SE512378C2 - För stämgaffelgyro avsett elektrodmönster - Google Patents

För stämgaffelgyro avsett elektrodmönster

Info

Publication number
SE512378C2
SE512378C2 SE9100043A SE9100043A SE512378C2 SE 512378 C2 SE512378 C2 SE 512378C2 SE 9100043 A SE9100043 A SE 9100043A SE 9100043 A SE9100043 A SE 9100043A SE 512378 C2 SE512378 C2 SE 512378C2
Authority
SE
Sweden
Prior art keywords
electrodes
tuning fork
plane
electrode pattern
leg
Prior art date
Application number
SE9100043A
Other languages
English (en)
Swedish (sv)
Other versions
SE9100043L (sv
SE9100043D0 (sv
Inventor
Jan Soederkvist
Bo Nilsson-Almqvist
Tony Holm
Fredrik Boerjesson
Original Assignee
Colibri Pro Dev Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Colibri Pro Dev Ab filed Critical Colibri Pro Dev Ab
Priority to SE9100043A priority Critical patent/SE512378C2/sv
Publication of SE9100043D0 publication Critical patent/SE9100043D0/xx
Priority to DE69119738T priority patent/DE69119738T2/de
Priority to EP91850325A priority patent/EP0494588B1/de
Priority to AT91850325T priority patent/ATE138471T1/de
Priority to JP4019513A priority patent/JP2681237B2/ja
Priority to US07/817,814 priority patent/US5329816A/en
Publication of SE9100043L publication Critical patent/SE9100043L/xx
Publication of SE512378C2 publication Critical patent/SE512378C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5614—Signal processing

Landscapes

  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
SE9100043A 1991-01-08 1991-01-08 För stämgaffelgyro avsett elektrodmönster SE512378C2 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9100043A SE512378C2 (sv) 1991-01-08 1991-01-08 För stämgaffelgyro avsett elektrodmönster
DE69119738T DE69119738T2 (de) 1991-01-08 1991-12-19 Stimmgabelgesteuerter Kreisel
EP91850325A EP0494588B1 (de) 1991-01-08 1991-12-19 Stimmgabelgesteuerter Kreisel
AT91850325T ATE138471T1 (de) 1991-01-08 1991-12-19 Stimmgabelgesteuerter kreisel
JP4019513A JP2681237B2 (ja) 1991-01-08 1992-01-07 音さ制御ジャイロの電極パターン
US07/817,814 US5329816A (en) 1991-01-08 1992-01-08 Electrode pattern intended for tuning fork-controlled gyro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9100043A SE512378C2 (sv) 1991-01-08 1991-01-08 För stämgaffelgyro avsett elektrodmönster

Publications (3)

Publication Number Publication Date
SE9100043D0 SE9100043D0 (sv) 1991-01-08
SE9100043L SE9100043L (sv) 1992-07-09
SE512378C2 true SE512378C2 (sv) 2000-03-06

Family

ID=20381550

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9100043A SE512378C2 (sv) 1991-01-08 1991-01-08 För stämgaffelgyro avsett elektrodmönster

Country Status (6)

Country Link
US (1) US5329816A (de)
EP (1) EP0494588B1 (de)
JP (1) JP2681237B2 (de)
AT (1) ATE138471T1 (de)
DE (1) DE69119738T2 (de)
SE (1) SE512378C2 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69213976T2 (de) * 1991-03-12 1997-04-03 New Sd Inc Stimmgabelinertialsensor mit einem Ende und Verfahren
JPH07113645A (ja) * 1993-10-15 1995-05-02 Toyota Motor Corp 振動ジャイロ
JP3392959B2 (ja) * 1994-11-01 2003-03-31 富士通株式会社 音叉形振動ジャイロ及びこれを用いたセンサシステム
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
GB2301669B (en) * 1995-05-30 1999-11-10 Allied Signal Inc Angular rate sensor misalignment correction
US5691472A (en) * 1995-05-30 1997-11-25 Alliedsignal, Inc. Non-gimballed angular rate sensor
GB2301671B (en) * 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
FR2735868B1 (fr) * 1995-06-21 1997-08-08 Asulab Sa Dispositif de mesure d'une vitesse angulaire
FR2735869B1 (fr) * 1995-06-21 1997-08-08 Asulab Sa Dispositif et procede de mesure de vitesse angulaire
FR2736153B1 (fr) * 1995-06-29 1997-08-22 Asulab Sa Dispositif de mesure d'une vitesse angulaire
JP3739492B2 (ja) 1996-02-21 2006-01-25 富士通株式会社 音叉型圧電振動ジャイロ
JPH09257490A (ja) * 1996-03-27 1997-10-03 Murata Mfg Co Ltd 振動ジャイロ
US5970793A (en) 1996-07-08 1999-10-26 Citizen Watch Co., Ltd. Angular velocity sensor and angular velocity sensing system
JPH1047971A (ja) * 1996-08-05 1998-02-20 Nippon Soken Inc 角速度センサ
JPH1073437A (ja) * 1996-08-30 1998-03-17 Fujitsu Ltd 振動ジャイロの検出回路及びこれを用いた振動ジャイロ装置
US6101878A (en) * 1997-03-24 2000-08-15 Denso Corporation Angular rate sensor and method of improving output characteristic thereof
JP3336451B2 (ja) 1997-08-22 2002-10-21 富士通株式会社 音叉型振動ジャイロ
US6205857B1 (en) 1998-02-25 2001-03-27 Citizen Watch Co., Ltd. Angular velocity sensing device
US5939631A (en) * 1998-03-13 1999-08-17 Bei Technologies Inc. Low impedance single-ended tuning fork and method
JP3335122B2 (ja) 1998-05-06 2002-10-15 松下電器産業株式会社 角速度センサ
JP2001208546A (ja) * 1999-11-16 2001-08-03 Matsushita Electric Ind Co Ltd 角速度センサ
JP2002267454A (ja) * 2001-03-12 2002-09-18 Matsushita Electric Ind Co Ltd 角速度センサ
JP3778809B2 (ja) * 2001-04-13 2006-05-24 富士通メディアデバイス株式会社 音叉型振動ジャイロ及びその電極トリミング方法
DE602004013170T2 (de) 2004-12-20 2009-06-18 Eta Sa Manufacture Horlogère Suisse Messwertgeber zur Drehgeschwindigkeitsmessung
JP2006284437A (ja) * 2005-04-01 2006-10-19 Nec Tokin Corp 音叉形圧電振動ジャイロ
CN104819710B (zh) * 2015-05-21 2017-09-26 北京航空航天大学 一种具有温度补偿结构的谐振式硅微机械陀螺
US20170059393A1 (en) * 2015-08-26 2017-03-02 Seiko Epson Corporation Physical Quantity Detection Device, Manufacturing Method For Physical Quantity Detection Device, Electronic Apparatus, And Moving Object

