PH31538A - Method and apparatus for automated docking of a test head to a device handler. - Google Patents
Method and apparatus for automated docking of a test head to a device handler.Info
- Publication number
- PH31538A PH31538A PH51896A PH51896A PH31538A PH 31538 A PH31538 A PH 31538A PH 51896 A PH51896 A PH 51896A PH 51896 A PH51896 A PH 51896A PH 31538 A PH31538 A PH 31538A
- Authority
- PH
- Philippines
- Prior art keywords
- test head
- device handler
- axis
- automated docking
- positioner
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37133—Linear, rotary variable differential transformer, lvdt, rvdt
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37404—Orientation of workpiece or tool, surface sensor
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/40—Robotics, robotics mapping to robotics vision
- G05B2219/40082—Docking, align object on end effector with target
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45089—Testing robot
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/49—Nc machine tool, till multiple
- G05B2219/49117—Alignment of surfaces to get them parallel
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/355,501 US5600258A (en) | 1993-09-15 | 1994-12-12 | Method and apparatus for automated docking of a test head to a device handler |
Publications (1)
Publication Number | Publication Date |
---|---|
PH31538A true PH31538A (en) | 1998-11-03 |
Family
ID=23397664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PH51896A PH31538A (en) | 1994-12-12 | 1995-12-12 | Method and apparatus for automated docking of a test head to a device handler. |
Country Status (10)
Country | Link |
---|---|
US (2) | US5600258A (fr) |
EP (1) | EP0716905B1 (fr) |
JP (1) | JP2878169B2 (fr) |
KR (1) | KR100225805B1 (fr) |
CN (1) | CN1107231C (fr) |
AT (1) | ATE177983T1 (fr) |
DE (1) | DE69508542T2 (fr) |
MY (1) | MY112312A (fr) |
PH (1) | PH31538A (fr) |
SG (1) | SG34322A1 (fr) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6057695A (en) * | 1993-09-15 | 2000-05-02 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US6166552A (en) * | 1996-06-10 | 2000-12-26 | Motorola Inc. | Method and apparatus for testing a semiconductor wafer |
US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
US6009536A (en) * | 1996-09-20 | 1999-12-28 | Micron Electronics, Inc. | Method for using fuse identification codes for masking bad bits on memory modules |
JP3494828B2 (ja) * | 1996-11-18 | 2004-02-09 | 株式会社アドバンテスト | 水平搬送テストハンドラ |
US6332183B1 (en) | 1998-03-05 | 2001-12-18 | Micron Technology, Inc. | Method for recovery of useful areas of partially defective synchronous memory components |
US6314527B1 (en) | 1998-03-05 | 2001-11-06 | Micron Technology, Inc. | Recovery of useful areas of partially defective synchronous memory components |
US6381708B1 (en) | 1998-04-28 | 2002-04-30 | Micron Technology, Inc. | Method for decoding addresses for a defective memory array |
US6381707B1 (en) | 1998-04-28 | 2002-04-30 | Micron Technology, Inc. | System for decoding addresses for a defective memory array |
US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
US6496876B1 (en) | 1998-12-21 | 2002-12-17 | Micron Technology, Inc. | System and method for storing a tag to identify a functional storage location in a memory device |
US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US6310486B1 (en) | 1999-10-01 | 2001-10-30 | Teradyne, Inc. | Integrated test cell |
MY144519A (en) * | 2000-03-01 | 2011-09-30 | Intest Corp | Vertical counter balanced test head manipulator |
US6578157B1 (en) | 2000-03-06 | 2003-06-10 | Micron Technology, Inc. | Method and apparatus for recovery of useful areas of partially defective direct rambus rimm components |
