RU2107893C1 - Способ исследования оптического диска оригинала и устройство для его осуществления - Google Patents

Способ исследования оптического диска оригинала и устройство для его осуществления Download PDF

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Publication number
RU2107893C1
RU2107893C1 RU95121761A RU95121761A RU2107893C1 RU 2107893 C1 RU2107893 C1 RU 2107893C1 RU 95121761 A RU95121761 A RU 95121761A RU 95121761 A RU95121761 A RU 95121761A RU 2107893 C1 RU2107893 C1 RU 2107893C1
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RU
Russia
Prior art keywords
disk
light
diffracted
original
layer
Prior art date
Application number
RU95121761A
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English (en)
Russian (ru)
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RU95121761A (ru
Inventor
Альфред Джон Рейнолдс Джеральд
Халлидей Джонатан
Original Assignee
Нимбус Коммуникейшнз Интернэшнл Лимитед
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Publication of RU95121761A publication Critical patent/RU95121761A/ru
Application granted granted Critical
Publication of RU2107893C1 publication Critical patent/RU2107893C1/ru

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
RU95121761A 1993-04-07 1994-04-05 Способ исследования оптического диска оригинала и устройство для его осуществления RU2107893C1 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB939307239A GB9307239D0 (en) 1993-04-07 1993-04-07 Method and apparatus for process control
GB9307239.5 1993-04-07
PCT/GB1994/000720 WO1994023343A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control

Publications (2)

Publication Number Publication Date
RU95121761A RU95121761A (ru) 1997-10-20
RU2107893C1 true RU2107893C1 (ru) 1998-03-27

Family

ID=10733474

Family Applications (1)

Application Number Title Priority Date Filing Date
RU95121761A RU2107893C1 (ru) 1993-04-07 1994-04-05 Способ исследования оптического диска оригинала и устройство для его осуществления

Country Status (17)

Country Link
EP (1) EP0695438A1 (zh)
JP (1) JPH08508602A (zh)
CN (1) CN1120866A (zh)
AU (1) AU675125B2 (zh)
BR (1) BR9406451A (zh)
CA (1) CA2159100A1 (zh)
CZ (1) CZ283292B6 (zh)
FI (1) FI954769A (zh)
GB (1) GB9307239D0 (zh)
HU (1) HUT73543A (zh)
IL (1) IL109238A (zh)
NO (1) NO953933L (zh)
NZ (1) NZ263235A (zh)
RU (1) RU2107893C1 (zh)
SG (1) SG44328A1 (zh)
TW (1) TW255966B (zh)
WO (1) WO1994023343A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8576686B2 (en) 2005-01-25 2013-11-05 Cinram Group, Inc. Apparatus for multilevel optical recording
US8472020B2 (en) 2005-02-15 2013-06-25 Cinram Group, Inc. Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects
US7535806B2 (en) 2005-07-07 2009-05-19 Cinram International Inc. Apparatus and method for detecting laser dropout
EP1965383A1 (en) * 2007-03-02 2008-09-03 Singulus Mastering B.V. Diffraction order measurement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857843U (ja) * 1981-10-16 1983-04-19 パイオニア株式会社 フオトレジスト湿式現像装置
JPS59121337A (ja) * 1982-12-24 1984-07-13 Fujitsu Ltd レジスト現像装置
EP0379281A3 (en) * 1989-01-19 1991-03-20 Cosmopolitan Textile Company Limited Web inspecting method and apparatus
JP2861073B2 (ja) * 1989-07-05 1999-02-24 ソニー株式会社 現像装置
US5124216A (en) * 1990-07-31 1992-06-23 At&T Bell Laboratories Method for monitoring photoresist latent images
JPH04141840A (ja) * 1990-10-01 1992-05-15 Matsushita Electric Ind Co Ltd フォトレジスト自動現像装置
JPH04311837A (ja) * 1991-04-10 1992-11-04 Tdk Corp 光ディスク原盤の現像方法
US5357304A (en) * 1992-03-25 1994-10-18 Sony Corporation Image development apparatus and method

Also Published As

Publication number Publication date
NO953933D0 (no) 1995-10-03
EP0695438A1 (en) 1996-02-07
BR9406451A (pt) 1996-01-02
AU6384194A (en) 1994-10-24
GB9307239D0 (en) 1993-06-02
CA2159100A1 (en) 1994-10-13
SG44328A1 (en) 1997-12-19
WO1994023343A1 (en) 1994-10-13
CN1120866A (zh) 1996-04-17
FI954769A0 (fi) 1995-10-06
NO953933L (no) 1995-10-03
CZ257195A3 (en) 1996-09-11
IL109238A0 (en) 1994-07-31
IL109238A (en) 1997-07-13
HU9502729D0 (en) 1995-11-28
JPH08508602A (ja) 1996-09-10
FI954769A (fi) 1995-10-06
NZ263235A (en) 1996-07-26
TW255966B (zh) 1995-09-01
AU675125B2 (en) 1997-01-23
CZ283292B6 (cs) 1998-02-18
HUT73543A (en) 1996-08-28

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