CN1244977C - 压电致动器或马达 - Google Patents

压电致动器或马达 Download PDF

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Publication number
CN1244977C
CN1244977C CNB971949778A CN97194977A CN1244977C CN 1244977 C CN1244977 C CN 1244977C CN B971949778 A CNB971949778 A CN B971949778A CN 97194977 A CN97194977 A CN 97194977A CN 1244977 C CN1244977 C CN 1244977C
Authority
CN
China
Prior art keywords
actuator
monolithic
motor
active
motor according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB971949778A
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English (en)
Chinese (zh)
Other versions
CN1220054A (zh
Inventor
M·贝色尔
S·约翰逊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Piezomotor Uppsala AB
Original Assignee
Piezomotor Uppsala AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Piezomotor Uppsala AB filed Critical Piezomotor Uppsala AB
Publication of CN1220054A publication Critical patent/CN1220054A/zh
Application granted granted Critical
Publication of CN1244977C publication Critical patent/CN1244977C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane parallel to the stacking direction, e.g. polygonal or trapezoidal in side view
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H10N30/505Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
CNB971949778A 1996-03-26 1997-03-26 压电致动器或马达 Expired - Lifetime CN1244977C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/SE1996/000391 WO1997036365A1 (en) 1996-03-26 1996-03-26 An actuator motor and a method for fabrication of such an actuator
WOPCT/SE96/00391 1996-03-26

Publications (2)

Publication Number Publication Date
CN1220054A CN1220054A (zh) 1999-06-16
CN1244977C true CN1244977C (zh) 2006-03-08

Family

ID=20401251

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB971949778A Expired - Lifetime CN1244977C (zh) 1996-03-26 1997-03-26 压电致动器或马达

Country Status (10)

Country Link
US (1) US6184609B1 (enExample)
EP (1) EP0890216B1 (enExample)
JP (1) JP3980646B2 (enExample)
KR (1) KR100388422B1 (enExample)
CN (1) CN1244977C (enExample)
AT (1) ATE252288T1 (enExample)
AU (2) AU5707796A (enExample)
DE (1) DE69725564T2 (enExample)
RU (1) RU2179363C2 (enExample)
WO (2) WO1997036365A1 (enExample)

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JP5407155B2 (ja) * 2008-03-12 2014-02-05 株式会社ニコン 振動アクチュエータ、レンズユニット、及び撮像装置
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US8712559B2 (en) * 2010-02-10 2014-04-29 The Board Of Trustees Of The University Of Illionois Adaptive control for uncertain nonlinear multi-input multi-output systems
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JP6302263B2 (ja) * 2014-01-23 2018-03-28 太陽誘電株式会社 圧電薄膜共振器、フィルタおよびデュプレクサ
RU2577923C2 (ru) * 2014-05-12 2016-03-20 Игорь Трофимович Пронькинов Способ получения механической энергии с помощью электроактивных полимеров
JP6310360B2 (ja) * 2014-08-13 2018-04-11 太陽誘電株式会社 弾性波デバイス
CN104811158B (zh) * 2015-04-27 2017-05-24 电子科技大学 一种压电体声波谐振式传感器驱动电路的设计方法
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Also Published As

Publication number Publication date
EP0890216A1 (en) 1999-01-13
AU5707796A (en) 1997-10-17
JP2000507439A (ja) 2000-06-13
DE69725564T2 (de) 2004-08-05
EP0890216B1 (en) 2003-10-15
RU2179363C2 (ru) 2002-02-10
ATE252288T1 (de) 2003-11-15
WO1997036365A1 (en) 1997-10-02
DE69725564D1 (de) 2003-11-20
JP3980646B2 (ja) 2007-09-26
KR100388422B1 (ko) 2003-10-30
KR20000005033A (ko) 2000-01-25
US6184609B1 (en) 2001-02-06
CN1220054A (zh) 1999-06-16
AU2315497A (en) 1997-10-17
WO1997036366A1 (en) 1997-10-02

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