RU2012113315A - Способ и устройство для нанесения покрытий - Google Patents
Способ и устройство для нанесения покрытий Download PDFInfo
- Publication number
- RU2012113315A RU2012113315A RU2012113315/05A RU2012113315A RU2012113315A RU 2012113315 A RU2012113315 A RU 2012113315A RU 2012113315/05 A RU2012113315/05 A RU 2012113315/05A RU 2012113315 A RU2012113315 A RU 2012113315A RU 2012113315 A RU2012113315 A RU 2012113315A
- Authority
- RU
- Russia
- Prior art keywords
- chamber
- slot
- atmosphere
- separating
- organic layer
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims 9
- 238000000034 method Methods 0.000 title claims 3
- 239000011248 coating agent Substances 0.000 title 1
- 239000010410 layer Substances 0.000 claims abstract 14
- 239000000203 mixture Substances 0.000 claims abstract 14
- 239000012044 organic layer Substances 0.000 claims abstract 13
- 239000000758 substrate Substances 0.000 claims abstract 12
- 229920000642 polymer Polymers 0.000 claims abstract 6
- 230000008021 deposition Effects 0.000 claims abstract 3
- 239000003505 polymerization initiator Substances 0.000 claims abstract 3
- 239000002243 precursor Substances 0.000 claims abstract 3
- 238000007740 vapor deposition Methods 0.000 claims abstract 3
- 238000001723 curing Methods 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000005086 pumping Methods 0.000 claims 2
- 239000012952 cationic photoinitiator Substances 0.000 claims 1
- 238000002508 contact lithography Methods 0.000 claims 1
- 238000001227 electron beam curing Methods 0.000 claims 1
- 239000012949 free radical photoinitiator Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000000016 photochemical curing Methods 0.000 claims 1
- 230000001376 precipitating effect Effects 0.000 claims 1
- 238000001556 precipitation Methods 0.000 claims 1
- 150000003254 radicals Chemical class 0.000 claims 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
- B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/06—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
- H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2252/00—Sheets
- B05D2252/02—Sheets of indefinite length
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Coating Apparatus (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09169668.2 | 2009-09-07 | ||
| EP09169668A EP2292339A1 (en) | 2009-09-07 | 2009-09-07 | Coating method and coating apparatus |
| PCT/NL2010/050560 WO2011028119A1 (en) | 2009-09-07 | 2010-09-06 | Coating method and coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RU2012113315A true RU2012113315A (ru) | 2013-10-20 |
Family
ID=41531217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2012113315/05A RU2012113315A (ru) | 2009-09-07 | 2010-09-06 | Способ и устройство для нанесения покрытий |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9539615B2 (https=) |
| EP (2) | EP2292339A1 (https=) |
| JP (1) | JP5623531B2 (https=) |
| KR (1) | KR101776790B1 (https=) |
| CN (1) | CN102574156B (https=) |
| CA (1) | CA2773520A1 (https=) |
| IN (1) | IN2012DN01946A (https=) |
| RU (1) | RU2012113315A (https=) |
| TW (1) | TWI555583B (https=) |
| WO (1) | WO2011028119A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2690923C2 (ru) * | 2015-06-17 | 2019-06-06 | Зе Боинг Компани | Устройство для нанесения светоотверждаемого материала и связанные с ним способы |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013082279A1 (en) * | 2011-11-29 | 2013-06-06 | Itn Energy Systems, Inc. | Multi-zone modular coater |
| EP2626144A1 (en) | 2012-02-07 | 2013-08-14 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Roll to roll manufacturing system having a clean room deposition zone and a separate processing zone |
