NL2010252C2 - Semiconductor product processing method, including a semiconductor product encapsulation method and a semiconductor product carrier-mounting method, and corresponding semiconductor product processing apparatus. - Google Patents
Semiconductor product processing method, including a semiconductor product encapsulation method and a semiconductor product carrier-mounting method, and corresponding semiconductor product processing apparatus. Download PDFInfo
- Publication number
- NL2010252C2 NL2010252C2 NL2010252A NL2010252A NL2010252C2 NL 2010252 C2 NL2010252 C2 NL 2010252C2 NL 2010252 A NL2010252 A NL 2010252A NL 2010252 A NL2010252 A NL 2010252A NL 2010252 C2 NL2010252 C2 NL 2010252C2
- Authority
- NL
- Netherlands
- Prior art keywords
- semiconductor product
- movable insert
- force
- tool part
- pressure
- Prior art date
Links
Classifications
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- H10P72/0441—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
- B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/76—Measuring, controlling or regulating
- B29C45/82—Hydraulic or pneumatic circuits
-
- H10P72/0428—
-
- H10P72/0446—
-
- H10P72/0604—
-
- H10P74/20—
-
- H10W70/40—
-
- H10W70/60—
-
- H10W72/0198—
-
- H10W74/014—
-
- H10W74/111—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/76—Measuring, controlling or regulating
- B29C45/82—Hydraulic or pneumatic circuits
- B29C2045/822—Pneumatic circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14336—Coating a portion of the article, e.g. the edge of the article
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/2628—Moulds with mould parts forming holes in or through the moulded article, e.g. for bearing cages
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Die Bonding (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2010252A NL2010252C2 (en) | 2013-02-06 | 2013-02-06 | Semiconductor product processing method, including a semiconductor product encapsulation method and a semiconductor product carrier-mounting method, and corresponding semiconductor product processing apparatus. |
| EP14703936.6A EP2954550B1 (en) | 2013-02-06 | 2014-02-05 | Semiconductor die encapsulation or carrier-mounting method, and corresponding semiconductor die encapsulation or carrier-mounting apparatus |
| CN201480015287.3A CN105247671B (zh) | 2013-02-06 | 2014-02-05 | 半导体晶粒封装或载体装载方法与相应的设备 |
| PCT/NL2014/050069 WO2014123413A1 (en) | 2013-02-06 | 2014-02-05 | Semiconductor die encapsulation or carrier-mounting method, and corresponding semiconductor die encapsulation or carrier-mounting apparatus |
| JP2015556898A JP6420259B2 (ja) | 2013-02-06 | 2014-02-05 | 半導体ダイ封入又は実装方法及び対応する半導体ダイ封入又は実装装置 |
| KR1020157024180A KR102205248B1 (ko) | 2013-02-06 | 2014-02-05 | 반도체 다이 봉지 또는 캐리어 실장 방법 및 장치 |
| US14/766,161 US9536760B2 (en) | 2013-02-06 | 2014-02-05 | Semiconductor die encapsulation or carrier-mounting method, and corresponding semiconductor die encapsulation or carrier-mounting apparatus |
| TW103103948A TWI642118B (zh) | 2013-02-06 | 2014-02-06 | 半導體晶粒封裝或載體裝載方法與相應的半導體晶粒封裝或載體裝載設備 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL2010252A NL2010252C2 (en) | 2013-02-06 | 2013-02-06 | Semiconductor product processing method, including a semiconductor product encapsulation method and a semiconductor product carrier-mounting method, and corresponding semiconductor product processing apparatus. |
| NL2010252 | 2013-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2010252C2 true NL2010252C2 (en) | 2014-08-07 |
Family
ID=47891868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2010252A NL2010252C2 (en) | 2013-02-06 | 2013-02-06 | Semiconductor product processing method, including a semiconductor product encapsulation method and a semiconductor product carrier-mounting method, and corresponding semiconductor product processing apparatus. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9536760B2 (enExample) |
| EP (1) | EP2954550B1 (enExample) |
| JP (1) | JP6420259B2 (enExample) |
| KR (1) | KR102205248B1 (enExample) |
| CN (1) | CN105247671B (enExample) |
| NL (1) | NL2010252C2 (enExample) |
| TW (1) | TWI642118B (enExample) |
| WO (1) | WO2014123413A1 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9947561B2 (en) * | 2016-03-07 | 2018-04-17 | Asm Technology Singapore Pte Ltd | Semiconductor encapsulation system comprising a vacuum pump and a reservoir pump |
| JP6079925B1 (ja) * | 2016-03-30 | 2017-02-15 | 第一精工株式会社 | 樹脂封止装置及び樹脂封止装置の異常検知方法 |
| IT201700000191A1 (it) | 2017-01-02 | 2018-07-02 | Amx Automatrix S R L | Pressa e metodo di sinterizzazione di componenti elettronici su un substrato |
| JP6304517B1 (ja) * | 2017-02-14 | 2018-04-04 | 第一精工株式会社 | 樹脂封止方法及び樹脂封止装置 |
| US11227779B2 (en) * | 2017-09-12 | 2022-01-18 | Asm Technology Singapore Pte Ltd | Apparatus and method for processing a semiconductor device |
| DE102017216545A1 (de) | 2017-09-19 | 2018-11-29 | Conti Temic Microelectronic Gmbh | Vorrichtung und Verfahren zur Herstellung einer Niedertemperatur-Drucksinterverbindung für eine elektronische Baugruppe |
| EP3791700A1 (en) * | 2018-05-08 | 2021-03-17 | W.L. Gore & Associates, Inc. | Flexible and durable printed circuits on stretchable and non-stretchable substrates |
| NL2021137B1 (en) * | 2018-06-15 | 2019-12-20 | Boschman Tech Bv | Sintering Process Product Carrier |
| IT201800006846A1 (it) * | 2018-07-02 | 2020-01-02 | Gruppo di pressatura per una pressa di sinterizzazione di componenti elettronici su un substrato | |
| IT201800007256A1 (it) * | 2018-07-17 | 2020-01-17 | Organo pressore, gruppo di pressatura e pressa di sinterizzazione di componenti elettronici su un substrato | |
| US11227807B2 (en) | 2018-11-16 | 2022-01-18 | Hewlett-Packard Development Company, L.P. | Two-step molding for a lead frame |
| JP6667879B1 (ja) * | 2018-12-19 | 2020-03-18 | アサヒ・エンジニアリング株式会社 | 電子部品の実装装置 |
| DE102018133456A1 (de) | 2018-12-21 | 2020-06-25 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats, Elektronikmodul und Werkzeug zum Verkapseln eines Trägersubstrats |
| DE102018133420A1 (de) | 2018-12-21 | 2020-06-25 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats, Elektronikmodul und Werkzeug zum Verkapseln eines Trägersubstrats |
| DE102018010352B4 (de) | 2018-12-21 | 2021-05-12 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats, Elektronikmodul und Werkzeug zum Verkapseln eines Trägersubstrats |
| DE102018133434B4 (de) | 2018-12-21 | 2021-03-25 | Rogers Germany Gmbh | Verfahren zum Verkapseln mindestens eines Trägersubstrats |
| JP2020119983A (ja) * | 2019-01-23 | 2020-08-06 | トヨタ自動車株式会社 | 半導体素子接合装置、及び半導体素子接合方法 |
| JP6762578B2 (ja) * | 2019-02-09 | 2020-09-30 | アサヒ・エンジニアリング株式会社 | 電子部品実装装置 |
| NL2024038B1 (en) * | 2019-10-17 | 2021-06-22 | Boschman Tech B V | Component Processing Apparatus, such as a Pressure Sintering Apparatus or a Component Encapsulation Apparatus |
| KR102196397B1 (ko) * | 2020-05-13 | 2020-12-30 | 제엠제코(주) | 메탈포스트, 이를 포함하는 반도체 패키지 및 반도체 패키지 제조방법 |
| DE102020114442A1 (de) | 2020-05-29 | 2021-12-02 | Danfoss Silicon Power Gmbh | Halbleiterbauelement |
| DE102020207343A1 (de) | 2020-06-15 | 2021-12-16 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung optischer und/oder optoelektronischer Systeme mit verbesserter Wärmeabfuhr und verbesserter thermischer und/oder mechanischer Stabilität, sowie mittels dieses Verfahrens erhaltene optische und/oder optoelektronische Systeme |
| US11676937B2 (en) * | 2021-05-04 | 2023-06-13 | Asmpt Singapore Pte. Ltd. | Flexible sinter tool for bonding semiconductor devices |
| US12072251B2 (en) * | 2022-03-01 | 2024-08-27 | Asmpt Singapore Pte. Ltd. | Force measurement device and method for bonding or encapsulation process and apparatus incorporating the device |
| CN116631917B (zh) * | 2023-07-19 | 2023-12-19 | 江苏快克芯装备科技有限公司 | 气压膜压接装置 |