US7269765B1 (en) * | 2000-04-13 | 2007-09-11 | Micron Technology, Inc. | Method and apparatus for storing failing part locations in a module |
US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
JP2004509344A (ja) | 2000-09-20 | 2004-03-25 | インテスト アイピー コーポレイション | 重心調整可能側部支持体 |
EP1712923B1 (fr) | 2000-09-22 | 2013-05-15 | inTEST Corporation | Appareil et procédé d'équilibrage prévoyant un alignement souple sur une tête d'essai |
DE10143173A1 (de) | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
US6586925B2 (en) | 2001-04-09 | 2003-07-01 | St Assembly Test Services Ltd. | Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate |
US6970634B2 (en) * | 2001-05-04 | 2005-11-29 | Cascade Microtech, Inc. | Fiber optic wafer probe |
US7008802B2 (en) * | 2001-05-29 | 2006-03-07 | Asm America, Inc. | Method and apparatus to correct water drift |
US6766996B1 (en) | 2001-07-16 | 2004-07-27 | Reid-Ashman Manufacturing, Inc. | Manipulator |
CN1280635C (zh) * | 2001-07-16 | 2006-10-18 | 因泰斯特Ip公司 | 测试头对接系统及方法 |
WO2003052435A1 (fr) | 2001-08-21 | 2003-06-26 | Cascade Microtech, Inc. | Systeme de detection a membrane |
WO2003020467A1 (fr) * | 2001-08-31 | 2003-03-13 | Cascade Microtech, Inc. | Appareil de test optique |
US6897645B2 (en) * | 2001-12-29 | 2005-05-24 | Vincent Hing Chung So | Docking system and method for docking in automated testing systems |
KR100583949B1 (ko) * | 2002-01-07 | 2006-05-26 | 삼성전자주식회사 | 웨이퍼 프로빙 장치 및 테스트 헤드 도킹 제어방법 |
US6646431B1 (en) | 2002-01-22 | 2003-11-11 | Elite E/M, Inc. | Test head manipulator |
EP1495336A2 (fr) * | 2002-04-15 | 2005-01-12 | Intest IP Corporation | Systeme de positionnement d'une tete d'essai |
US6567725B1 (en) * | 2002-07-15 | 2003-05-20 | Speedfam-Ipec Corporation | Method and apparatus for teaching robot station location |
US7235964B2 (en) * | 2003-03-31 | 2007-06-26 | Intest Corporation | Test head positioning system and method |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US6836329B1 (en) * | 2003-07-09 | 2004-12-28 | International Business Machines Corporation | Real time IR optical sensor |
US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
DE202004021093U1 (de) | 2003-12-24 | 2006-09-28 | Cascade Microtech, Inc., Beaverton | Aktiver Halbleiterscheibenmessfühler |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
JP2008512680A (ja) | 2004-09-13 | 2008-04-24 | カスケード マイクロテック インコーポレイテッド | 両面プロービング構造体 |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
US7312604B2 (en) * | 2005-07-29 | 2007-12-25 | Nextest Systems Corporation | Portable manipulator for stackable semiconductor test system |
US7598725B2 (en) * | 2005-12-30 | 2009-10-06 | Teradyne, Inc. | Alignment receptacle of a sensor adapted to interact with a pin to generate position data along at least two transverse axes for docking a test head |
US7783384B2 (en) * | 2006-05-31 | 2010-08-24 | Kraft Brett W | Ambidextrous robotic master controller |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US8350584B2 (en) * | 2006-12-29 | 2013-01-08 | Intest Corporation | Test head positioning system and method |
TWI490513B (zh) * | 2006-12-29 | 2015-07-01 | Intest Corp | 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法 |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
US8041450B2 (en) * | 2007-10-04 | 2011-10-18 | Asm Japan K.K. | Position sensor system for substrate transfer robot |
KR101489963B1 (ko) * | 2007-12-13 | 2015-02-04 | 한국에이에스엠지니텍 주식회사 | 박막 증착 장치 및 이를 이용한 증착 방법 |
US8273178B2 (en) * | 2008-02-28 | 2012-09-25 | Asm Genitech Korea Ltd. | Thin film deposition apparatus and method of maintaining the same |
US7963736B2 (en) * | 2008-04-03 | 2011-06-21 | Asm Japan K.K. | Wafer processing apparatus with wafer alignment device |
