BR112013023981A2 - conjunto de células cmut de um transdutor ultrassônico - Google Patents
conjunto de células cmut de um transdutor ultrassônicoInfo
- Publication number
- BR112013023981A2 BR112013023981A2 BR112013023981A BR112013023981A BR112013023981A2 BR 112013023981 A2 BR112013023981 A2 BR 112013023981A2 BR 112013023981 A BR112013023981 A BR 112013023981A BR 112013023981 A BR112013023981 A BR 112013023981A BR 112013023981 A2 BR112013023981 A2 BR 112013023981A2
- Authority
- BR
- Brazil
- Prior art keywords
- substrate
- cmut cell
- cell set
- ultrasonic transducer
- movement
- Prior art date
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Multimedia (AREA)
- Acoustics & Sound (AREA)
- Mechanical Engineering (AREA)
- Pathology (AREA)
- Veterinary Medicine (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Biomedical Technology (AREA)
- Radiology & Medical Imaging (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Biophysics (AREA)
- Gynecology & Obstetrics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Pressure Sensors (AREA)
Abstract
resumo conjunto de células cmut de um transdutor ultrassônico um conjunto de células cmut é formado em grandes placas isoladas individualmente sobre um substrato. a massa de cada placa fornece uma força de inércia em oposição à força e movimento da transmissão pela célula, o que reduz a conversão resultante do movimento na placa. a redução do movimento resulta em menos acoplamento de energia acústica ao substrato e contaminação dos sinais de células cmut adjacentes por ondas laterais. o acoplamento não desejado de onda ao substrato pode ser adicionalmente amortecido com montagem periódica compatível ou esparsa das grandes placas sobre o substrato. 1/1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161466172P | 2011-03-22 | 2011-03-22 | |
PCT/IB2012/051173 WO2012127360A2 (en) | 2011-03-22 | 2012-03-13 | Ultrasonic cmut with suppressed acoustic coupling to the substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112013023981A2 true BR112013023981A2 (pt) | 2016-12-13 |
Family
ID=45937471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112013023981A BR112013023981A2 (pt) | 2011-03-22 | 2012-03-13 | conjunto de células cmut de um transdutor ultrassônico |
Country Status (7)
Country | Link |
---|---|
US (1) | US20130331705A1 (pt) |
EP (1) | EP2688686B1 (pt) |
JP (1) | JP5961246B2 (pt) |
CN (1) | CN103501922B (pt) |
BR (1) | BR112013023981A2 (pt) |
RU (1) | RU2589272C2 (pt) |
WO (1) | WO2012127360A2 (pt) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR112014014911A2 (pt) * | 2011-12-20 | 2017-06-13 | Koninklijke Philips Nv | dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom |
GB2513884B (en) | 2013-05-08 | 2015-06-17 | Univ Bristol | Method and apparatus for producing an acoustic field |
DE102013223695B4 (de) * | 2013-11-20 | 2016-09-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum herstellen eines kapazitiven ultraschallwandlers und anordnung einer mehrzahl von kapazitiven ultraschallwandlern |
KR102155695B1 (ko) * | 2014-02-12 | 2020-09-21 | 삼성전자주식회사 | 전기 음향 변환기 |
GB2530036A (en) | 2014-09-09 | 2016-03-16 | Ultrahaptics Ltd | Method and apparatus for modulating haptic feedback |
EP3223709B1 (en) * | 2014-11-25 | 2019-02-20 | Koninklijke Philips N.V. | Ultrasound system and method |
EP3916525A1 (en) | 2015-02-20 | 2021-12-01 | Ultrahaptics IP Limited | Perceptions in a haptic system |
ES2908299T3 (es) | 2015-02-20 | 2022-04-28 | Ultrahaptics Ip Ltd | Mejoras del algoritmo en un sistema háptico |
JP6925286B2 (ja) * | 2015-06-30 | 2021-08-25 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 超音波システム及び超音波パルス送信方法 |