| JP6055295B2 (ja) * | 2012-11-29 | 2016-12-27 | 東レエンジニアリング株式会社 | 両面薄膜形成装置 |
| CN103878093A (zh) * | 2012-12-24 | 2014-06-25 | 鸿富锦精密工业（深圳）有限公司 | 胶带的制造方法及其采用的设备 |
| EP3034182A1 (en) * | 2014-12-17 | 2016-06-22 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Coating system and coating method |
| FR3035122B1 (fr) * | 2015-04-20 | 2017-04-28 | Coating Plasma Ind | Procede de traitement de surface d'un film en mouvement et installation pour la mise en oeuvre de ce procede |
| CN107265152B (zh) * | 2017-06-09 | 2019-08-16 | 浙江汇锋薄膜科技有限公司 | 一种导电薄膜的制备设备上的放料张紧装置 |
| EP3479908A1 (en) * | 2017-11-03 | 2019-05-08 | A & R Carton OY | Method of and coating application unit for applying a coating on a web of material |
| KR101863259B1 (ko) * | 2018-01-17 | 2018-06-04 | 차천용 | 점착제 도포장치 |
| KR101863260B1 (ko) * | 2018-01-17 | 2018-06-04 | 차천용 | 친환경 점착제 도포장치 |
| JP7725613B2 (ja) | 2021-05-06 | 2025-08-19 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 多層バリアフィルム、その製造、及び光起電力用途におけるその使用 |
| PL246621B1 (pl) * | 2021-07-22 | 2025-02-17 | Siec Badawcza Lukasiewicz Instytut Tech Eksploatacji W Radomiu | System przewijania materiału ciągłego (taśma, drut) |
| JP2025540398A (ja) | 2022-12-14 | 2025-12-11 | ビーエーエスエフ コーティングス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 多層バリアフィルムでコーティングされたポリマー基材、その製造及び電子デバイスへの使用方法 |
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| US3708296A (en) | 1968-08-20 | 1973-01-02 | American Can Co | Photopolymerization of epoxy monomers |
| US4702963A (en) | 1981-04-03 | 1987-10-27 | Optical Coating Laboratory, Inc. | Flexible polymer film with vapor impermeable coating |
| US4462332A (en) * | 1982-04-29 | 1984-07-31 | Energy Conversion Devices, Inc. | Magnetic gas gate |
| US5130170A (en) * | 1989-06-28 | 1992-07-14 | Canon Kabushiki Kaisha | Microwave pcvd method for continuously forming a large area functional deposited film using a curved moving substrate web with microwave energy with a directivity in one direction perpendicular to the direction of microwave propagation |
| CA2040682A1 (en) | 1990-04-20 | 1991-10-21 | Bruce L. Booth | Moisture sealing of optical waveguide devices with doped silicon dioxide having a silicon monoxide undercoat |
| JP2771363B2 (ja) * | 1991-09-26 | 1998-07-02 | キヤノン株式会社 | 機能性堆積膜の連続的製造装置 |
| US5168514A (en) | 1991-09-27 | 1992-12-01 | Board Of Regents, The University Of Texas System | Modular radiotherapy treatment chair and methods of treatment |
| CN2174265Y (zh) * | 1993-08-10 | 1994-08-17 | 俞以纯 | 一种改进的热融压敏胶带涂布装置 |
| AU694143B2 (en) | 1993-10-04 | 1998-07-16 | 3M Innovative Properties Company | Cross-linked acrylate coating material useful for forming capacitor dielectrics and oxygen barriers |
| US5440446A (en) | 1993-10-04 | 1995-08-08 | Catalina Coatings, Inc. | Acrylate coating material |
| US5607789A (en) | 1995-01-23 | 1997-03-04 | Duracell Inc. | Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same |
| US5686360A (en) | 1995-11-30 | 1997-11-11 | Motorola | Passivation of organic devices |
| US6268695B1 (en) | 1998-12-16 | 2001-07-31 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
| US6866901B2 (en) | 1999-10-25 | 2005-03-15 | Vitex Systems, Inc. | Method for edge sealing barrier films |
| US6413645B1 (en) | 2000-04-20 | 2002-07-02 | Battelle Memorial Institute | Ultrabarrier substrates |
| EP1273048B8 (en) | 2000-04-06 | 2013-10-02 | HyET Energy Systems B.V. | Method of manufacturing a photovoltaic foil |
| US6465953B1 (en) | 2000-06-12 | 2002-10-15 | General Electric Company | Plastic substrates with improved barrier properties for devices sensitive to water and/or oxygen, such as organic electroluminescent devices |
