DE69725564D1 - Piezoelektrischer aktuator oder motor, verfahren hierzu und herstellungsverfahren - Google Patents

Piezoelektrischer aktuator oder motor, verfahren hierzu und herstellungsverfahren

Info

Publication number
DE69725564D1
DE69725564D1 DE69725564T DE69725564T DE69725564D1 DE 69725564 D1 DE69725564 D1 DE 69725564D1 DE 69725564 T DE69725564 T DE 69725564T DE 69725564 T DE69725564 T DE 69725564T DE 69725564 D1 DE69725564 D1 DE 69725564D1
Authority
DE
Germany
Prior art keywords
motor
manufacturing
piezoelectric actuator
actuator
relates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69725564T
Other languages
English (en)
Other versions
DE69725564T2 (de
Inventor
Mats Bexell
Stefan Johansson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Piezomotor Uppsala AB
Original Assignee
Piezomotor Uppsala AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piezomotor Uppsala AB filed Critical Piezomotor Uppsala AB
Publication of DE69725564D1 publication Critical patent/DE69725564D1/de
Application granted granted Critical
Publication of DE69725564T2 publication Critical patent/DE69725564T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
DE69725564T 1996-03-26 1997-03-26 Piezoelektrischer Schalter oder Motor, Verfahren hierzu und Herstellungsverfahren Expired - Lifetime DE69725564T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/SE1996/000391 WO1997036365A1 (en) 1996-03-26 1996-03-26 An actuator motor and a method for fabrication of such an actuator
WOPCT/SE96/00391 1996-03-26
PCT/SE1997/000541 WO1997036366A1 (en) 1996-03-26 1997-03-26 Piezoelectric actuator or motor, method therefor and method for fabrication thereof

Publications (2)

Publication Number Publication Date
DE69725564D1 true DE69725564D1 (de) 2003-11-20
DE69725564T2 DE69725564T2 (de) 2004-08-05

Family

ID=20401251

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69725564T Expired - Lifetime DE69725564T2 (de) 1996-03-26 1997-03-26 Piezoelektrischer Schalter oder Motor, Verfahren hierzu und Herstellungsverfahren

Country Status (10)