US11766237B2 (en) | 2015-07-02 | 2023-09-26 | Philips Image Guided Therapy Corporation | Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods for multiple different intravascular sensing capabilities |
DE102015212683A1 (de) * | 2015-07-07 | 2017-01-12 | Robert Bosch Gmbh | Schallwandler und Einbauanordnung mit einem Schallwandler |
US10818162B2 (en) | 2015-07-16 | 2020-10-27 | Ultrahaptics Ip Ltd | Calibration techniques in haptic systems |
US9751108B2 (en) | 2015-07-31 | 2017-09-05 | Texas Instruments Incorporated | Extended range ultrasound transducer |
EP3338113B1 (en) | 2015-11-24 | 2021-08-25 | Halliburton Energy Services, Inc. | Ultrasonic transducer with suppressed lateral mode |
WO2017222969A1 (en) | 2016-06-20 | 2017-12-28 | Butterfly Network, Inc. | Electrical contact arrangement for microfabricated ultrasonic transducer |
US10268275B2 (en) | 2016-08-03 | 2019-04-23 | Ultrahaptics Ip Ltd | Three-dimensional perceptions in haptic systems |
CN109996497B (zh) * | 2016-11-22 | 2022-06-24 | 皇家飞利浦有限公司 | 超声设备和用于在这样的设备中使用的声学部件 |
US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
US10943578B2 (en) | 2016-12-13 | 2021-03-09 | Ultrahaptics Ip Ltd | Driving techniques for phased-array systems |
EP3459646A1 (en) * | 2017-09-22 | 2019-03-27 | Koninklijke Philips N.V. | Ultrasound transducer device and method for controlling the same |
US11531395B2 (en) | 2017-11-26 | 2022-12-20 | Ultrahaptics Ip Ltd | Haptic effects from focused acoustic fields |
EP3729418A1 (en) | 2017-12-22 | 2020-10-28 | Ultrahaptics Ip Ltd | Minimizing unwanted responses in haptic systems |
US10648852B2 (en) | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
US10656007B2 (en) | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
SG11202010752VA (en) | 2018-05-02 | 2020-11-27 | Ultrahaptics Ip Ltd | Blocking plate structure for improved acoustic transmission efficiency |
US11098951B2 (en) | 2018-09-09 | 2021-08-24 | Ultrahaptics Ip Ltd | Ultrasonic-assisted liquid manipulation |
WO2020141330A2 (en) | 2019-01-04 | 2020-07-09 | Ultrahaptics Ip Ltd | Mid-air haptic textures |
US11842517B2 (en) | 2019-04-12 | 2023-12-12 | Ultrahaptics Ip Ltd | Using iterative 3D-model fitting for domain adaptation of a hand-pose-estimation neural network |
WO2021050853A1 (en) | 2019-09-12 | 2021-03-18 | Exo Imaging, Inc. | Increased mut coupling efficiency and bandwidth via edge groove, virtual pivots, and free boundaries |
US11374586B2 (en) | 2019-10-13 | 2022-06-28 | Ultraleap Limited | Reducing harmonic distortion by dithering |
CA3154040A1 (en) | 2019-10-13 | 2021-04-22 | Benjamin John Oliver LONG | Dynamic capping with virtual microphones |
US11715453B2 (en) | 2019-12-25 | 2023-08-01 | Ultraleap Limited | Acoustic transducer structures |
US11816267B2 (en) | 2020-06-23 | 2023-11-14 | Ultraleap Limited | Features of airborne ultrasonic fields |
WO2022058738A1 (en) | 2020-09-17 | 2022-03-24 | Ultraleap Limited | Ultrahapticons |
EP4135584A4 (en) * | 2021-03-29 | 2023-08-09 | Exo Imaging, Inc. | TRENCHES FOR CROSSTALK REDUCTION IN MUT ARRAYS |
US11951512B2 (en) | 2021-03-31 | 2024-04-09 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
US11819881B2 (en) | 2021-03-31 | 2023-11-21 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
WO2022254205A1 (en) * | 2021-06-02 | 2022-12-08 | Ultraleap Limited | Electromechanical transducer mount |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2117415C1 (ru) * | 1994-05-31 | 1998-08-10 | Шанаурин Александр Михайлович | Электростатический конденсаторный преобразователь |
US6262946B1 (en) | 1999-09-29 | 2001-07-17 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer arrays with reduced cross-coupling |
US6443901B1 (en) | 2000-06-15 | 2002-09-03 | Koninklijke Philips Electronics N.V. | Capacitive micromachined ultrasonic transducers |
