RU2589272C2 - Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой - Google Patents

Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой Download PDF

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Publication number
RU2589272C2
RU2589272C2 RU2013146954/28A RU2013146954A RU2589272C2 RU 2589272 C2 RU2589272 C2 RU 2589272C2 RU 2013146954/28 A RU2013146954/28 A RU 2013146954/28A RU 2013146954 A RU2013146954 A RU 2013146954A RU 2589272 C2 RU2589272 C2 RU 2589272C2
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Russia
Prior art keywords
cmut
massive
substrate
cell
cells
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RU2013146954/28A
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English (en)
Russian (ru)
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RU2013146954A (ru
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Джон Дуглас ФРЕЙЗЕР
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Конинклейке Филипс Н.В.
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Heart & Thoracic Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Pathology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Pressure Sensors (AREA)
RU2013146954/28A 2011-03-22 2012-03-13 Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой RU2589272C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161466172P 2011-03-22 2011-03-22
US61/466,172 2011-03-22
PCT/IB2012/051173 WO2012127360A2 (en) 2011-03-22 2012-03-13 Ultrasonic cmut with suppressed acoustic coupling to the substrate

Publications (2)

Publication Number Publication Date
RU2013146954A RU2013146954A (ru) 2015-04-27
RU2589272C2 true RU2589272C2 (ru) 2016-07-10

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RU2013146954/28A RU2589272C2 (ru) 2011-03-22 2012-03-13 Емкостный микрообработанный ультразвуковой преобразователь с подавленной акустической связью с подложкой

Country Status (7)

Country Link
US (1) US20130331705A1 (enExample)
EP (1) EP2688686B1 (enExample)
JP (1) JP5961246B2 (enExample)
CN (1) CN103501922B (enExample)
BR (1) BR112013023981A2 (enExample)
RU (1) RU2589272C2 (enExample)
WO (1) WO2012127360A2 (enExample)

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DE102015212683A1 (de) * 2015-07-07 2017-01-12 Robert Bosch Gmbh Schallwandler und Einbauanordnung mit einem Schallwandler
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RU2756022C2 (ru) * 2016-11-22 2021-09-24 Конинклейке Филипс Н.В. Ультразвуковое устройство и акустический компонент для использования в таком устройстве
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US10943578B2 (en) 2016-12-13 2021-03-09 Ultrahaptics Ip Ltd Driving techniques for phased-array systems
US11531395B2 (en) 2017-11-26 2022-12-20 Ultrahaptics Ip Ltd Haptic effects from focused acoustic fields
US11704983B2 (en) 2017-12-22 2023-07-18 Ultrahaptics Ip Ltd Minimizing unwanted responses in haptic systems
US11360546B2 (en) 2017-12-22 2022-06-14 Ultrahaptics Ip Ltd Tracking in haptic systems
US10966683B2 (en) * 2018-03-22 2021-04-06 Exo Imaging Inc. Integrated ultrasonic transducers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
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WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
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US11098951B2 (en) 2018-09-09 2021-08-24 Ultrahaptics Ip Ltd Ultrasonic-assisted liquid manipulation
WO2020141330A2 (en) 2019-01-04 2020-07-09 Ultrahaptics Ip Ltd Mid-air haptic textures
US12373033B2 (en) 2019-01-04 2025-07-29 Ultrahaptics Ip Ltd Mid-air haptic textures
US11842517B2 (en) 2019-04-12 2023-12-12 Ultrahaptics Ip Ltd Using iterative 3D-model fitting for domain adaptation of a hand-pose-estimation neural network
TW202519098A (zh) 2019-09-12 2025-05-01 美商艾克索影像股份有限公司 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2769757C2 (ru) * 2017-09-22 2022-04-05 Конинклейке Филипс Н.В. Ультразвуковое преобразующее устройство и способ управления им

Also Published As

Publication number Publication date
WO2012127360A3 (en) 2013-04-25
JP5961246B2 (ja) 2016-08-02
EP2688686A2 (en) 2014-01-29
WO2012127360A2 (en) 2012-09-27
JP2014510489A (ja) 2014-04-24
CN103501922A (zh) 2014-01-08
BR112013023981A2 (pt) 2016-12-13
RU2013146954A (ru) 2015-04-27
EP2688686B1 (en) 2022-08-17
CN103501922B (zh) 2016-08-17
US20130331705A1 (en) 2013-12-12

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Effective date: 20190314