JP5961246B2 - 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ - Google Patents

基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ Download PDF

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Publication number
JP5961246B2
JP5961246B2 JP2014500501A JP2014500501A JP5961246B2 JP 5961246 B2 JP5961246 B2 JP 5961246B2 JP 2014500501 A JP2014500501 A JP 2014500501A JP 2014500501 A JP2014500501 A JP 2014500501A JP 5961246 B2 JP5961246 B2 JP 5961246B2
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cmut
array
cmut cells
substrate
plate
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JP2014510489A (ja
JP2014510489A5 (enExample
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ジョン ダグラス フレイサー
ジョン ダグラス フレイサー
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Heart & Thoracic Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Pathology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Pressure Sensors (AREA)
JP2014500501A 2011-03-22 2012-03-13 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ Active JP5961246B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161466172P 2011-03-22 2011-03-22
US61/466,172 2011-03-22
PCT/IB2012/051173 WO2012127360A2 (en) 2011-03-22 2012-03-13 Ultrasonic cmut with suppressed acoustic coupling to the substrate

Publications (3)

Publication Number Publication Date
JP2014510489A JP2014510489A (ja) 2014-04-24
JP2014510489A5 JP2014510489A5 (enExample) 2015-04-16
JP5961246B2 true JP5961246B2 (ja) 2016-08-02

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JP2014500501A Active JP5961246B2 (ja) 2011-03-22 2012-03-13 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ

Country Status (7)

Country Link
US (1) US20130331705A1 (enExample)
EP (1) EP2688686B1 (enExample)
JP (1) JP5961246B2 (enExample)
CN (1) CN103501922B (enExample)
BR (1) BR112013023981A2 (enExample)
RU (1) RU2589272C2 (enExample)
WO (1) WO2012127360A2 (enExample)

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KR102155695B1 (ko) * 2014-02-12 2020-09-21 삼성전자주식회사 전기 음향 변환기
GB2530036A (en) 2014-09-09 2016-03-16 Ultrahaptics Ltd Method and apparatus for modulating haptic feedback
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EP3537265B1 (en) 2015-02-20 2021-09-29 Ultrahaptics Ip Ltd Perceptions in a haptic system
CN107534810B (zh) 2015-02-20 2019-12-20 超级触觉资讯处理有限公司 用于提供改进的触觉反馈的方法
EP3317026B1 (en) * 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
EP3316791B1 (en) 2015-07-02 2020-08-05 Koninklijke Philips N.V. Multi-mode capacitive micromachined ultrasound transducer and associated devices and systems
DE102015212683A1 (de) * 2015-07-07 2017-01-12 Robert Bosch Gmbh Schallwandler und Einbauanordnung mit einem Schallwandler
US10818162B2 (en) 2015-07-16 2020-10-27 Ultrahaptics Ip Ltd Calibration techniques in haptic systems
US9751108B2 (en) * 2015-07-31 2017-09-05 Texas Instruments Incorporated Extended range ultrasound transducer
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US10497856B2 (en) 2016-06-20 2019-12-03 Butterfly Network, Inc. Electrical contact arrangement for microfabricated ultrasonic transducer
US10268275B2 (en) 2016-08-03 2019-04-23 Ultrahaptics Ip Ltd Three-dimensional perceptions in haptic systems
RU2756022C2 (ru) * 2016-11-22 2021-09-24 Конинклейке Филипс Н.В. Ультразвуковое устройство и акустический компонент для использования в таком устройстве
US11039814B2 (en) 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
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EP3459646A1 (en) * 2017-09-22 2019-03-27 Koninklijke Philips N.V. Ultrasound transducer device and method for controlling the same
US11531395B2 (en) 2017-11-26 2022-12-20 Ultrahaptics Ip Ltd Haptic effects from focused acoustic fields
US11704983B2 (en) 2017-12-22 2023-07-18 Ultrahaptics Ip Ltd Minimizing unwanted responses in haptic systems
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US11098951B2 (en) 2018-09-09 2021-08-24 Ultrahaptics Ip Ltd Ultrasonic-assisted liquid manipulation
WO2020141330A2 (en) 2019-01-04 2020-07-09 Ultrahaptics Ip Ltd Mid-air haptic textures
US12373033B2 (en) 2019-01-04 2025-07-29 Ultrahaptics Ip Ltd Mid-air haptic textures
US11842517B2 (en) 2019-04-12 2023-12-12 Ultrahaptics Ip Ltd Using iterative 3D-model fitting for domain adaptation of a hand-pose-estimation neural network
TW202519098A (zh) 2019-09-12 2025-05-01 美商艾克索影像股份有限公司 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬
US11374586B2 (en) 2019-10-13 2022-06-28 Ultraleap Limited Reducing harmonic distortion by dithering
US11553295B2 (en) 2019-10-13 2023-01-10 Ultraleap Limited Dynamic capping with virtual microphones
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Also Published As

Publication number Publication date
WO2012127360A3 (en) 2013-04-25
EP2688686A2 (en) 2014-01-29
WO2012127360A2 (en) 2012-09-27
JP2014510489A (ja) 2014-04-24
CN103501922A (zh) 2014-01-08
BR112013023981A2 (pt) 2016-12-13
RU2013146954A (ru) 2015-04-27
EP2688686B1 (en) 2022-08-17
CN103501922B (zh) 2016-08-17
US20130331705A1 (en) 2013-12-12
RU2589272C2 (ru) 2016-07-10

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