RU2179363C2 - Пьезоэлектрический привод или двигатель, способ приведения его в действие и способ его изготовления - Google Patents

Пьезоэлектрический привод или двигатель, способ приведения его в действие и способ его изготовления Download PDF

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Publication number
RU2179363C2
RU2179363C2 RU98119708/28A RU98119708A RU2179363C2 RU 2179363 C2 RU2179363 C2 RU 2179363C2 RU 98119708/28 A RU98119708/28 A RU 98119708/28A RU 98119708 A RU98119708 A RU 98119708A RU 2179363 C2 RU2179363 C2 RU 2179363C2
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Russia
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drive
monolithic
modules
module
specified
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RU98119708/28A
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English (en)
Russian (ru)
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RU98119708A (ru
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Матс Бекселль
Стефан ЮХАНССОН
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Пьезомоторс Уппсала Аб
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
RU98119708/28A 1996-03-26 1997-03-26 Пьезоэлектрический привод или двигатель, способ приведения его в действие и способ его изготовления RU2179363C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/SE1996/000391 WO1997036365A1 (en) 1996-03-26 1996-03-26 An actuator motor and a method for fabrication of such an actuator
WOPCT/SE96/00391 1996-03-26

Publications (2)

Publication Number Publication Date
RU98119708A RU98119708A (ru) 2000-08-27
RU2179363C2 true RU2179363C2 (ru) 2002-02-10

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RU98119708/28A RU2179363C2 (ru) 1996-03-26 1997-03-26 Пьезоэлектрический привод или двигатель, способ приведения его в действие и способ его изготовления

Country Status (10)

Country Link
US (1) US6184609B1 (enExample)
EP (1) EP0890216B1 (enExample)
JP (1) JP3980646B2 (enExample)
KR (1) KR100388422B1 (enExample)
CN (1) CN1244977C (enExample)
AT (1) ATE252288T1 (enExample)
AU (2) AU5707796A (enExample)
DE (1) DE69725564T2 (enExample)
RU (1) RU2179363C2 (enExample)
WO (2) WO1997036365A1 (enExample)

Cited By (5)

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RU2537971C1 (ru) * 2013-11-05 2015-01-10 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Встроенный пьезоэлектрический источник переменного тока для свободновращающихся инерционных осесимметричных тел
RU2575214C2 (ru) * 2012-07-02 2016-02-20 Павел Анатольевич Прилепко Пьезоэлектрический насос
RU2577923C2 (ru) * 2014-05-12 2016-03-20 Игорь Трофимович Пронькинов Способ получения механической энергии с помощью электроактивных полимеров
RU2690732C1 (ru) * 2018-08-07 2019-06-05 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Пьезоактюатор (варианты)
RU2743471C2 (ru) * 2016-09-08 2021-02-18 Сафран Хеликоптер Энджинз Устройство для управления входными направляющими лопатками посредством многослойного пьезоэлектрического привода

