SE520802C2 - Skärverktyg belagt med aluminiumoxid och process för dess tillverkning - Google Patents

Skärverktyg belagt med aluminiumoxid och process för dess tillverkning

Info

Publication number
SE520802C2
SE520802C2 SE9704066A SE9704066A SE520802C2 SE 520802 C2 SE520802 C2 SE 520802C2 SE 9704066 A SE9704066 A SE 9704066A SE 9704066 A SE9704066 A SE 9704066A SE 520802 C2 SE520802 C2 SE 520802C2
Authority
SE
Sweden
Prior art keywords
al2o3
layer
coating
layers
coated
Prior art date
Application number
SE9704066A
Other languages
English (en)
Swedish (sv)
Other versions
SE9704066D0 (sv
SE9704066L (sv
Inventor
Siegfried Schiller
Klaus Goedicke
Fred Fietzke
Olaf Zywitzki
Mats Sjoestrand
Bjoern Ljungberg
Tomas Hilding
Viveka Alfredsson
Original Assignee
Sandvik Ab
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sandvik Ab, Fraunhofer Ges Forschung filed Critical Sandvik Ab
Priority to SE9704066A priority Critical patent/SE520802C2/sv
Publication of SE9704066D0 publication Critical patent/SE9704066D0/xx
Priority to BR9813186-9A priority patent/BR9813186A/pt
Priority to KR1020007003870A priority patent/KR100614961B1/ko
Priority to PCT/SE1998/002009 priority patent/WO1999024634A1/fr
Priority to EP02013750A priority patent/EP1253215B1/fr
Priority to AT02013750T priority patent/ATE286155T1/de
Priority to PL98340602A priority patent/PL340602A1/xx
Priority to DE69828453T priority patent/DE69828453T2/de
Priority to US09/187,006 priority patent/US6210726B1/en
Priority to DE69821516T priority patent/DE69821516T2/de
Priority to EP98954899A priority patent/EP1029105B1/fr
Priority to CN98810834A priority patent/CN1278307A/zh
Priority to AT98954899T priority patent/ATE259003T1/de
Priority to RU2000114171/02A priority patent/RU2206432C2/ru
Priority to JP2000519623A priority patent/JP2001522725A/ja
Publication of SE9704066L publication Critical patent/SE9704066L/
Priority to US09/782,226 priority patent/US6423403B2/en
Priority to US10/151,821 priority patent/US6673430B2/en
Publication of SE520802C2 publication Critical patent/SE520802C2/sv

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354—Introduction of auxiliary energy into the plasma
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Drilling Tools (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
SE9704066A 1997-11-06 1997-11-06 Skärverktyg belagt med aluminiumoxid och process för dess tillverkning SE520802C2 (sv)

Priority Applications (17)

Application Number Priority Date Filing Date Title
SE9704066A SE520802C2 (sv) 1997-11-06 1997-11-06 Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
JP2000519623A JP2001522725A (ja) 1997-11-06 1998-11-06 ＰＶＤＡｌ２Ｏ３被覆切削工具
US09/187,006 US6210726B1 (en) 1997-11-06 1998-11-06 PVD Al2O3 coated cutting tool
EP98954899A EP1029105B1 (fr) 1997-11-06 1998-11-06 OUTIL DE COUPE A ENROBAGE D'Al2O3 PAR DEPOT PAR EVAPORATION SOUS VIDE
PCT/SE1998/002009 WO1999024634A1 (fr) 1997-11-06 1998-11-06 Outil de coupe a enrobage d'al2o3 par depot par evaporation sous vide
EP02013750A EP1253215B1 (fr) 1997-11-06 1998-11-06 Outil de coupe revêtu avec Al2O3 déposé par PVD
AT02013750T ATE286155T1 (de) 1997-11-06 1998-11-06 Mit pvd-al2o3 beschichtetes schneidwerkzeug
PL98340602A PL340602A1 (en) 1997-11-06 1998-11-06 Cutting tool plated with a1203 by pvd (physical vacuum depositing) process
DE69828453T DE69828453T2 (de) 1997-11-06 1998-11-06 Mit PVD-Al2O3 beschichtetes Schneidwerkzeug
BR9813186-9A BR9813186A (pt) 1997-11-06 1998-11-06 Ferramenta de corte revestida pela deposição fìsica de vapor (pvd) deai2o3
DE69821516T DE69821516T2 (de) 1997-11-06 1998-11-06 PVD Al2O3 BESCHICHTETES SCHNEIDWERKZEUG
KR1020007003870A KR100614961B1 (ko) 1997-11-06 1998-11-06 ＰＶＤ Ａｌ₂Ｏ₃으로 코팅된 절삭 공구
CN98810834A CN1278307A (zh) 1997-11-06 1998-11-06 PVDAl2O3涂层刀具
AT98954899T ATE259003T1 (de) 1997-11-06 1998-11-06 Pvd al2o3 beschichtetes schneidwerkzeug
RU2000114171/02A RU2206432C2 (ru) 1997-11-06 1998-11-06 Режущий инструмент и способ его изготовления
US09/782,226 US6423403B2 (en) 1997-11-06 2001-02-14 PVD Al2O3 coated cutting tool
US10/151,821 US6673430B2 (en) 1997-11-06 2002-05-22 PVD Al2O3 coated cutting tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9704066A SE520802C2 (sv) 1997-11-06 1997-11-06 Skärverktyg belagt med aluminiumoxid och process för dess tillverkning

