NO328185B1 - Nedholdningsanordning for utovelse av trykk pa stort sett flate gjenstander, transportsystemer for transportering av stort sett flate gjenstander omfattende en nedholdningsanordning, samt bruk av samme - Google Patents
Nedholdningsanordning for utovelse av trykk pa stort sett flate gjenstander, transportsystemer for transportering av stort sett flate gjenstander omfattende en nedholdningsanordning, samt bruk av samme Download PDFInfo
- Publication number
- NO328185B1 NO328185B1 NO20044939A NO20044939A NO328185B1 NO 328185 B1 NO328185 B1 NO 328185B1 NO 20044939 A NO20044939 A NO 20044939A NO 20044939 A NO20044939 A NO 20044939A NO 328185 B1 NO328185 B1 NO 328185B1
- Authority
- NO
- Norway
- Prior art keywords
- spindle
- holding device
- sleeve
- diameter
- transport
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 230000014759 maintenance of location Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000000452 restraining effect Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000002609 medium Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012993 chemical processing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000006163 transport media Substances 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
- B65G39/07—Other adaptations of sleeves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
- B65G21/2045—Mechanical means for guiding or retaining the load on the load-carrying surface
- B65G21/2063—Mechanical means for guiding or retaining the load on the load-carrying surface comprising elements not movable in the direction of load-transport
- B65G21/209—Mechanical means for guiding or retaining the load on the load-carrying surface comprising elements not movable in the direction of load-transport for augmenting or creating a pression force between the load and the load-carrying surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/02—Adaptations of individual rollers and supports therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors
- B65G39/10—Arrangements of rollers
- B65G39/12—Arrangements of rollers mounted on framework
- B65G39/18—Arrangements of rollers mounted on framework for guiding loads
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Warehouses Or Storage Devices (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Load-Engaging Elements For Cranes (AREA)
- Chain Conveyers (AREA)
- Machines For Manufacturing Corrugated Board In Mechanical Paper-Making Processes (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Handcart (AREA)
- Packaging Of Machine Parts And Wound Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP02008526A EP1354830B1 (fr) | 2002-04-15 | 2002-04-15 | Rouleau de convoyeur, dispositif de maintien et système de transport pour pièces plates |
| PCT/EP2003/003739 WO2003086914A1 (fr) | 2002-04-15 | 2003-04-10 | Element de retenue et systeme de transport pour des articles plats a transporter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO20044939L NO20044939L (no) | 2004-12-21 |
| NO328185B1 true NO328185B1 (no) | 2009-12-28 |
Family
