EP0695438A1 - Method and apparatus for process control - Google Patents

Method and apparatus for process control

Info

Publication number
EP0695438A1
EP0695438A1 EP94911284A EP94911284A EP0695438A1 EP 0695438 A1 EP0695438 A1 EP 0695438A1 EP 94911284 A EP94911284 A EP 94911284A EP 94911284 A EP94911284 A EP 94911284A EP 0695438 A1 EP0695438 A1 EP 0695438A1
Authority
EP
European Patent Office
Prior art keywords
master disk
light beam
optical master
optical
developing fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP94911284A
Other languages
German (de)
English (en)
French (fr)
Inventor
Gerald Alfred John Reynolds
Jonathan Halliday
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nimbus Communications International Ltd
Original Assignee
Nimbus Communications International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nimbus Communications International Ltd filed Critical Nimbus Communications International Ltd
Publication of EP0695438A1 publication Critical patent/EP0695438A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G03F7/3028—Imagewise removal using liquid means from a wafer supported on a rotating chuck characterised by means for on-wafer monitoring of the processing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Definitions

  • a reflected rather than a transmitted beam bring certain practical advantages. All optical parts can be located above the disk, the measurement can be made insensitive to the condition of, for example, the under surface of the glass, and the disk master can be mounted on an opaque turntable or spider structure without interfering with the optical measurement. There is also a more fundamental advantage. It is found that the strength of, for example, the first- order diffracted beam is not greatly different whether it is measured in transmission through the pitted master surface on in reflection from it. The zero- order or direct beam, however, is greatly attenuated in reflection compared with transmission. This means that the strength of the first-order beam, measured as a fraction of the zero-order beam, is greater in reflection than it is in transmission. Therefore, the consequences of stray light from the zero-order beam entering the first-order beam detector are less serious if the reflected beam is used.
  • FIG. 3 shows an optical sensing arrangement in accordance with an embodiment of the present invention
  • Fig. 4 shows a general view of a developing arrangement incorporating the optical sensor of Fig. 3;
  • the first-order diffracted beam 8 lies within the plane of the drawing and reaches the photodiode sensor 9.
  • the sensor 9 is large enough to intercept the beam 8 for any allowable value of the track pitch recorded on the disk 3. (A track pitch range of 1.5 -

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
EP94911284A 1993-04-07 1994-04-05 Method and apparatus for process control Withdrawn EP0695438A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB939307239A GB9307239D0 (en) 1993-04-07 1993-04-07 Method and apparatus for process control
GB9307239 1993-04-07
PCT/GB1994/000720 WO1994023343A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control

Publications (1)

Publication Number Publication Date
EP0695438A1 true EP0695438A1 (en) 1996-02-07

Family

ID=10733474

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94911284A Withdrawn EP0695438A1 (en) 1993-04-07 1994-04-05 Method and apparatus for process control

Country Status (17)

Country Link
EP (1) EP0695438A1 (zh)
JP (1) JPH08508602A (zh)
CN (1) CN1120866A (zh)
AU (1) AU675125B2 (zh)
BR (1) BR9406451A (zh)
CA (1) CA2159100A1 (zh)
CZ (1) CZ283292B6 (zh)
FI (1) FI954769A (zh)
GB (1) GB9307239D0 (zh)
HU (1) HUT73543A (zh)
IL (1) IL109238A (zh)
NO (1) NO953933L (zh)
NZ (1) NZ263235A (zh)
RU (1) RU2107893C1 (zh)
SG (1) SG44328A1 (zh)
TW (1) TW255966B (zh)
WO (1) WO1994023343A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8576686B2 (en) 2005-01-25 2013-11-05 Cinram Group, Inc. Apparatus for multilevel optical recording
US8472020B2 (en) 2005-02-15 2013-06-25 Cinram Group, Inc. Process for enhancing dye polymer recording yields by pre-scanning coated substrate for defects
US7535806B2 (en) 2005-07-07 2009-05-19 Cinram International Inc. Apparatus and method for detecting laser dropout
EP1965383A1 (en) * 2007-03-02 2008-09-03 Singulus Mastering B.V. Diffraction order measurement

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5857843U (ja) * 1981-10-16 1983-04-19 パイオニア株式会社 フオトレジスト湿式現像装置
JPS59121337A (ja) * 1982-12-24 1984-07-13 Fujitsu Ltd レジスト現像装置
EP0379281A3 (en) * 1989-01-19 1991-03-20 Cosmopolitan Textile Company Limited Web inspecting method and apparatus
JP2861073B2 (ja) * 1989-07-05 1999-02-24 ソニー株式会社 現像装置
US5124216A (en) * 1990-07-31 1992-06-23 At&T Bell Laboratories Method for monitoring photoresist latent images
JPH04141840A (ja) * 1990-10-01 1992-05-15 Matsushita Electric Ind Co Ltd フォトレジスト自動現像装置
JPH04311837A (ja) * 1991-04-10 1992-11-04 Tdk Corp 光ディスク原盤の現像方法
US5357304A (en) * 1992-03-25 1994-10-18 Sony Corporation Image development apparatus and method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9423343A1 *

Also Published As

Publication number Publication date
NO953933D0 (no) 1995-10-03
BR9406451A (pt) 1996-01-02
AU6384194A (en) 1994-10-24
GB9307239D0 (en) 1993-06-02
CA2159100A1 (en) 1994-10-13
SG44328A1 (en) 1997-12-19
WO1994023343A1 (en) 1994-10-13
CN1120866A (zh) 1996-04-17
FI954769A0 (fi) 1995-10-06
RU2107893C1 (ru) 1998-03-27
NO953933L (no) 1995-10-03
CZ257195A3 (en) 1996-09-11
IL109238A0 (en) 1994-07-31
IL109238A (en) 1997-07-13
HU9502729D0 (en) 1995-11-28
JPH08508602A (ja) 1996-09-10
FI954769A (fi) 1995-10-06
NZ263235A (en) 1996-07-26
TW255966B (zh) 1995-09-01
AU675125B2 (en) 1997-01-23
CZ283292B6 (cs) 1998-02-18
HUT73543A (en) 1996-08-28

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