Publications (3)

Publication Number Publication Date
SE9704066D0 SE9704066D0 (sv) 1997-11-06
SE9704066L SE9704066L (sv) 1999-05-07
SE520802C2 true SE520802C2 (sv) 2003-08-26

Family

ID=20408890

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9704066A SE520802C2 (sv) 1997-11-06 1997-11-06 Skärverktyg belagt med aluminiumoxid och process för dess tillverkning

Country Status (12)

Country Link
US (3) US6210726B1 (fr)
EP (2) EP1029105B1 (fr)
JP (1) JP2001522725A (fr)
KR (1) KR100614961B1 (fr)
CN (1) CN1278307A (fr)
AT (2) ATE286155T1 (fr)
BR (1) BR9813186A (fr)
DE (2) DE69828453T2 (fr)
PL (1) PL340602A1 (fr)
RU (1) RU2206432C2 (fr)
SE (1) SE520802C2 (fr)
WO (1) WO1999024634A1 (fr)

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SE520802C2 (sv) 1997-11-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
SE518134C2 (sv) * 1997-12-10 2002-09-03 Sandvik Ab Multiskiktbelagt skärverktyg
SE519921C2 (sv) 1999-05-06 2003-04-29 Sandvik Ab PVD-belagt skärverktyg och metod för dess framställning
SE520795C2 (sv) * 1999-05-06 2003-08-26 Sandvik Ab Skärverktyg belagt med aluminiumoxid och process för dess tillverkning
SE521284C2 (sv) * 1999-05-19 2003-10-21 Sandvik Ab Aluminiumoxidbelagt skärverktyg för metallbearbetning
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US6689450B2 (en) * 2001-03-27 2004-02-10 Seco Tools Ab Enhanced Al2O3-Ti(C,N) multi-coating deposited at low temperature
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US10358712B2 (en) 2014-09-03 2019-07-23 Mitsubishi Materials Corporation Surface-coated cutting tool and method of manufacturing the same
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CN105088163A (zh) * 2015-09-22 2015-11-25 苏州格科特真空镀膜技术有限公司 一种在硬质合金刀片表面制备晶态Al2O3涂层的方法
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EP3263743A1 (fr) * 2016-06-29 2018-01-03 Sandvik Intellectual Property AB Outil de coupe revêtu de pvd
JP7393946B2 (ja) * 2017-04-07 2023-12-07 サンドビック インテレクチュアル プロパティー アクティエボラーグ コーティングされた切削工具
EP3461928B1 (fr) * 2017-09-29 2020-11-11 Walter Ag Revêtements tacno et procédé de production
CN111279011B (zh) * 2017-11-07 2023-04-28 瓦尔特公开股份有限公司 沉积Al2O3的PVD工艺和具有至少一层Al2O3的被涂覆过的切削工具
EP3744450B1 (fr) * 2018-01-26 2024-09-04 Kyocera Corporation Outil revêtu et outil de coupe le comprenant
RU2676719C1 (ru) * 2018-02-14 2019-01-10 Федеральное государственное бюджетное учреждение науки Институт электрофизики Уральского отделения Российской академии наук Способ низкотемпературного нанесения нанокристаллического покрытия из альфа-оксида алюминия
KR102112084B1 (ko) * 2018-11-30 2020-05-18 한국야금 주식회사 절삭공구용 경질피막
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EP0701982B1 (fr) 1994-09-16 2002-07-03 Sumitomo Electric Industries, Limited Film stratifié à particules ultrafines et matériau composite dur pour outils ayant ce film
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EP1029105A1 (fr) 2000-08-23
CN1278307A (zh) 2000-12-27
BR9813186A (pt) 2000-08-22
US6423403B2 (en) 2002-07-23
PL340602A1 (en) 2001-02-12
WO1999024634A1 (fr) 1999-05-20
US20030027015A1 (en) 2003-02-06
SE9704066D0 (sv) 1997-11-06
JP2001522725A (ja) 2001-11-20
SE9704066L (sv) 1999-05-07
KR20010072535A (ko) 2001-07-31
US20010049011A1 (en) 2001-12-06
US6210726B1 (en) 2001-04-03
EP1253215A2 (fr) 2002-10-30
DE69821516T2 (de) 2004-07-01
US6673430B2 (en) 2004-01-06
RU2206432C2 (ru) 2003-06-20
ATE259003T1 (de) 2004-02-15
DE69828453T2 (de) 2005-06-02
KR100614961B1 (ko) 2006-08-25
EP1253215B1 (fr) 2004-12-29
EP1253215A3 (fr) 2003-01-02
DE69828453D1 (de) 2005-02-03
ATE286155T1 (de) 2005-01-15
DE69821516D1 (de) 2004-03-11
EP1029105B1 (fr) 2004-02-04

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