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4628734A (en) * 1982-01-21 1986-12-16 Watson Industries, Inc. Angular rate sensor apparatus
JPS60140114A (ja) * 1983-12-28 1985-07-25 Yokogawa Hokushin Electric Corp 音叉型振動式角速度計
CA1234705A (en) * 1984-03-22 1988-04-05 Suzushi Kimura Angular velocity sensor
GB8716047D0 (en) * 1987-07-08 1987-08-12 Thorn Emi Electronics Ltd Rate sensor
JP2681371B2 (ja) * 1988-07-11 1997-11-26 日本電気ホームエレクトロニクス株式会社 振動ジャイロ
SE466817B (sv) * 1989-02-27 1992-04-06 Bofors Ab Foer gyro avsett sensorelement
US5056366A (en) * 1989-12-26 1991-10-15 Litton Systems, Inc. Piezoelectric vibratory rate sensor

Also Published As

Publication number Publication date
SE9100043L (sv) 1992-07-09
ATE138471T1 (de) 1996-06-15
EP0494588A1 (de) 1992-07-15
DE69119738T2 (de) 1996-09-19
SE9100043D0 (sv) 1991-01-08
DE69119738D1 (de) 1996-06-27
JP2681237B2 (ja) 1997-11-26
EP0494588B1 (de) 1996-05-22
US5329816A (en) 1994-07-19
JPH0599677A (ja) 1993-04-23

Similar Documents

Publication Publication Date Title
SE512378C2 (sv) För stämgaffelgyro avsett elektrodmönster
US6799461B2 (en) Tuning fork vibrator, vibrating gyroscope using the same, electronic apparatus using the same, and manufacturing method of the same
US9366535B2 (en) Vibration gyro element, gyro sensor, and electronic apparatus
JP4248222B2 (ja) 角速度センサ
JP2005249395A (ja) 角速度センサ
SE451760B (sv) Piezoelektrisk vibrationsomvandlaranordning avsedd for ett ringlasergyro
JP3489390B2 (ja) 角速度センサ装置
JPH09126783A (ja) 圧電振動ジャイロ
US10352700B2 (en) Gyro sensor and electronic apparatus
US20070126415A1 (en) Mechanical quantity detecting element and mechanical quantity detecting device
JP3732582B2 (ja) 角速度検出装置
US5635641A (en) Vibratory gyroscope with reduced stress and stable characteristics
JP2009068936A (ja) 物理量検出装置
US6681630B1 (en) Vibrating gyroscope
JPS6378582A (ja) 電気機械変換素子
JPH11160344A (ja) 加速度センサ及び三軸加速度センサ
JPH09166443A (ja) 振動ジャイロ
JP2001004654A (ja) 加速度センサ
JPH08304441A (ja) 角速度センサ
JPH10239065A (ja) 振動ジャイロ
JPH08145691A (ja) 圧電振動ジャイロ
JPH04203926A (ja) 角速度センサ
JPH10160752A (ja) 加速度検出装置
JPS63201518A (ja) 角速度検出装置
JPH04299214A (ja) 角速度センサ

Legal Events

Date Code Title Description
NUG Patent has lapsed