ID=28459474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO20044939A NO328185B1 (no) | 2002-04-15 | 2004-11-12 | Nedholdningsanordning for utovelse av trykk pa stort sett flate gjenstander, transportsystemer for transportering av stort sett flate gjenstander omfattende en nedholdningsanordning, samt bruk av samme |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US6971505B2 (fr) |
| EP (1) | EP1354830B1 (fr) |
| JP (1) | JP4515771B2 (fr) |
| CN (1) | CN100364868C (fr) |
| AT (1) | ATE265383T1 (fr) |
| AU (1) | AU2003227599A1 (fr) |
| DE (2) | DE50200399D1 (fr) |
| ES (1) | ES2220851T3 (fr) |
| NO (1) | NO328185B1 (fr) |
| RU (1) | RU2309882C2 (fr) |
| TW (1) | TWI279380B (fr) |
| UA (1) | UA74306C2 (fr) |
| WO (2) | WO2003086913A1 (fr) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITBO20040132A1 (it) * | 2004-03-09 | 2004-06-09 | Dugomrulli Srl | Rullo convogliatore perfezionato e relativo procedimento di realizzazione |
| DE102005012244B4 (de) | 2005-03-15 | 2008-12-24 | Rena Sondermaschinen Gmbh | Verfahren zur Reinigung von Gegenständen mittels Ultraschall |
| DE102005055731B4 (de) * | 2005-11-23 | 2020-01-02 | Volkswagen Ag | Tragrollenanordnung und Transporteinrichtung |
| DE102006033354B4 (de) * | 2006-07-19 | 2012-01-12 | Höllmüller Maschinenbau GmbH | Vorrichtung zum Behandeln von flachen, zerbrechlichen Substraten |
| DE102006049488A1 (de) * | 2006-10-17 | 2008-04-30 | Höllmüller Maschinenbau GmbH | Vorrichtung zum Behandeln von flachen, zerbrechlichen Substraten |
| DE102006051040B4 (de) * | 2006-10-26 | 2008-08-07 | Schott Ag | Transportvorrichtung für Flachglasscheiben und deren Verwendung |
| DE102007024667A1 (de) * | 2007-05-25 | 2008-11-27 | Rena Sondermaschinen Gmbh | Verfahren und Vorrichtung zum Beschichten von flachen Substraten |
| DE102007054092B4 (de) | 2007-11-13 | 2009-08-06 | Rena Sondermaschinen Gmbh | Vorrichtung und Verfahren zum Transport von empfindlichem Gut |
| DE102007054089B4 (de) | 2007-11-13 | 2009-08-06 | Rena Sondermaschinen Gmbh | Vorrichtung und Verfahren zum spurgenauen Transport von Substraten |
| CN101254859B (zh) * | 2007-11-30 | 2012-12-12 | 无锡尚德太阳能电力有限公司 | 一种传送薄基板的滚轮组及使用其进行化学处理的方法 |
| CN101209777B (zh) * | 2007-12-25 | 2010-04-21 | 武汉钢铁(集团)公司 | 一种可调式自动纠偏皮带辊 |
| DE102008022282A1 (de) * | 2008-04-24 | 2009-10-29 | Gebr. Schmid Gmbh & Co. | Einrichtung und Verfahren zur Behandlung von Silizium-Wafern oder flachen Gegenständen |
| JP2010042924A (ja) * | 2008-08-18 | 2010-02-25 | Kayaba Ind Co Ltd | 搬送装置 |
| EP2172757B1 (fr) | 2008-10-02 | 2011-08-17 | RENA GmbH | Procédé et dispositif destinés à l'enregistrement de paramètres physiques |
| TWI363035B (en) * | 2008-11-13 | 2012-05-01 | Transmission device for thin and brittleness substrate | |
| DE102009028868B4 (de) | 2009-08-25 | 2013-07-04 | Hanwha Q.CELLS GmbH | Verfahren zur Behandlung von Wafern mit einer Flüssigkeit in einer Nassbank |
| CN102020101B (zh) * | 2010-11-13 | 2012-03-21 | 太原钢铁(集团)有限公司 | 板式运矿机上托辊装置 |
| TWI506122B (zh) | 2012-09-20 | 2015-11-01 | 財團法人工業技術研究院 | 一種半導體晶片之蝕刻組成物及蝕刻方法 |