| US6867539B1 (en) * | 2000-07-12 | 2005-03-15 | 3M Innovative Properties Company | Encapsulated organic electronic devices and method for making same |
| US6652654B1 (en) * | 2000-09-27 | 2003-11-25 | Bechtel Bwxt Idaho, Llc | System configured for applying multiple modifying agents to a substrate |
| JP4747425B2 (ja) | 2001-03-13 | 2011-08-17 | 凸版印刷株式会社 | 透明ガスバリア性積層フィルム |
| AU2003292634A1 (en) * | 2002-12-26 | 2004-07-22 | Applied Films Gmbh And Co. Kg | Vacuum deposition apparatus and vapor-deposited film manufacturing method |
| US20040149959A1 (en) * | 2003-01-31 | 2004-08-05 | Mikhael Michael G. | Conductive flakes manufactured by combined sputtering and vapor deposition |
| US7648925B2 (en) | 2003-04-11 | 2010-01-19 | Vitex Systems, Inc. | Multilayer barrier stacks and methods of making multilayer barrier stacks |
| ATE519886T1 (de) * | 2003-04-25 | 2011-08-15 | Sigma Lab Arizona Inc | Durch vakuumablagerung funtionalisierte poröse materialien |
| KR100727470B1 (ko) | 2005-11-07 | 2007-06-13 | 세메스 주식회사 | 유기물 증착 장치 및 방법 |
| US20070256934A1 (en) | 2006-05-08 | 2007-11-08 | Perata Michael R | Apparatus and Method for Coating Substrates With Approximate Process Isolation |
| CN101501242B (zh) * | 2006-08-08 | 2011-06-15 | 株式会社爱发科 | 卷绕式真空成膜装置 |
| US7834541B2 (en) | 2006-10-05 | 2010-11-16 | Global Oled Technology Llc | OLED device having improved light output |
| TWI401465B (zh) * | 2007-10-12 | 2013-07-11 | Hon Hai Prec Ind Co Ltd | 鏡片鍍膜治具及鏡片鍍膜方法 |
| CN101878276B (zh) * | 2007-11-29 | 2013-08-07 | Lg化学株式会社 | 具有增强的耐磨性和指纹痕迹可除去性的涂料组合物和涂膜 |
| JP5255856B2 (ja) * | 2008-01-31 | 2013-08-07 | 富士フイルム株式会社 | 機能性フィルムの製造方法 |
| JP4968947B2 (ja) | 2008-02-29 | 2012-07-04 | 富士フイルム株式会社 | 光学フィルムの製造方法 |
| JP5081712B2 (ja) | 2008-05-02 | 2012-11-28 | 富士フイルム株式会社 | 成膜装置 |
| JP5901176B2 (ja) * | 2011-08-17 | 2016-04-06 | 株式会社ペガソス・エレクトラ | 分離装置及び分離システム |
-
2009
- 2009-09-07 EP EP09169668A patent/EP2292339A1/en not_active Withdrawn
-
2010
- 2010-09-06 WO PCT/NL2010/050560 patent/WO2011028119A1/en not_active Ceased
- 2010-09-06 CN CN201080047302.4A patent/CN102574156B/zh not_active Expired - Fee Related
- 2010-09-06 IN IN1946DEN2012 patent/IN2012DN01946A/en unknown
- 2010-09-06 EP EP10757311A patent/EP2475467A1/en not_active Withdrawn
- 2010-09-06 CA CA2773520A patent/CA2773520A1/en not_active Abandoned
- 2010-09-06 US US13/394,271 patent/US9539615B2/en not_active Expired - Fee Related
- 2010-09-06 RU RU2012113315/05A patent/RU2012113315A/ru not_active Application Discontinuation
- 2010-09-06 KR KR1020127009073A patent/KR101776790B1/ko not_active Expired - Fee Related
- 2010-09-06 JP JP2012527840A patent/JP5623531B2/ja not_active Expired - Fee Related
- 2010-09-07 TW TW099130123A patent/TWI555583B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2690923C2 (ru) * | 2015-06-17 | 2019-06-06 | Зе Боинг Компани | Устройство для нанесения светоотверждаемого материала и связанные с ним способы |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101776790B1 (ko) | 2017-09-19 |
| CN102574156B (zh) | 2014-10-01 |
| JP5623531B2 (ja) | 2014-11-12 |
| WO2011028119A1 (en) | 2011-03-10 |
| CA2773520A1 (en) | 2011-03-10 |
| IN2012DN01946A (https=) | 2015-08-21 |
| US9539615B2 (en) | 2017-01-10 |
| KR20120101344A (ko) | 2012-09-13 |
| CN102574156A (zh) | 2012-07-11 |
| EP2292339A1 (en) | 2011-03-09 |
| US20120276299A1 (en) | 2012-11-01 |
| TW201113098A (en) | 2011-04-16 |
| EP2475467A1 (en) | 2012-07-18 |
| TWI555583B (zh) | 2016-11-01 |
| JP2013503972A (ja) | 2013-02-04 |
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