Country Link
US (1) US6184609B1 (de)
EP (1) EP0890216B1 (de)
JP (1) JP3980646B2 (de)
KR (1) KR100388422B1 (de)
CN (1) CN1244977C (de)
AT (1) ATE252288T1 (de)
AU (2) AU5707796A (de)
DE (1) DE69725564T2 (de)
RU (1) RU2179363C2 (de)
WO (2) WO1997036365A1 (de)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6781284B1 (en) 1997-02-07 2004-08-24 Sri International Electroactive polymer transducers and actuators
US6812624B1 (en) * 1999-07-20 2004-11-02 Sri International Electroactive polymers
US6586859B2 (en) * 2000-04-05 2003-07-01 Sri International Electroactive polymer animated devices
US6543110B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer fabrication
US6545384B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US7320457B2 (en) * 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US6404104B1 (en) * 1997-11-27 2002-06-11 Canon Kabushiki Kaisha Vibration type actuator and vibration type driving apparatus
DE19834461C2 (de) * 1998-07-30 2000-09-28 Siemens Ag Vielschicht-Piezoaktor
US6238401B1 (en) * 1998-07-31 2001-05-29 Zuli Holdings Ltd. Apparatus and method for selectively positioning a device and manipulating it
US7064472B2 (en) * 1999-07-20 2006-06-20 Sri International Electroactive polymer devices for moving fluid
US6664718B2 (en) 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US6806621B2 (en) * 2001-03-02 2004-10-19 Sri International Electroactive polymer rotary motors
US7537197B2 (en) * 1999-07-20 2009-05-26 Sri International Electroactive polymer devices for controlling fluid flow
EP1212800B1 (de) * 1999-07-20 2007-12-12 Sri International Elektroaktive Polymergeneratoren
DE19941044A1 (de) * 1999-08-28 2001-03-22 Bosch Gmbh Robert Piezoelektrischer Keramikkörper
DE19946837A1 (de) * 1999-09-30 2001-05-03 Bosch Gmbh Robert Piezoaktor
FI108204B (fi) * 1999-11-25 2001-11-30 Kari Johannes Kirjavainen Kalvo energioiden muuntamiseksi
US6911764B2 (en) 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
US6768246B2 (en) 2000-02-23 2004-07-27 Sri International Biologically powered electroactive polymer generators
AU2001238675A1 (en) * 2000-02-23 2001-09-03 Sri International Electroactive polymer thermal electric generators
US6646364B1 (en) * 2000-07-11 2003-11-11 Honeywell International Inc. MEMS actuator with lower power consumption and lower cost simplified fabrication
SE0002885D0 (sv) 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Fine walking actuator
US6337532B1 (en) * 2000-08-11 2002-01-08 Piezomotor Uppsala Ab Fine walking actuator
US7166953B2 (en) * 2001-03-02 2007-01-23 Jon Heim Electroactive polymer rotary clutch motors
TWI275910B (en) * 2001-11-07 2007-03-11 Asml Netherlands Bv A piezoelectric actuator and a lithographic apparatus and a device manufacturing method
AUPR907101A0 (en) 2001-11-23 2001-12-20 University Of Wollongong, The An electromechanical actuator and methods of providing same
US6703761B2 (en) 2001-12-21 2004-03-09 Caterpillar Inc Method and apparatus for restraining temperature induced deformation of a piezoelectric device
US6747394B2 (en) * 2002-06-19 2004-06-08 Piezomotor Uppsala Ab Near-resonance electromechanical motor
WO2004001941A1 (en) * 2002-06-25 2003-12-31 Korea Electronics Technology Institute Spherical motor device
US6798117B2 (en) * 2002-07-10 2004-09-28 Piezomotor Uppsala Ab Fine control of electromechanical motors
WO2004030196A2 (en) * 2002-09-27 2004-04-08 University Of Waterloo Micro-positioning device
US7067958B2 (en) * 2004-02-17 2006-06-27 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
JP4756916B2 (ja) * 2005-05-31 2011-08-24 キヤノン株式会社 振動波モータ
US7420321B2 (en) * 2006-03-03 2008-09-02 Piezomotor Uppsala Ab Heat efficient micromotor
JP5602626B2 (ja) 2007-06-29 2014-10-08 アーティフィシャル マッスル，インク． 感覚性フィードバック用途のための電気活性ポリマートランスデューサー
WO2009072304A1 (ja) * 2007-12-07 2009-06-11 Nikon Corporation 振動アクチュエータおよび撮像装置
JP5407155B2 (ja) * 2008-03-12 2014-02-05 株式会社ニコン 振動アクチュエータ、レンズユニット、及び撮像装置
WO2010015093A1 (en) * 2008-08-08 2010-02-11 Optotune Ag Electroactive optical device
US8022596B2 (en) 2008-12-12 2011-09-20 Piezomotor Uppsala Ab Guided electromechanical motor
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
US8712559B2 (en) * 2010-02-10 2014-04-29 The Board Of Trustees Of The University Of Illionois Adaptive control for uncertain nonlinear multi-input multi-output systems
WO2011147467A1 (en) 2010-05-28 2011-12-01 Piezomotor Uppsala Ab Rotating load bearer
KR20140008416A (ko) 2011-03-01 2014-01-21 바이엘 인텔렉쳐 프로퍼티 게엠베하 변형가능한 중합체 장치 및 필름을 제조하기 위한 자동화 제조 방법
ITMI20110375A1 (it) * 2011-03-10 2012-09-11 Wilic Sarl Turbina eolica
WO2012129357A2 (en) 2011-03-22 2012-09-27 Bayer Materialscience Ag Electroactive polymer actuator lenticular system
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
WO2014005949A1 (en) * 2012-07-05 2014-01-09 Noliac A/S A wobble motor with a solid state actuator
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
RU2537971C1 (ru) * 2013-11-05 2015-01-10 Федеральное Государственное Унитарное Предприятие "Всероссийский Научно-Исследовательский Институт Физико-Технических И Радиотехнических Измерений" (Фгуп "Вниифтри") Встроенный пьезоэлектрический источник переменного тока для свободновращающихся инерционных осесимметричных тел
JP6302263B2 (ja) * 2014-01-23 2018-03-28 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびデュプレクサ
RU2577923C2 (ru) * 2014-05-12 2016-03-20 Игорь Трофимович Пронькинов Способ получения механической энергии с помощью электроактивных полимеров
JP6310360B2 (ja) 2014-08-13 2018-04-11 太陽誘電株式会社 弾性波デバイス
CN104811158B (zh) * 2015-04-27 2017-05-24 电子科技大学 一种压电体声波谐振式传感器驱动电路的设计方法
US10310481B2 (en) 2015-10-07 2019-06-04 International Business Machines Corporation Dynamic position control for electronic components
FR3055758B1 (fr) * 2016-09-08 2020-11-27 Safran Helicopter Engines Dispositif de pilotage des volets d'entree d'air via un actionneur piezoelectrique multicouche
DE102017223271A1 (de) * 2017-07-18 2019-01-24 BSH Hausgeräte GmbH Geschirrspülmaschine mit ein oder mehreren Beladeeinheiten
RU2690732C1 (ru) * 2018-08-07 2019-06-05 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Пьезоактюатор (варианты)