WO2010007652A1 (fr) * | 2008-07-14 | 2010-01-21 | 株式会社アドバンテスト | Dispositif de déplacement de tête d'essai et dispositif testeur de composant électronique |
US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
US8410806B2 (en) | 2008-11-21 | 2013-04-02 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
US9193051B2 (en) * | 2010-04-02 | 2015-11-24 | Aktiebolaget Skf | Multiple stud tensioning machine and method for automatically controlling the elongation of a plurality of studs |
WO2013009817A1 (fr) | 2011-07-12 | 2013-01-17 | Intest Corporation | Procédé et appareil pour connecter une tête d'essai à un périphérique |
EP2859365A1 (fr) * | 2012-11-05 | 2015-04-15 | ISMECA Semiconductor Holding SA | Ensemble pour tester la performance d'un composant |
WO2017170393A1 (fr) * | 2016-03-28 | 2017-10-05 | 株式会社東京精密 | Sondeur et procédé de fonctionnement de sondeur |
CN106024981B (zh) * | 2016-07-08 | 2018-10-09 | 江苏博硕智能系统有限公司 | 一种物料的铺设方法及所用的铺设系统 |
CN107817059B (zh) * | 2017-12-13 | 2019-05-24 | 中国飞机强度研究所 | 一种轮胎温度测量装置 |
CN108132411B (zh) * | 2017-12-29 | 2023-10-27 | 重庆市灵龙自动化设备有限公司 | 用于扩展坞的高效检测仪 |
CN108226758A (zh) * | 2018-03-09 | 2018-06-29 | 京东方科技集团股份有限公司 | 一种检测设备及其控制方法 |
CN108872924B (zh) * | 2018-06-28 | 2024-03-19 | 广东电网有限责任公司 | 电能表检定装置及系统 |
CN109333525B (zh) * | 2018-11-22 | 2023-12-26 | 杭州极木科技有限公司 | 一种可旋转的机械臂 |
CN110196405A (zh) * | 2019-06-27 | 2019-09-03 | 南方电网科学研究院有限责任公司 | 用于电能表现场校验仪的辅助系统 |
CN114325325B (zh) * | 2021-12-29 | 2023-12-01 | 日月新半导体(昆山)有限公司 | 用于测试集成电路产品的装置 |
Family Cites Families (39)
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DE32119C (de) * | TH. NORDENFELT in London und C. G. WITTEN STRÖM in Motala, Schweden | Neuerung an Apparaten zum Verbrennen von Naphta und anderen flüchtigen Flüssigkeiten | ||
US2697529A (en) * | 1951-02-27 | 1954-12-21 | John P Hubbell | Apparatus for handling frangible articles by remote control |
NL253341A (fr) * | 1959-07-02 | |||
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US3665148A (en) * | 1971-04-07 | 1972-05-23 | Gen Motors Corp | Six-axis manipulator |
DE2226407C3 (de) * | 1972-05-31 | 1978-10-12 | Industrie-Werke Karlsruhe Augsburg Ag, 7500 Karlsruhe | Gerät zur maschinellen, durch veränderbare Programme steuerbaren Handreichung |
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-
1994
- 1994-12-12 US US08/355,501 patent/US5600258A/en not_active Expired - Lifetime
-
1995
- 1995-11-16 DE DE69508542T patent/DE69508542T2/de not_active Expired - Fee Related
- 1995-11-16 AT AT95308206T patent/ATE177983T1/de not_active IP Right Cessation
- 1995-11-16 EP EP95308206A patent/EP0716905B1/fr not_active Expired - Lifetime
- 1995-12-07 SG SG1995002056A patent/SG34322A1/en unknown
- 1995-12-08 MY MYPI95003795A patent/MY112312A/en unknown
- 1995-12-11 KR KR1019950048279A patent/KR100225805B1/ko not_active IP Right Cessation
- 1995-12-12 CN CN95120461A patent/CN1107231C/zh not_active Expired - Fee Related
- 1995-12-12 PH PH51896A patent/PH31538A/en unknown
- 1995-12-12 JP JP7323329A patent/JP2878169B2/ja not_active Expired - Fee Related
-
1996
- 1996-05-07 US US08/643,967 patent/US5900737A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR960024441A (ko) | 1996-07-20 |
EP0716905A3 (fr) | 1996-08-14 |
KR100225805B1 (ko) | 1999-10-15 |
JPH08220190A (ja) | 1996-08-30 |
US5900737A (en) | 1999-05-04 |
ATE177983T1 (de) | 1999-04-15 |
EP0716905A2 (fr) | 1996-06-19 |
MY112312A (en) | 2001-05-31 |
US5600258A (en) | 1997-02-04 |
CN1136665A (zh) | 1996-11-27 |
DE69508542D1 (de) | 1999-04-29 |
DE69508542T2 (de) | 1999-12-23 |
SG34322A1 (en) | 1996-12-06 |
EP0716905B1 (fr) | 1999-03-24 |
CN1107231C (zh) | 2003-04-30 |
JP2878169B2 (ja) | 1999-04-05 |
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