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6812624B1 (en) * 1999-07-20 2004-11-02 Sri International Electroactive polymers
US6781284B1 (en) 1997-02-07 2004-08-24 Sri International Electroactive polymer transducers and actuators
US7320457B2 (en) * 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US6543110B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer fabrication
US6586859B2 (en) * 2000-04-05 2003-07-01 Sri International Electroactive polymer animated devices
US6545384B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US6404104B1 (en) * 1997-11-27 2002-06-11 Canon Kabushiki Kaisha Vibration type actuator and vibration type driving apparatus
DE19834461C2 (de) * 1998-07-30 2000-09-28 Siemens Ag Vielschicht-Piezoaktor
US6238401B1 (en) * 1998-07-31 2001-05-29 Zuli Holdings Ltd. Apparatus and method for selectively positioning a device and manipulating it
US6664718B2 (en) 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
AU6230800A (en) * 1999-07-20 2001-02-05 Sri International Improved electroactive polymers
US7537197B2 (en) * 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
US6806621B2 (en) * 2001-03-02 2004-10-19 Sri International Electroactive polymer rotary motors
DE19941044A1 (de) * 1999-08-28 2001-03-22 Bosch Gmbh Robert Piezoelektrischer Keramikkörper
DE19946837A1 (de) * 1999-09-30 2001-05-03 Bosch Gmbh Robert Piezoaktor
FI108204B (fi) * 1999-11-25 2001-11-30 Kari Johannes Kirjavainen Kalvo energioiden muuntamiseksi
US6911764B2 (en) 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
AU2001238675A1 (en) * 2000-02-23 2001-09-03 Sri International Electroactive polymer thermal electric generators
JP5479659B2 (ja) 2000-02-23 2014-04-23 エスアールアイ インターナショナル 生体によって動力を供給される電気活性ポリマジェネレータ
US6646364B1 (en) * 2000-07-11 2003-11-11 Honeywell International Inc. MEMS actuator with lower power consumption and lower cost simplified fabrication
US6337532B1 (en) * 2000-08-11 2002-01-08 Piezomotor Uppsala Ab Fine walking actuator
SE0002885D0 (sv) 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Fine walking actuator
US7166953B2 (en) * 2001-03-02 2007-01-23 Jon Heim Electroactive polymer rotary clutch motors
US7035056B2 (en) * 2001-11-07 2006-04-25 Asml Netherlands B.V. Piezoelectric actuator and a lithographic apparatus and a device manufacturing method
AUPR907101A0 (en) * 2001-11-23 2001-12-20 University Of Wollongong, The An electromechanical actuator and methods of providing same
US6703761B2 (en) 2001-12-21 2004-03-09 Caterpillar Inc Method and apparatus for restraining temperature induced deformation of a piezoelectric device
EP2317639A1 (en) * 2002-03-18 2011-05-04 SRI International Electroactive polymer devices for moving fluid
US6747394B2 (en) * 2002-06-19 2004-06-08 Piezomotor Uppsala Ab Near-resonance electromechanical motor
AU2002346326A1 (en) * 2002-06-25 2004-01-06 Korea Electronics Technology Institute Spherical motor device
US6798117B2 (en) * 2002-07-10 2004-09-28 Piezomotor Uppsala Ab Fine control of electromechanical motors
WO2004030196A2 (en) * 2002-09-27 2004-04-08 University Of Waterloo Micro-positioning device
US7067958B2 (en) * 2004-02-17 2006-06-27 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
US7420321B2 (en) * 2006-03-03 2008-09-02 Piezomotor Uppsala Ab Heat efficient micromotor
WO2009006318A1 (en) 2007-06-29 2009-01-08 Artificial Muscle, Inc. Electroactive polymer transducers for sensory feedback applications
JP5434596B2 (ja) * 2007-12-07 2014-03-05 株式会社ニコン 振動アクチュエータ
JP5407155B2 (ja) * 2008-03-12 2014-02-05 株式会社ニコン 振動アクチュエータ、レンズユニット、及び撮像装置
WO2010015093A1 (en) * 2008-08-08 2010-02-11 Optotune Ag Electroactive optical device
US8022596B2 (en) 2008-12-12 2011-09-20 Piezomotor Uppsala Ab Guided electromechanical motor
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
US8712559B2 (en) * 2010-02-10 2014-04-29 The Board Of Trustees Of The University Of Illionois Adaptive control for uncertain nonlinear multi-input multi-output systems
WO2011147467A1 (en) 2010-05-28 2011-12-01 Piezomotor Uppsala Ab Rotating load bearer
US9553254B2 (en) 2011-03-01 2017-01-24 Parker-Hannifin Corporation Automated manufacturing processes for producing deformable polymer devices and films
ITMI20110375A1 (it) * 2011-03-10 2012-09-11 Wilic Sarl Turbina eolica
JP2014517331A (ja) 2011-03-22 2014-07-17 バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 電場応答性高分子アクチュエータレンチキュラシステム
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
WO2014005949A1 (en) * 2012-07-05 2014-01-09 Noliac A/S A wobble motor with a solid state actuator
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
JP6302263B2 (ja) * 2014-01-23 2018-03-28 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびデュプレクサ
JP6310360B2 (ja) * 2014-08-13 2018-04-11 太陽誘電株式会社 弾性波デバイス
CN104811158B (zh) * 2015-04-27 2017-05-24 电子科技大学 一种压电体声波谐振式传感器驱动电路的设计方法
US10310481B2 (en) 2015-10-07 2019-06-04 International Business Machines Corporation Dynamic position control for electronic components
DE102017223263A1 (de) * 2017-07-18 2019-01-24 BSH Hausgeräte GmbH Geschirrspülmaschine mit einer Flüssigkeitseinbringung in den oberen Bereich

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0419778A1 (en) * 1989-09-28 1991-04-03 Rockwell International Corporation Piezoelectric actuator
RU1688754C (ru) * 1980-06-14 1994-12-30 Научно-исследовательский институт физики при Ростовском государственном университете Способ изготовления многослойных пьезокерамических элементов
EP0360975B1 (en) * 1988-09-30 2000-02-02 Rockwell International Corporation Piezoelectric actuator

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412014C1 (de) 1984-03-31 1985-10-17 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Piezokeramischer Stellantrieb zur Erzeugung von Translationsbewegungen
JPS6162370A (ja) * 1984-08-31 1986-03-31 Tokyo Juki Ind Co Ltd ピエゾモ−タ
DE3530383A1 (de) * 1985-08-24 1987-03-05 Reifenhaeuser Masch Formgebendes werkzeugaggregat fuer eine strangpressvorrichtung fuer thermoplastifizierten kunststoff
US4727278A (en) * 1985-10-04 1988-02-23 Micro Pulse Systems, Inc. Piezoelectric multiaxis micropositioner
DE3844821C2 (en) * 1988-07-03 1993-07-22 Kfa Juelich Gmbh, 5170 Juelich, De Micromanipulator for raster tunnel microscope
US5323082A (en) * 1989-05-03 1994-06-21 Spectra Physics Lasers, Inc. Piezoelectric actuator for planar alignment
US5027028A (en) * 1989-08-29 1991-06-25 Skipper John D Piezoelectric motor
JPH03243358A (ja) * 1990-02-20 1991-10-30 Sharp Corp インクジェット記録ヘッド用圧電アクチュエータ
DE69109164T2 (de) 1990-03-23 1996-01-04 Rockwell International Corp Piezoelektrischer Motor.
DK0453826T3 (da) * 1990-04-27 1995-04-03 Rockwell International Corp Robotled
US5068566A (en) * 1990-06-04 1991-11-26 Rockwell International Corporation Electric traction motor
JPH05175567A (ja) * 1991-12-20 1993-07-13 Olympus Optical Co Ltd 積層型アクチュエータ
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
US5262696A (en) * 1991-07-05 1993-11-16 Rockwell International Corporation Biaxial transducer
US5283497A (en) * 1992-02-10 1994-02-01 Rockwell International Corporation Electrotiltable material (tilter)
EP0584775B1 (en) * 1992-08-25 1997-12-17 Canon Kabushiki Kaisha Production method of laminated piezoelectric device and polarization method thereof and vibration wave driven motor
US5485437A (en) * 1993-02-05 1996-01-16 Discovision Associates Shock-resistant, electrostatically actuated pick-up for optical recording and playback
US5471721A (en) 1993-02-23 1995-12-05 Research Corporation Technologies, Inc. Method for making monolithic prestressed ceramic devices
JPH07335951A (ja) * 1994-06-14 1995-12-22 Philips Japan Ltd 圧電アクチュエータ
US5798600A (en) * 1994-08-29 1998-08-25 Oceaneering International, Inc. Piezoelectric pumps
US5598050A (en) * 1995-02-17 1997-01-28 Materials Systems Inc. Acoustic actuator and flextensional cover plate there for
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
US5668432A (en) * 1995-03-24 1997-09-16 Nippondenso Co., Ltd. Articulation device
US5747915A (en) * 1996-08-19 1998-05-05 Sandia Corporation Bent shaft motor
US5745278A (en) * 1997-02-05 1998-04-28 Raytheon Optical Systems, Inc. Innovative deformable mirror actuator configuration

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU1688754C (ru) * 1980-06-14 1994-12-30 Научно-исследовательский институт физики при Ростовском государственном университете Способ изготовления многослойных пьезокерамических элементов
EP0360975B1 (en) * 1988-09-30 2000-02-02 Rockwell International Corporation Piezoelectric actuator
EP0419778A1 (en) * 1989-09-28 1991-04-03 Rockwell International Corporation Piezoelectric actuator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2575214C2 (ru) * 2012-07-02 2016-02-20 Павел Анатольевич Прилепко Пьезоэлектрический насос
RU2537971C1 (ru) * 2013-11-05 2015-01-10 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Встроенный пьезоэлектрический источник переменного тока для свободновращающихся инерционных осесимметричных тел
RU2577923C2 (ru) * 2014-05-12 2016-03-20 Игорь Трофимович Пронькинов Способ получения механической энергии с помощью электроактивных полимеров
RU2743471C2 (ru) * 2016-09-08 2021-02-18 Сафран Хеликоптер Энджинз Устройство для управления входными направляющими лопатками посредством многослойного пьезоэлектрического привода
RU2690732C1 (ru) * 2018-08-07 2019-06-05 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Пьезоактюатор (варианты)

Also Published As

Publication number Publication date
DE69725564D1 (de) 2003-11-20
AU2315497A (en) 1997-10-17
WO1997036365A1 (en) 1997-10-02
EP0890216A1 (en) 1999-01-13
JP2000507439A (ja) 2000-06-13
KR20000005033A (ko) 2000-01-25
KR100388422B1 (ko) 2003-10-30
CN1220054A (zh) 1999-06-16
AU5707796A (en) 1997-10-17
CN1244977C (zh) 2006-03-08
ATE252288T1 (de) 2003-11-15
EP0890216B1 (en) 2003-10-15
WO1997036366A1 (en) 1997-10-02
US6184609B1 (en) 2001-02-06
DE69725564T2 (de) 2004-08-05
JP3980646B2 (ja) 2007-09-26

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