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3412014C1 (de) 1984-03-31 1985-10-17 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Piezokeramischer Stellantrieb zur Erzeugung von Translationsbewegungen
JPS6162370A (ja) * 1984-08-31 1986-03-31 Tokyo Juki Ind Co Ltd ピエゾモ−タ
DE3530383A1 (de) * 1985-08-24 1987-03-05 Reifenhaeuser Masch Formgebendes werkzeugaggregat fuer eine strangpressvorrichtung fuer thermoplastifizierten kunststoff
US4727278A (en) * 1985-10-04 1988-02-23 Micro Pulse Systems, Inc. Piezoelectric multiaxis micropositioner
DE3822504A1 (de) * 1988-07-03 1990-01-04 Kernforschungsanlage Juelich Mikromanipulator
US4928030A (en) * 1988-09-30 1990-05-22 Rockwell International Corporation Piezoelectric actuator
US5323082A (en) * 1989-05-03 1994-06-21 Spectra Physics Lasers, Inc. Piezoelectric actuator for planar alignment
US5027028A (en) * 1989-08-29 1991-06-25 Skipper John D Piezoelectric motor
JPH03243358A (ja) * 1990-02-20 1991-10-30 Sharp Corp インクジェット記録ヘッド用圧電アクチュエータ
DK0449048T3 (da) 1990-03-23 1995-06-26 Rockwell International Corp Piezoelektrisk motor
ES2071146T3 (es) * 1990-04-27 1995-06-16 Rockwell International Corp Articulacion robotica.
US5068566A (en) * 1990-06-04 1991-11-26 Rockwell International Corporation Electric traction motor
JPH05175567A (ja) * 1991-12-20 1993-07-13 Olympus Optical Co Ltd 積層型アクチュエータ
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
US5262696A (en) 1991-07-05 1993-11-16 Rockwell International Corporation Biaxial transducer
US5283497A (en) * 1992-02-10 1994-02-01 Rockwell International Corporation Electrotiltable material (tilter)
DE69315767T2 (de) * 1992-08-25 1998-05-07 Canon Kk Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor
US5485437A (en) * 1993-02-05 1996-01-16 Discovision Associates Shock-resistant, electrostatically actuated pick-up for optical recording and playback
US5471721A (en) 1993-02-23 1995-12-05 Research Corporation Technologies, Inc. Method for making monolithic prestressed ceramic devices
JPH07335951A (ja) * 1994-06-14 1995-12-22 Philips Japan Ltd 圧電アクチュエータ
US5798600A (en) * 1994-08-29 1998-08-25 Oceaneering International, Inc. Piezoelectric pumps
US5598050A (en) * 1995-02-17 1997-01-28 Materials Systems Inc. Acoustic actuator and flextensional cover plate there for
DE19605214A1 (de) * 1995-02-23 1996-08-29 Bosch Gmbh Robert Ultraschallantriebselement
US5668432A (en) * 1995-03-24 1997-09-16 Nippondenso Co., Ltd. Articulation device
US5747915A (en) * 1996-08-19 1998-05-05 Sandia Corporation Bent shaft motor
US5745278A (en) * 1997-02-05 1998-04-28 Raytheon Optical Systems, Inc. Innovative deformable mirror actuator configuration

