SE7714551L - Forfarande for framstellning av reliefartade uppteckningar - Google Patents

Forfarande for framstellning av reliefartade uppteckningar

Info

Publication number
SE7714551L
SE7714551L SE7714551A SE7714551A SE7714551L SE 7714551 L SE7714551 L SE 7714551L SE 7714551 A SE7714551 A SE 7714551A SE 7714551 A SE7714551 A SE 7714551A SE 7714551 L SE7714551 L SE 7714551L
Authority
SE
Sweden
Prior art keywords
layer
photopolymerizable
support
permanent
improvement
Prior art date
Application number
SE7714551A
Other languages
English (en)
Other versions
SE435108B (sv
Inventor
W Franke
Original Assignee
Hoechst Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoechst Ag filed Critical Hoechst Ag
Publication of SE7714551L publication Critical patent/SE7714551L/sv
Publication of SE435108B publication Critical patent/SE435108B/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G03F1/56—Organic absorbers, e.g. of photo-resists
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • G03F7/0955—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer one of the photosensitive systems comprising a non-macromolecular photopolymerisable compound having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/136—Coating process making radiation sensitive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Laminated Bodies (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
SE7714551A 1976-12-23 1977-12-21 Forfarande for framstellning av reliefartade uppteckningar genom att kontinuerligt pafora minst tva fotopolymeriserbara delskikt pa en temporer berare SE435108B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2658422A DE2658422C2 (de) 1976-12-23 1976-12-23 Verfahren zur Herstellung eines Negativ-Trockenresistfilms

Publications (2)

Publication Number Publication Date
SE7714551L true SE7714551L (sv) 1978-06-24
SE435108B SE435108B (sv) 1984-09-03

Family

ID=5996394

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7714551A SE435108B (sv) 1976-12-23 1977-12-21 Forfarande for framstellning av reliefartade uppteckningar genom att kontinuerligt pafora minst tva fotopolymeriserbara delskikt pa en temporer berare

Country Status (11)

Country Link
US (1) US4337308A (sv)
JP (1) JPS5382322A (sv)
BE (1) BE862048A (sv)
BR (1) BR7708588A (sv)
CH (1) CH635203A5 (sv)
DE (1) DE2658422C2 (sv)
FR (1) FR2375624A1 (sv)
GB (1) GB1597607A (sv)
IT (1) IT1090632B (sv)
NL (1) NL186723C (sv)
SE (1) SE435108B (sv)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55501072A (sv) * 1978-12-25 1980-12-04
US4349620A (en) 1979-06-15 1982-09-14 E. I. Du Pont De Nemours And Company Solvent developable photoresist film
JPS58134632A (ja) * 1982-02-05 1983-08-10 Mitsubishi Rayon Co Ltd 感光性積層物
US4504566A (en) * 1982-11-01 1985-03-12 E. I. Du Pont De Nemours And Company Single exposure positive contact multilayer photosolubilizable litho element with two quinone diazide layers
US4786569A (en) * 1985-09-04 1988-11-22 Ciba-Geigy Corporation Adhesively bonded photostructurable polyimide film
DE3606266A1 (de) * 1986-02-27 1987-09-03 Basf Ag Lichtempfindliches aufzeichnungselement
DE3618373A1 (de) * 1986-05-31 1987-12-03 Basf Ag Lichtempfindliches aufzeichnungselement
DE3827245A1 (de) * 1988-08-11 1990-02-15 Hoechst Ag Photopolymerisierbares aufzeichnungsmaterial
DE4024908A1 (de) * 1990-08-06 1992-02-20 Ant Nachrichtentech Verfahren zum herstellen von resistmustern auf substraten
US5288589A (en) * 1992-12-03 1994-02-22 Mckeever Mark R Aqueous processable, multilayer, photoimageable permanent coatings for printed circuits
US5405731A (en) * 1992-12-22 1995-04-11 E. I. Du Pont De Nemours And Company Aqueous processable, multilayer, photoimageable permanent coatings for printed circuits
EP0729071A1 (de) * 1995-02-15 1996-08-28 Schablonentechnik Kufstein Aktiengesellschaft Verfahren zur Herstellung einer Druckschablone
KR100599219B1 (ko) 1999-06-24 2006-07-12 히다치 가세고교 가부시끼가이샤 감광성 엘리먼트, 감광성 엘리먼트롤, 이것을 사용한레지스트패턴의 제조법, 레지스트패턴, 레지스트패턴적층기판, 배선패턴의 제조법 및 배선패턴
JP2004020643A (ja) * 2002-06-12 2004-01-22 Fuji Photo Film Co Ltd ドライフィルムレジスト及びプリント基板の製造方法
JP5264589B2 (ja) * 2008-03-28 2013-08-14 富士フイルム株式会社 同時２光子吸収３次元光記録媒体および同時２光子３次元光記録方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2964401A (en) * 1957-02-18 1960-12-13 Du Pont Photopolymerizable elements and processes
GB841454A (en) * 1957-09-16 1960-07-13 Du Pont Improvements in or relating to photopolymerisable elements
NL245513A (sv) * 1959-01-23
US3615435A (en) * 1968-02-14 1971-10-26 Du Pont Photohardenable image reproduction element with integral pigmented layer and process for use
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists
BE755709A (fr) * 1969-10-29 1971-02-15 Shipley Co Procede d'application d'une reserve photographique sur un support et produit obtenu
BE759791A (nl) * 1969-12-11 1971-06-03 Agfa Gevaert Nv Installatie voor het opdragen van verschillende lagen
US3785817A (en) * 1970-10-05 1974-01-15 A Kuchta Transfer of photopolymer images by irradiation
CA993709A (en) * 1971-01-21 1976-07-27 Leo Roos Composite, mask-forming photohardenable elements
US3770438A (en) * 1971-12-09 1973-11-06 J Celeste Photopolymerizable transfer elements
US3982943A (en) * 1974-03-05 1976-09-28 Ibm Corporation Lift-off method of fabricating thin films and a structure utilizable as a lift-off mask
DE2448850C2 (de) * 1974-10-14 1986-03-13 Hoechst Ag, 6230 Frankfurt Verfahren zum Übertragen einer trockenen thermoplastischen photopolymerisierbaren Schicht und Schichtübertragungsmaterial
JPS6032173B2 (ja) * 1974-12-28 1985-07-26 富士写真フイルム株式会社 画像形成法

Also Published As

Publication number Publication date
FR2375624B1 (sv) 1980-08-22
JPS5382322A (en) 1978-07-20
US4337308A (en) 1982-06-29
IT1090632B (it) 1985-06-26
CH635203A5 (de) 1983-03-15
BE862048A (fr) 1978-06-20
NL186723C (nl) 1991-02-01
BR7708588A (pt) 1978-08-08
FR2375624A1 (fr) 1978-07-21
NL7714128A (nl) 1978-06-27
SE435108B (sv) 1984-09-03
DE2658422C2 (de) 1986-05-22
GB1597607A (en) 1981-09-09
JPS6131855B2 (sv) 1986-07-23
NL186723B (nl) 1990-09-03
DE2658422A1 (de) 1978-06-29

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