JP7153985B2 - 静電容量型デバイスおよび圧電型デバイス - Google Patents
静電容量型デバイスおよび圧電型デバイス Download PDFInfo
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- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/067—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface which is used as, or combined with, an impedance matching layer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
- G01N29/245—Ceramic probes, e.g. lead zirconate titanate [PZT] probes
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
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Description
図1は、本実施の形態1の静電容量型デバイス10の単位構造を示す断面図である。静電容量型デバイス10は、CMUT(超音波トランスデューサ)で構成された単位セル11と、接続部12を介して単位セル11の上部に設けられたインピーダンス整合用の送受信板13とを備えている。
図5は、本実施の形態2の静電容量型デバイス20の単位構造を示す概略断面図である。本実施の形態2の静電容量型デバイス20の特徴は、送受信板13の一端が接続部12と同層の絶縁膜からなる固定部14を介して単位セル11に支持されている点にある。また、CMUTとして機能する空洞部110およびその上部のメンブレン120(図1参照)と接続部12は、送受信板13の中央部よりも固定部14に近接した位置に配置されている。すなわち、空洞部110、メンブレン120および接続部12は、送受信板13の他端(図5の右端)側に比べて変形し難い固定部14側(図5の左側)に近接した位置に配置されている。
11 単位セル
12 接続部
13 送受信板
14 固定部
20 静電容量型デバイス
101 基板
102 絶縁膜
103 下部電極
104 絶縁膜
106 絶縁膜
107 上部電極
108 絶縁膜
109 開口
110 空洞部
111 絶縁膜
112 絶縁膜
113 接続孔
114 接続孔
115 パッド
116 パッド
120 メンブレン
Claims (4)
- 基板、前記基板上に形成された下部電極、前記下部電極上に順次形成された第1絶縁膜と第2絶縁膜との間に設けられた空洞部、前記空洞部の上方に形成された上部電極、前記上部電極上に形成された第3絶縁膜、および前記空洞部上の前記第2絶縁膜と前記第3絶縁膜とによって構成されるメンブレン、を有する超音波トランスデューサと、
前記メンブレンの上部に形成された第1面積の接続部と、
前記接続部を介して前記超音波トランスデューサの上方に形成された、前記第1面積よりも大きい第2面積の送受信板と、
を備え、
前記送受信板の前記第2面積は、前記空洞部の面積よりも大きく、
前記送受信板の一部が固定部を介して前記超音波トランスデューサに固定されており、
前記空洞部、前記メンブレンおよび前記接続部は、前記送受信板の中央部よりも前記固定部に近接した位置に配置され、
前記送受信板の平面形状は、螺旋形状である、静電容量型デバイス。 - 請求項1記載の静電容量型デバイスにおいて、
アレイ状に配置された複数の前記超音波トランスデューサと、前記複数の前記超音波トランスデューサのそれぞれの上方に形成された前記送受信板とが、前記送受信板よりも面積の小さい前記接続部を介して接続されている、静電容量型デバイス。 - 圧電素子と、
前記圧電素子の上方に形成された第1面積の接続部と、
前記接続部を介して前記圧電素子の上方に形成された、前記第1面積よりも大きい第2面積の送受信板と、
を備え、
前記送受信板の一部が、固定部を介して前記圧電素子に固定されており、
前記圧電素子は、前記送受信板の中央部よりも前記固定部に近接した位置に配置され、
前記送受信板の平面形状は、螺旋形状である、圧電型デバイス。 - 請求項3記載の圧電型デバイスにおいて、
アレイ状に配置された複数の前記圧電素子と、前記複数の前記圧電素子のそれぞれの上方に形成された前記送受信板とが、前記送受信板よりも面積の小さい前記接続部を介して接続されている、圧電型デバイス。
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US16/534,012 US11376628B2 (en) | 2018-09-05 | 2019-08-07 | Capacitive device and piezoelectric device |
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Citations (3)
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JP2001145192A (ja) | 1999-11-15 | 2001-05-25 | Kaijo Corp | 超音波振動子 |
US20100013574A1 (en) | 2005-08-03 | 2010-01-21 | Kolo Technologies, Inc. | Micro-Electro-Mechanical Transducer Having a Surface Plate |
US20100020991A1 (en) | 2008-07-25 | 2010-01-28 | United Microelectronics Corp. | Diaphragm of mems electroacoustic transducer |
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US5619476A (en) * | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
EP1761104A4 (en) | 2004-06-03 | 2016-12-28 | Olympus Corp | ULTRASONIC VIBRATOR OF THE ELECTROSTATIC CAPABILITY TYPE, METHOD OF MANUFACTURE, AND ELECTROSTATIC CAPACITY-TYPE ULTRASONIC PROBE |
CN101558552B (zh) * | 2005-06-17 | 2017-05-31 | 科隆科技公司 | 具有绝缘延伸部的微机电换能器 |
JP4776691B2 (ja) * | 2006-09-28 | 2011-09-21 | 株式会社日立製作所 | 超音波探触子及び超音波撮像装置 |
JP5019997B2 (ja) | 2007-08-28 | 2012-09-05 | オリンパスメディカルシステムズ株式会社 | 超音波トランスデューサ、超音波診断装置及び超音波顕微鏡 |
JP2013146478A (ja) | 2012-01-23 | 2013-08-01 | Konica Minolta Inc | 超音波探触子および超音波診断装置 |
KR102106074B1 (ko) * | 2013-12-05 | 2020-05-28 | 삼성전자주식회사 | 전기 음향 변환기 및 그 제조방법 |
KR102155695B1 (ko) * | 2014-02-12 | 2020-09-21 | 삼성전자주식회사 | 전기 음향 변환기 |
KR102184453B1 (ko) * | 2014-07-21 | 2020-11-30 | 삼성전자주식회사 | 초음파 변환기 및 초음파 변환기의 제조 방법 |
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JP2001145192A (ja) | 1999-11-15 | 2001-05-25 | Kaijo Corp | 超音波振動子 |
US20100013574A1 (en) | 2005-08-03 | 2010-01-21 | Kolo Technologies, Inc. | Micro-Electro-Mechanical Transducer Having a Surface Plate |
US20100020991A1 (en) | 2008-07-25 | 2010-01-28 | United Microelectronics Corp. | Diaphragm of mems electroacoustic transducer |
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