US6862254B2 (en) | 2000-10-19 | 2005-03-01 | Sensant Corporation | Microfabricated ultrasonic transducer with suppressed substrate modes |
US6669644B2 (en) * | 2001-07-31 | 2003-12-30 | Koninklijke Philips Electronics N.V. | Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy |
US6831394B2 (en) * | 2002-12-11 | 2004-12-14 | General Electric Company | Backing material for micromachined ultrasonic transducer devices |
US20040190377A1 (en) * | 2003-03-06 | 2004-09-30 | Lewandowski Robert Stephen | Method and means for isolating elements of a sensor array |
US7303530B2 (en) * | 2003-05-22 | 2007-12-04 | Siemens Medical Solutions Usa, Inc. | Transducer arrays with an integrated sensor and methods of use |
US7030536B2 (en) * | 2003-12-29 | 2006-04-18 | General Electric Company | Micromachined ultrasonic transducer cells having compliant support structure |
US7545075B2 (en) | 2004-06-04 | 2009-06-09 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same |
US7888709B2 (en) * | 2004-09-15 | 2011-02-15 | Sonetics Ultrasound, Inc. | Capacitive micromachined ultrasonic transducer and manufacturing method |
US20080304729A1 (en) * | 2005-04-25 | 2008-12-11 | Koninklijke Philips Electronics, N.V. | Method and Apparatus for Continuous Imaging by Ultrasound Transducer System |
JP4791534B2 (ja) * | 2005-05-18 | 2011-10-12 | コロ テクノロジーズ インコーポレイテッド | 超小型電気機械デバイスの製造方法 |
JP5128470B2 (ja) * | 2005-06-17 | 2013-01-23 | コロ テクノロジーズ インコーポレイテッド | 絶縁延長を有する微小電気機械変換器 |
JP4724505B2 (ja) * | 2005-09-09 | 2011-07-13 | 株式会社日立製作所 | 超音波探触子およびその製造方法 |
US7741686B2 (en) * | 2006-07-20 | 2010-06-22 | The Board Of Trustees Of The Leland Stanford Junior University | Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame |
JP5175853B2 (ja) * | 2006-09-25 | 2013-04-03 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | フリップチップ相互接続貫通チップビア |
US7843022B2 (en) * | 2007-10-18 | 2010-11-30 | The Board Of Trustees Of The Leland Stanford Junior University | High-temperature electrostatic transducers and fabrication method |
US8207652B2 (en) * | 2009-06-16 | 2012-06-26 | General Electric Company | Ultrasound transducer with improved acoustic performance |
JP5578810B2 (ja) * | 2009-06-19 | 2014-08-27 | キヤノン株式会社 | 静電容量型の電気機械変換装置 |
KR20110002630A (ko) * | 2009-07-02 | 2011-01-10 | 삼성전자주식회사 | 휴대 단말기의 카메라 운용 방법 및 장치 |
JP5495918B2 (ja) * | 2009-07-24 | 2014-05-21 | キヤノン株式会社 | 電気機械変換装置、及び電気機械変換装置の作製方法 |
US8455289B1 (en) * | 2011-12-02 | 2013-06-04 | Texas Instruments Incorporated | Low frequency CMUT with thick oxide |
-
2012
- 2012-03-13 RU RU2013146954/28A patent/RU2589272C2/ru not_active IP Right Cessation
- 2012-03-13 US US14/000,891 patent/US20130331705A1/en not_active Abandoned
- 2012-03-13 BR BR112013023981A patent/BR112013023981A2/pt not_active Application Discontinuation
- 2012-03-13 CN CN201280014348.5A patent/CN103501922B/zh active Active
- 2012-03-13 EP EP12713338.7A patent/EP2688686B1/en active Active
- 2012-03-13 JP JP2014500501A patent/JP5961246B2/ja active Active
- 2012-03-13 WO PCT/IB2012/051173 patent/WO2012127360A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2014510489A (ja) | 2014-04-24 |
CN103501922B (zh) | 2016-08-17 |
EP2688686B1 (en) | 2022-08-17 |
US20130331705A1 (en) | 2013-12-12 |
RU2589272C2 (ru) | 2016-07-10 |
CN103501922A (zh) | 2014-01-08 |
EP2688686A2 (en) | 2014-01-29 |
WO2012127360A3 (en) | 2013-04-25 |
WO2012127360A2 (en) | 2012-09-27 |
JP5961246B2 (ja) | 2016-08-02 |
RU2013146954A (ru) | 2015-04-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
B06U | Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette] | ||
B11B | Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements |