-06-18 2002-05-21 N&K Technology, Inc. Method and apparatus for optically determining physical parameters of thin films deposited on a complex substrate
EP1069401A1 (fr) * 1999-07-13 2001-01-17 ODME International B.V. Appareil pour la mesure optique de l'epaisseur de couches
US6091485A (en) * 1999-12-15 2000-07-18 N & K Technology, Inc. Method and apparatus for optically determining physical parameters of underlayers
US6472238B1 (en) * 2000-02-09 2002-10-29 Therma-Wave, Inc. Evaluation of etching processes in semiconductors
US6570650B1 (en) * 2001-06-21 2003-05-27 Kla-Tenor Corporation Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces
US6825933B2 (en) 2002-06-07 2004-11-30 N&K Technology, Inc. Computer-implemented reflectance system and method for non-destructive low dose ion implantation monitoring
TWI372463B (en) 2003-12-02 2012-09-11 Semiconductor Energy Lab Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device
EP1553643A3 (fr) 2003-12-26 2009-01-21 Sel Semiconductor Energy Laboratory Co., Ltd. Méthode d'irradiation par laser et méthode de fabrication d'un film cristallin et semiconducteur
ATE386144T1 (de) * 2004-06-01 2008-03-15 Applied Materials Gmbh & Co Kg Messvorrichtung für die messung des transmissionsgrads einer beschichtung
DE102004034693B4 (de) * 2004-07-17 2006-05-18 Schott Ag Verfahren und Vorrichtung zur berührungslosen optischen Messung der Dicke von heißen Glaskörpern mittels der chromatischen Aberration
DE102004037555B4 (de) * 2004-08-03 2012-09-06 Erlus Aktiengesellschaft Verfahren zur berührungslosen und/oder zerstörungsfreien Prüfung einer photokatalytischen Oberflächenbeschichtung
US20060054843A1 (en) * 2004-09-13 2006-03-16 Electronic Design To Market, Inc. Method and apparatus of improving optical reflection images of a laser on a changing surface location
US8084260B2 (en) * 2004-11-24 2011-12-27 Applied Biosystems, Llc Spectral calibration method and system for multiple instruments
JP4930748B2 (ja) * 2005-01-28 2012-05-16 大日本印刷株式会社 被膜検査装置および方法
CN100337091C (zh) * 2005-11-07 2007-09-12 友达光电股份有限公司 光学膜层厚度均匀性的监测方法
WO2009111053A2 (fr) 2008-03-05 2009-09-11 Global Solar Energy, Inc. Dépôt de couche tampon pour piles solaires à film mince
US20100087015A1 (en) * 2008-03-05 2010-04-08 Global Solar Energy, Inc. Feedback for buffer layer deposition
EP2251455B1 (fr) 2009-05-13 2017-09-06 SiO2 Medical Products, Inc. Revêtement PECVD utilisant un précurseur organosilicié
US7985188B2 (en) * 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9066072B2 (en) * 2010-07-20 2015-06-23 Semiconductor Components Industries, Llc Systems and methods for calibrating image sensors
WO2012024278A1 (fr) * 2010-08-16 2012-02-23 First Solar, Inc. Système et procédé de mesure
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US8982362B2 (en) * 2011-10-04 2015-03-17 First Solar, Inc. System and method for measuring layer thickness and depositing semiconductor layers
CN103930595A (zh) 2011-11-11 2014-07-16 Sio2医药产品公司 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US8666202B2 (en) 2012-02-20 2014-03-04 Cardinal Ig Company System and method for measuring properties of a thin film coated glass
US8855450B2 (en) 2012-02-20 2014-10-07 Cardinal Cg Company System and method for measuring properties of a thin film coated glass
CA2887352A1 (fr) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Enrobage protecteur en saccharide pour conditionnement pharmaceutique
KR101897835B1 (ko) * 2012-07-24 2018-09-12 삼성에스디아이 주식회사 극판 두께 측정 장치 및 방법
CN104854257B (zh) 2012-11-01 2018-04-13 Sio2医药产品公司 涂层检查方法
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
WO2014085348A2 (fr) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Contrôle de l'uniformité de dépôt chimique en phase vapeur activé par plasma (pecvd) sur des seringues médicales, des cartouches et analogues
EP2961858B1 (fr) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Seringue revetu.
WO2014164928A1 (fr) 2013-03-11 2014-10-09 Sio2 Medical Products, Inc. Emballage muni d'un revêtement
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US20160017490A1 (en) 2013-03-15 2016-01-21 Sio2 Medical Products, Inc. Coating method
DE102014100594A1 (de) 2014-01-20 2015-07-23 Isra Surface Vision Gmbh Vorrichtung zur Inspektion eines mit einer beschichteten Oberfläche versehenen Materials und entsprechendes Verfahren
US9996765B2 (en) 2014-03-12 2018-06-12 The Sherwin-Williams Company Digital imaging for determining mix ratio of a coating
CA2942509C (fr) * 2014-03-12 2018-09-11 The Sherwin-Williams Company Imagerie numerique en temps reel amelioree pour la prediction, l'application et l'inspection de revetements
EP3693493A1 (fr) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Revêtements antistatiques pour récipients en plastique
WO2015165503A1 (fr) * 2014-04-29 2015-11-05 Hewlett-Packard Indigo B.V. Mesure d'épaisseur de couche transparente
EP3218317B1 (fr) 2014-11-13 2018-10-17 Gerresheimer Glas GmbH Filtre à particules de machine de formage de verre, unité de piston, tête de soufflage, support de tête de soufflage et machine de formage de verre adaptée audit filtre ou le comprenant
CN105115430B (zh) * 2015-05-26 2016-08-31 山东建筑大学 一种点栅透射式化学药液涂抹均匀性检测方法及装置
US9702689B2 (en) * 2015-06-18 2017-07-11 Xerox Corporation Use of a full width array imaging sensor to measure real time film thicknesses on film manufacturing equipment
JP2017013408A (ja) * 2015-07-02 2017-01-19 株式会社リコー 被処理物改質装置、被処理物改質システム、画像形成システムおよび画像形成方法
CA3204930A1 (fr) 2015-08-18 2017-02-23 Sio2 Medical Products, Inc. Conditionnement pharmaceutique et autre presentant un faible taux de transmission d'oxygene
US10788314B2 (en) * 2016-01-07 2020-09-29 Arkema Inc. Object position independent method to measure the thickness of coatings deposited on curved objects moving at high rates
US11125549B2 (en) 2016-01-07 2021-09-21 Arkema Inc. Optical intensity method to measure the thickness of coatings deposited on substrates
ES2917217T3 (es) * 2016-01-07 2022-07-07 Arkema Inc Método óptico para medir el grosor de recubrimientos depositados sobre sustratos
CN107179055B (zh) * 2017-05-28 2019-11-01 中国计量大学 用于bopp薄膜生产的薄膜厚度监测方法
CN107782280B (zh) * 2017-10-20 2020-09-01 维沃移动通信有限公司 一种贴膜厚度的检测方法和移动终端
WO2019099415A1 (fr) * 2017-11-14 2019-05-23 Kateeva, Inc. Systèmes et procédés de profilage d'une couche de matériau sur un substrat
US10138539B1 (en) * 2018-04-03 2018-11-27 Shiping Cheng Method of managing coating uniformity with an optical thickness monitoring system
DE102018110931C5 (de) 2018-05-07 2023-06-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und System zum Erfassen der Oberflächenbelegung einer Beschichtung auf einer Oberfläche eines bandförmigen Prüflings
US20200033723A1 (en) * 2018-07-30 2020-01-30 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor Manufacturing Apparatus and Method Thereof
DE102019112238A1 (de) * 2019-05-10 2020-11-12 HELLA GmbH & Co. KGaA Verfahren zur Kontrolle der Beschichtung eines elektronischen Bauteils
DE102019114242A1 (de) * 2019-05-28 2020-12-03 Infineon Technologies Ag Verfahren zum bereitstellen von beschichteten leadframes oder zum messen einer adhäsionskraft eines verkapselungsmittels auf einem leadframe
FR3116118A1 (fr) * 2020-11-12 2022-05-13 Exelsius Dispositif de caractérisation de l’état de réticulation d’un matériau d’un objet.
