CN103501922B - 具有至衬底的受抑声耦合的超声波cmut - Google Patents

具有至衬底的受抑声耦合的超声波cmut Download PDF

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Publication number
CN103501922B
CN103501922B CN201280014348.5A CN201280014348A CN103501922B CN 103501922 B CN103501922 B CN 103501922B CN 201280014348 A CN201280014348 A CN 201280014348A CN 103501922 B CN103501922 B CN 103501922B
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China
Prior art keywords
cmut
array
cmut cells
substrate
heavy
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CN201280014348.5A
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English (en)
Chinese (zh)
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CN103501922A (zh
Inventor
J·D·弗雷泽
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Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Heart & Thoracic Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Pathology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Pressure Sensors (AREA)
CN201280014348.5A 2011-03-22 2012-03-13 具有至衬底的受抑声耦合的超声波cmut Active CN103501922B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161466172P 2011-03-22 2011-03-22
US61/466,172 2011-03-22
PCT/IB2012/051173 WO2012127360A2 (en) 2011-03-22 2012-03-13 Ultrasonic cmut with suppressed acoustic coupling to the substrate

Publications (2)

Publication Number Publication Date
CN103501922A CN103501922A (zh) 2014-01-08
CN103501922B true CN103501922B (zh) 2016-08-17

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CN201280014348.5A Active CN103501922B (zh) 2011-03-22 2012-03-13 具有至衬底的受抑声耦合的超声波cmut

Country Status (7)

Country Link
US (1) US20130331705A1 (enExample)
EP (1) EP2688686B1 (enExample)
JP (1) JP5961246B2 (enExample)
CN (1) CN103501922B (enExample)
BR (1) BR112013023981A2 (enExample)
RU (1) RU2589272C2 (enExample)
WO (1) WO2012127360A2 (enExample)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
GB2513884B (en) 2013-05-08 2015-06-17 Univ Bristol Method and apparatus for producing an acoustic field
DE102013223695B4 (de) * 2013-11-20 2016-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum herstellen eines kapazitiven ultraschallwandlers und anordnung einer mehrzahl von kapazitiven ultraschallwandlern
KR102155695B1 (ko) * 2014-02-12 2020-09-21 삼성전자주식회사 전기 음향 변환기
GB2530036A (en) 2014-09-09 2016-03-16 Ultrahaptics Ltd Method and apparatus for modulating haptic feedback
JP6684817B2 (ja) * 2014-11-25 2020-04-22 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波システム及び方法
EP3537265B1 (en) 2015-02-20 2021-09-29 Ultrahaptics Ip Ltd Perceptions in a haptic system
CN107534810B (zh) 2015-02-20 2019-12-20 超级触觉资讯处理有限公司 用于提供改进的触觉反馈的方法
EP3317026B1 (en) * 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
EP3316791B1 (en) 2015-07-02 2020-08-05 Koninklijke Philips N.V. Multi-mode capacitive micromachined ultrasound transducer and associated devices and systems
DE102015212683A1 (de) * 2015-07-07 2017-01-12 Robert Bosch Gmbh Schallwandler und Einbauanordnung mit einem Schallwandler
US10818162B2 (en) 2015-07-16 2020-10-27 Ultrahaptics Ip Ltd Calibration techniques in haptic systems
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
EP3338113B1 (en) 2015-11-24 2021-08-25 Halliburton Energy Services, Inc. Ultrasonic transducer with suppressed lateral mode
US10497856B2 (en) 2016-06-20 2019-12-03 Butterfly Network, Inc. Electrical contact arrangement for microfabricated ultrasonic transducer
US10268275B2 (en) 2016-08-03 2019-04-23 Ultrahaptics Ip Ltd Three-dimensional perceptions in haptic systems
RU2756022C2 (ru) * 2016-11-22 2021-09-24 Конинклейке Филипс Н.В. Ультразвуковое устройство и акустический компонент для использования в таком устройстве
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US10943578B2 (en) 2016-12-13 2021-03-09 Ultrahaptics Ip Ltd Driving techniques for phased-array systems
EP3459646A1 (en) * 2017-09-22 2019-03-27 Koninklijke Philips N.V. Ultrasound transducer device and method for controlling the same
US11531395B2 (en) 2017-11-26 2022-12-20 Ultrahaptics Ip Ltd Haptic effects from focused acoustic fields
US11704983B2 (en) 2017-12-22 2023-07-18 Ultrahaptics Ip Ltd Minimizing unwanted responses in haptic systems
US11360546B2 (en) 2017-12-22 2022-06-14 Ultrahaptics Ip Ltd Tracking in haptic systems
US10966683B2 (en) * 2018-03-22 2021-04-06 Exo Imaging Inc. Integrated ultrasonic transducers
US10656007B2 (en) 2018-04-11 2020-05-19 Exo Imaging Inc. Asymmetrical ultrasound transducer array
US10648852B2 (en) 2018-04-11 2020-05-12 Exo Imaging Inc. Imaging devices having piezoelectric transceivers
IL278402B2 (en) 2018-05-02 2025-10-01 Ultrahaptics Ip Ltd Blocking element for acoustic transmission with improved efficiency
WO2019226547A1 (en) 2018-05-21 2019-11-28 Exo Imaging, Inc. Ultrasonic transducers with q spoiling
EP3830877A4 (en) 2018-08-01 2021-10-20 Exo Imaging Inc. SYSTEMS AND PROCEDURES FOR THE INTEGRATION OF ULTRASONIC CONVERTERS WITH HYBRID CONTACTS
US11098951B2 (en) 2018-09-09 2021-08-24 Ultrahaptics Ip Ltd Ultrasonic-assisted liquid manipulation
WO2020141330A2 (en) 2019-01-04 2020-07-09 Ultrahaptics Ip Ltd Mid-air haptic textures
US12373033B2 (en) 2019-01-04 2025-07-29 Ultrahaptics Ip Ltd Mid-air haptic textures
US11842517B2 (en) 2019-04-12 2023-12-12 Ultrahaptics Ip Ltd Using iterative 3D-model fitting for domain adaptation of a hand-pose-estimation neural network
TW202519098A (zh) 2019-09-12 2025-05-01 美商艾克索影像股份有限公司 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬
US11374586B2 (en) 2019-10-13 2022-06-28 Ultraleap Limited Reducing harmonic distortion by dithering
US11553295B2 (en) 2019-10-13 2023-01-10 Ultraleap Limited Dynamic capping with virtual microphones
US11715453B2 (en) 2019-12-25 2023-08-01 Ultraleap Limited Acoustic transducer structures
US11816267B2 (en) 2020-06-23 2023-11-14 Ultraleap Limited Features of airborne ultrasonic fields
US11886639B2 (en) 2020-09-17 2024-01-30 Ultraleap Limited Ultrahapticons
WO2022211778A1 (en) * 2021-03-29 2022-10-06 Exo Imaging, Inc. Trenches for the reduction of cross-talk in mut arrays
US11951512B2 (en) 2021-03-31 2024-04-09 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US11819881B2 (en) 2021-03-31 2023-11-21 Exo Imaging, Inc. Imaging devices having piezoelectric transceivers with harmonic characteristics
US20220393095A1 (en) * 2021-06-02 2022-12-08 Ultraleap Limited Electromechanical Transducer Mount
US12486159B2 (en) 2021-06-30 2025-12-02 Exo Imaging, Inc. Micro-machined ultrasound transducers with insulation layer and methods of manufacture