Also Published As

Publication number Publication date
ATE252288T1 (de) 2003-11-15
WO1997036365A1 (en) 1997-10-02
AU5707796A (en) 1997-10-17
EP0890216A1 (de) 1999-01-13
CN1220054A (zh) 1999-06-16
JP2000507439A (ja) 2000-06-13
KR20000005033A (ko) 2000-01-25
JP3980646B2 (ja) 2007-09-26
DE69725564T2 (de) 2004-08-05
AU2315497A (en) 1997-10-17
US6184609B1 (en) 2001-02-06
KR100388422B1 (ko) 2003-10-30
RU2179363C2 (ru) 2002-02-10
WO1997036366A1 (en) 1997-10-02
EP0890216B1 (de) 2003-10-15
CN1244977C (zh) 2006-03-08

Similar Documents

Publication Publication Date Title
DE69725564D1 (de) Piezoelektrischer aktuator oder motor, verfahren hierzu und herstellungsverfahren
DE60224844D1 (de) Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren
EP0938144A3 (de) Trägerplatte mit Ultraschallmotor und Drucker mit solcher Trägerplatte
DE60320730D1 (de) 2-D Stellelement und dazugehöriges Herstellungsverfahren
EP0304893A3 (de) Codiereinrichtung
EP1122885A3 (de) Verfahren und Gerät zum Steuern eines Halbleiterelements
ATE338010T1 (de) Mikroelektromechanische elektrostatische ventilvorrichtung mit flexibler membrane und deren herstellungsverfahren
ATE525017T1 (de) Sensoranordnung und verfahren zur bestimmung des zustandes einer struktur
EP1202099A3 (de) Elektrostatischer Betätiger und diesen Betätiger enthaltendes Kameramodul
JPH05219760A (ja) 静電式アクチュエータ
ATE487921T1 (de) Positionssensor mit elastomerischem material
SE9203114D0 (sv) Testbar piezoelektrisk acceleratonssensor
CA2057619A1 (en) Cantilever probe and apparatus using the same
WO1999050630A3 (en) Linear force sensing device
EP0993055A3 (de) Piezoelektrischer Antrieb und elektronisches Gerät mit piezoelektrischem Antrieb
WO2004012279A3 (en) High resolution piezoelectric motor
JPH06260523A (ja) ワイヤクランパ
DE69820420D1 (de) Piezoelektrischer antrieb
ATE408241T1 (de) Elektronische einrichtung
US5382865A (en) Composite multilayer ceramic structure
TW331043B (en) Piezoelectric actuator device
SE9101693D0 (sv) Stoetsensor
WO2002099844A3 (de) Piezoelektrischer antrieb
FR2859541B1 (fr) Micro-miroir actionnable electriquement en rotation
KR880005733A (ko) 전왜모터

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PIEZOMOTOR UPPSALA AKTIENBOLAG, UPPSALA, SE