| CN103811583A (zh) * | 2012-11-12 | 2014-05-21 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种硅片制绒方法及硅片制绒装置 |
| DE102012110916B4 (de) | 2012-11-13 | 2014-07-17 | Hochschule Offenburg | Verfahren und Vorrichtung zum Transport flacher Substrate |
| CN103496569A (zh) * | 2013-09-29 | 2014-01-08 | 大连机床(数控)股份有限公司 | 同步辊筒输送装置 |
| US9359145B2 (en) * | 2014-07-08 | 2016-06-07 | Dugomrulli S.R.L. | Roller driven device for roller conveyors |
| DE102014222295A1 (de) | 2014-10-31 | 2016-05-04 | Singulus Stangl Solar Gmbh | Federrolle, Transportvorrichtung, Vorrichtung zum Behandeln eines Guts und Transportverfahren |
| DE102016110081A1 (de) * | 2016-06-01 | 2017-12-07 | Von Ardenne Gmbh | Transportvorrichtung und Transportverfahren |
| IT201800007365A1 (it) * | 2018-07-20 | 2020-01-20 | Sistema di trasporto per il trasporto di prodotti | |
| CN109319548B (zh) * | 2018-10-22 | 2020-07-31 | 江苏东台实力工业材料有限公司 | 一种径向锁定式胶粘带收卷装置 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE328867C (de) * | 1920-11-04 | Haendel & Schabon | Tragrolle | |
| BE549925A (fr) * | 1955-08-26 | |||
| US2979829A (en) * | 1958-07-15 | 1961-04-18 | Nat Steel Corp | Roller and apparatus for transporting strip material |
| DE1256963B (de) * | 1963-03-16 | 1967-12-21 | Wilhelm Schelkmann | Elastische Gliederwalze |
| DE2023361A1 (de) * | 1970-05-13 | 1971-12-02 | Karl Stumpf KG, 4000 Dusseldorf | Rolle für Forderer |
| DE2413270C2 (de) * | 1974-03-20 | 1975-08-21 | Ludwig-Ofag-Indugas Industrieofenanlagen Gmbh, 4300 Essen | Gekülte Ofentransportrolle |
| DE2838974C2 (de) * | 1978-09-07 | 1986-02-20 | Carl Schenck Ag, 6100 Darmstadt | Rollenförderbahn mit nach oben offenem U-förmigen Trägern |
| JPS605133Y2 (ja) * | 1979-09-18 | 1985-02-16 | 大日本スクリ−ン製造株式会社 | ゴムロ−ル |
| DE3035877A1 (de) | 1980-09-23 | 1982-05-06 | Schenk Filterbau Gmbh, 7076 Waldstetten | Verfahren und vorrichtung zum entwaessern von fluessigkeit enthaltenden produkten |
| DE3140546C2 (de) * | 1981-10-13 | 1983-10-13 | Rubber- en Kunststoffabriek Enbi B.V., 6361 Nuth | Rolle, insbesondere Transportrolle |
| DE3711697A1 (de) * | 1986-08-05 | 1988-02-18 | Duerr Gmbh & Co | Rollenbahn fuer fahrzeugkarosserie-transportschlitten |
| JPH0818655B2 (ja) * | 1986-10-15 | 1996-02-28 | ソニー株式会社 | ロ−ラコンベヤ |
| US4753339A (en) * | 1987-05-20 | 1988-06-28 | The Buschman Company | Accumulating conveyor of the low pressure type |
| DE3805870A1 (de) * | 1988-02-25 | 1989-09-07 | Maertens H Gmbh Co Kg | Foerdervorrichtung fuer spreizanlagen und dergl. |
| DE3816317A1 (de) * | 1988-05-13 | 1989-11-23 | Protech Automation Gmbh | Duplex-foerderer |
| DE59100956D1 (de) * | 1991-04-05 | 1994-03-10 | Interroll Holding Ag San Anton | Förderrollenbahn mit Riemenantrieb. |
| DE9112469U1 (de) * | 1991-10-07 | 1991-12-12 | Kiessl, Rudolf, 3522 Bad Karlshafen | Hebevorrichtung mit einem an eine Oberfläche eines Werkstücks angepaßten Greifer |
| JP2697566B2 (ja) * | 1993-08-02 | 1998-01-14 | 日本電気株式会社 | 印刷機の用紙搬送装置 |
| CN2177696Y (zh) * | 1993-10-09 | 1994-09-21 | 谢嘉铭 | 防止货物堆积式滚筒 |
| JPH08244946A (ja) * | 1995-03-14 | 1996-09-24 | Hitachi Electron Eng Co Ltd | ローラコンベア装置 |