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146838A2 (en) * 2009-06-19 2010-12-23 Canon Kabushiki Kaisha Capacitive electromechanical transducer

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2117415C1 (ru) * 1994-05-31 1998-08-10 Шанаурин Александр Михайлович Электростатический конденсаторный преобразователь
US6262946B1 (en) 1999-09-29 2001-07-17 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6862254B2 (en) 2000-10-19 2005-03-01 Sensant Corporation Microfabricated ultrasonic transducer with suppressed substrate modes
US6669644B2 (en) 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7545075B2 (en) 2004-06-04 2009-06-09 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same
US7888709B2 (en) * 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
US20080304729A1 (en) * 2005-04-25 2008-12-11 Koninklijke Philips Electronics, N.V. Method and Apparatus for Continuous Imaging by Ultrasound Transducer System
CA2607918A1 (en) * 2005-05-18 2006-11-23 Kolo Technologies, Inc. Micro-electro-mechanical transducers
CN101558552B (zh) * 2005-06-17 2017-05-31 科隆科技公司 具有绝缘延伸部的微机电换能器
JP4724505B2 (ja) * 2005-09-09 2011-07-13 株式会社日立製作所 超音波探触子およびその製造方法
US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
DE602007004242D1 (de) * 2006-09-25 2010-02-25 Koninkl Philips Electronics Nv Flip-chip-verbindung über chip-durchgangswege
US7843022B2 (en) * 2007-10-18 2010-11-30 The Board Of Trustees Of The Leland Stanford Junior University High-temperature electrostatic transducers and fabrication method
US8207652B2 (en) * 2009-06-16 2012-06-26 General Electric Company Ultrasound transducer with improved acoustic performance
KR20110002630A (ko) * 2009-07-02 2011-01-10 삼성전자주식회사 휴대 단말기의 카메라 운용 방법 및 장치
JP5495918B2 (ja) * 2009-07-24 2014-05-21 キヤノン株式会社 電気機械変換装置、及び電気機械変換装置の作製方法
US8455289B1 (en) * 2011-12-02 2013-06-04 Texas Instruments Incorporated Low frequency CMUT with thick oxide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146838A2 (en) * 2009-06-19 2010-12-23 Canon Kabushiki Kaisha Capacitive electromechanical transducer

Also Published As

Publication number Publication date
WO2012127360A3 (en) 2013-04-25
JP5961246B2 (ja) 2016-08-02
EP2688686A2 (en) 2014-01-29
WO2012127360A2 (en) 2012-09-27
JP2014510489A (ja) 2014-04-24
CN103501922A (zh) 2014-01-08
BR112013023981A2 (pt) 2016-12-13
RU2013146954A (ru) 2015-04-27
EP2688686B1 (en) 2022-08-17
US20130331705A1 (en) 2013-12-12
RU2589272C2 (ru) 2016-07-10

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