CN114292032B (zh) * 2021-12-30 2023-07-25 凯盛信息显示材料(洛阳)有限公司 一种导电玻璃的在线镀膜方法及在线镀膜装置
CN115807219B (zh) * 2023-02-13 2023-05-30 南昌大学 一种光电薄膜材料制备控制系统及方法
CN116603716B (zh) * 2023-04-28 2024-03-29 宁波市融嘉轻合金科技有限公司 一种压铸件表面处理方法、系统、智能终端及存储介质
CN118051069A (zh) * 2024-03-29 2024-05-17 广州泽亨实业有限公司 一种涂层厚度自动控制方法和系统

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2229323A5 (fr) * 1973-01-11 1974-12-06 Saint Gobain
US3892490A (en) * 1974-03-06 1975-07-01 Minolta Camera Kk Monitoring system for coating a substrate
GB2016678B (en) * 1978-03-10 1982-09-15 Asahi Dow Ltd Infrared multilayer film thickness measuring method and apparatus
US4355903A (en) * 1980-02-08 1982-10-26 Rca Corporation Thin film thickness monitor
JPS5830605A (ja) * 1981-08-18 1983-02-23 Kawasaki Steel Corp 表面被膜厚さ測定方法
JPS5840973A (ja) * 1981-09-03 1983-03-10 Toshiba Corp 光学式情報読取装置
JPS617445A (ja) * 1984-06-21 1986-01-14 Toshiba Corp 銅酸化被膜の酸化度判別装置
GB8528448D0 (en) * 1985-11-19 1985-12-24 Infrared Eng Ltd Absorption gauge
US4785336A (en) * 1986-12-04 1988-11-15 Libbey-Owens-Ford Co. Device for monitoring characteristics of a film on a substrate
US4748329A (en) * 1987-02-17 1988-05-31 Canadian Patents And Development Ltd. Method for on-line thickness monitoring of a transparent film
ES2007965A6 (es) * 1988-07-15 1989-07-01 Serrano Juan Jose Monzon Procedimiento y aparato para medir simultaneamente el indice de refraccion, el coeficiente de absorcion y el espesor de laminas planoparalelas.
US4977330A (en) * 1989-02-13 1990-12-11 Batchelder Tom W In-line photoresist thickness monitor
US5101111A (en) * 1989-07-13 1992-03-31 Dainippon Screen Mfg. Co., Ltd. Method of measuring thickness of film with a reference sample having a known reflectance
DE4017440C2 (de) * 1990-05-30 1994-02-10 Fraunhofer Ges Forschung Verfahren zur Messung der Schichtdicke und des Brechungsindex einer dünnen Schicht auf einem Substrat und Vorrichtung zur Durchführung des Verfahrens
IL96483A (en) * 1990-11-27 1995-07-31 Orbotech Ltd Optical inspection method and apparatus

Also Published As

Publication number Publication date
GB9318814D0 (en) 1993-10-27
IT1261253B (it) 1996-05-09
LU88402A1 (fr) 1995-04-05
SE9302985D0 (sv) 1993-09-14
ES2078864R (fr) 1996-12-16
GB2270561A (en) 1994-03-16
SE515115C2 (sv) 2001-06-11
PT101364B (pt) 1999-11-30
CZ9301924A3 (cs) 2001-12-12
CN1085655A (zh) 1994-04-20
SE9302985L (sv) 1994-03-16
NL194246B (nl) 2001-06-01
ES2078864A2 (es) 1995-12-16
NL9301577A (nl) 1994-04-05
CN1049045C (zh) 2000-02-02
GB9219450D0 (en) 1992-10-28
GB2270561B (en) 1996-07-17
DE4331355A1 (de) 1994-03-17
AU4487393A (en) 1994-03-24
CA2105635A1 (fr) 1994-03-16
FI933971A (fi) 1994-03-16
JPH06201333A (ja) 1994-07-19
FR2695721A1 (fr) 1994-03-18
AU664474B2 (en) 1995-11-16
PT101364A (pt) 1994-12-30
ITTO930654A0 (it) 1993-09-08
US5396080A (en) 1995-03-07
ES2078864B1 (es) 1997-05-16
FI933971A0 (fi) 1993-09-10
ITTO930654A1 (it) 1995-03-08
NL194246C (nl) 2001-10-02
BE1006795A3 (fr) 1994-12-13
CZ289962B6 (cs) 2002-05-15

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