| JP2687931B2 (ja) * | 1995-05-31 | 1997-12-08 | 日本電気株式会社 | 基板搬送装置 |
| US5711806A (en) * | 1996-03-13 | 1998-01-27 | Harnden; Eric F. | Printed circuit board processing apparatus |
| DE19641317A1 (de) * | 1996-10-08 | 1998-04-16 | Bleichert Foerderanlagen Gmbh | Rollenbahn und Tragrolle dafür |
| JP3944940B2 (ja) * | 1997-03-25 | 2007-07-18 | 株式会社日立ハイテクノロジーズ | 基板の搬送装置 |
| DE19823430C2 (de) * | 1998-05-26 | 2003-04-30 | Bleichert Foerderanlagen Gmbh | Transportrolle |
| US6161681A (en) * | 1999-01-28 | 2000-12-19 | Rapistan Systems Advertising Corp. | Roller conveyer and roller shaft support bracket |
| DE19907601A1 (de) | 1999-02-22 | 2000-08-31 | Angew Solarenergie Ase Gmbh | Verfahren sowie Anordnung zum kontinuierlichen Behandeln von Gegenständen |
| JP3576894B2 (ja) * | 1999-10-28 | 2004-10-13 | 京セラミタ株式会社 | 画像形成装置におけるシート部材搬送装置 |
| DK1144282T3 (da) * | 1999-11-17 | 2004-08-16 | Dynamic Systems Engineering Bv | Pluklager til stykvarer |
-
2002
- 2002-04-15 AT AT02008526T patent/ATE265383T1/de active
- 2002-04-15 DE DE50200399T patent/DE50200399D1/de not_active Expired - Lifetime
- 2002-04-15 EP EP02008526A patent/EP1354830B1/fr not_active Expired - Lifetime
- 2002-04-15 ES ES02008526T patent/ES2220851T3/es not_active Expired - Lifetime
-
2003
- 2003-04-10 RU RU2004133352/11A patent/RU2309882C2/ru not_active IP Right Cessation
- 2003-04-10 DE DE10391511T patent/DE10391511B4/de not_active Expired - Fee Related
- 2003-04-10 WO PCT/EP2003/003738 patent/WO2003086913A1/fr not_active Application Discontinuation
- 2003-04-10 WO PCT/EP2003/003739 patent/WO2003086914A1/fr active IP Right Grant
- 2003-04-10 CN CNB038139308A patent/CN100364868C/zh not_active Expired - Lifetime
- 2003-04-10 JP JP2003583890A patent/JP4515771B2/ja not_active Expired - Fee Related
- 2003-04-10 AU AU2003227599A patent/AU2003227599A1/en not_active Abandoned
- 2003-04-15 US US10/413,138 patent/US6971505B2/en not_active Expired - Fee Related
- 2003-04-15 TW TW092108657A patent/TWI279380B/zh not_active IP Right Cessation
- 2003-10-04 UA UA20041109333A patent/UA74306C2/uk unknown
-
2004
- 2004-11-12 NO NO20044939A patent/NO328185B1/no not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE10391511B4 (de) | 2007-01-11 |
| JP4515771B2 (ja) | 2010-08-04 |
| CN1662436A (zh) | 2005-08-31 |
| RU2309882C2 (ru) | 2007-11-10 |
| WO2003086914A1 (fr) | 2003-10-23 |
| TW200402391A (en) | 2004-02-16 |
| ES2220851T3 (es) | 2004-12-16 |
| RU2004133352A (ru) | 2005-06-10 |
| TWI279380B (en) | 2007-04-21 |
| DE10391511D2 (de) | 2005-02-24 |
| UA74306C2 (uk) | 2005-11-15 |
| EP1354830A1 (fr) | 2003-10-22 |
| AU2003227599A1 (en) | 2003-10-27 |
| WO2003086913A1 (fr) | 2003-10-23 |
| CN100364868C (zh) | 2008-01-30 |
| DE50200399D1 (de) | 2004-06-03 |
| US6971505B2 (en) | 2005-12-06 |
| NO20044939L (no) | 2004-12-21 |
| AU2003227600A1 (en) | 2003-10-27 |
| EP1354830B1 (fr) | 2004-04-28 |
| ATE265383T1 (de) | 2004-05-15 |
| JP2005522389A (ja) | 2005-07-28 |
| US20030194309A1 (en) | 2003-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM1K | Lapsed by not paying the annual fees |