| AT527921B1 (de) | 2024-04-25 | 2025-08-15 | Smt Maschinen Und Vertriebs Gmbh & Co Kg | Zylinderplatte einer Vorrichtung zum Verbinden eines Bauelements mit einem Substrat |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1641036A1 (en) * | 2003-07-02 | 2006-03-29 | Tokyo Electron Limited | Joining method and joining device |
| WO2007150012A2 (en) * | 2006-06-22 | 2007-12-27 | Suss Microtec, Inc. | Apparatus and method for semiconductor bonding |
| EP1939926A1 (en) * | 2005-10-12 | 2008-07-02 | Murata Manufacturing Co. Ltd. | Bonding apparatus |
| WO2009119096A1 (ja) * | 2008-03-27 | 2009-10-01 | 株式会社ニコン | 接合装置および接合方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL193526C (nl) * | 1991-02-26 | 2000-01-04 | Boschman Tech Bv | Inrichting voor het omhullen van elektronische onderdelen met een kunststof. |
| JP3026550B2 (ja) * | 1996-05-07 | 2000-03-27 | 富士通株式会社 | 半導体装置の製造方法 |
| SG64937A1 (en) * | 1996-06-21 | 2000-08-22 | Advanced Systems Automation | Wedge device for linear force amplification in a press |
| JPH11121479A (ja) * | 1997-10-17 | 1999-04-30 | Fujitsu Ltd | 半導体部品の実装方法および実装装置 |
| TW341171U (en) * | 1998-01-16 | 1998-09-21 | Li-Li Chen | A platform radial dissipation forming mold |
| CN100515720C (zh) * | 1999-12-16 | 2009-07-22 | 第一精工株式会社 | 树脂封装用模具装置 |
| JP2002110744A (ja) * | 2000-09-26 | 2002-04-12 | Matsushita Electric Ind Co Ltd | 半導体実装装置、および半導体実装方法 |
| EP1220309A1 (en) * | 2000-12-28 | 2002-07-03 | STMicroelectronics S.r.l. | Manufacturing method of an electronic device package |
| JP2003133706A (ja) * | 2001-10-22 | 2003-05-09 | Matsushita Electric Ind Co Ltd | 圧着装置および圧着方法 |
| JP4017480B2 (ja) * | 2002-09-24 | 2007-12-05 | Towa株式会社 | 樹脂封止金型 |
| JP2006156796A (ja) * | 2004-11-30 | 2006-06-15 | Towa Corp | 半導体チップの樹脂封止成形方法、及び、装置 |
| US7520052B2 (en) * | 2005-06-27 | 2009-04-21 | Texas Instruments Incorporated | Method of manufacturing a semiconductor device |
| JP2007317738A (ja) * | 2006-05-23 | 2007-12-06 | Matsushita Electric Ind Co Ltd | 部品圧着実装機の加重測定方法と装置、それらを用いた部品圧着実装機 |
| JP2008192725A (ja) * | 2007-02-02 | 2008-08-21 | Spansion Llc | 半導体装置及びその製造方法並びに半導体装置の製造装置 |
| JP5070896B2 (ja) * | 2007-03-19 | 2012-11-14 | 富士通セミコンダクター株式会社 | 電子部品の樹脂封止方法、樹脂封止用金型及び半導体装置の製造方法 |
| CN100576478C (zh) * | 2007-09-29 | 2009-12-30 | 南茂科技股份有限公司 | 晶粒重新配置的封装方法 |
| US8125061B2 (en) * | 2009-09-03 | 2012-02-28 | Advanced Semiconductor Engineering, Inc. | Semiconductor package and method of manufacturing the same |
| JP5906528B2 (ja) * | 2011-07-29 | 2016-04-20 | アピックヤマダ株式会社 | モールド金型及びこれを用いた樹脂モールド装置 |
| JP5777660B2 (ja) * | 2013-05-17 | 2015-09-09 | アサヒ・エンジニアリング株式会社 | 樹脂成形装置及び半導体装置の製造方法 |
-
2013
- 2013-02-06 NL NL2010252A patent/NL2010252C2/en not_active IP Right Cessation
-
2014
- 2014-02-05 US US14/766,161 patent/US9536760B2/en active Active
- 2014-02-05 JP JP2015556898A patent/JP6420259B2/ja active Active
- 2014-02-05 CN CN201480015287.3A patent/CN105247671B/zh active Active
- 2014-02-05 EP EP14703936.6A patent/EP2954550B1/en active Active
- 2014-02-05 KR KR1020157024180A patent/KR102205248B1/ko active Active
- 2014-02-05 WO PCT/NL2014/050069 patent/WO2014123413A1/en not_active Ceased
- 2014-02-06 TW TW103103948A patent/TWI642118B/zh active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1641036A1 (en) * | 2003-07-02 | 2006-03-29 | Tokyo Electron Limited | Joining method and joining device |
| EP1939926A1 (en) * | 2005-10-12 | 2008-07-02 | Murata Manufacturing Co. Ltd. | Bonding apparatus |
| WO2007150012A2 (en) * | 2006-06-22 | 2007-12-27 | Suss Microtec, Inc. | Apparatus and method for semiconductor bonding |
| WO2009119096A1 (ja) * | 2008-03-27 | 2009-10-01 | 株式会社ニコン | 接合装置および接合方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20150371880A1 (en) | 2015-12-24 |
| KR102205248B1 (ko) | 2021-01-21 |
| WO2014123413A1 (en) | 2014-08-14 |
| US9536760B2 (en) | 2017-01-03 |
| EP2954550A1 (en) | 2015-12-16 |
| EP2954550B1 (en) | 2017-06-28 |
| JP6420259B2 (ja) | 2018-11-07 |
| CN105247671B (zh) | 2017-12-22 |
| TWI642118B (zh) | 2018-11-21 |
| TW201438117A (zh) | 2014-10-01 |
| CN105247671A (zh) | 2016-01-13 |
| JP2016507164A (ja) | 2016-03-07 |
| KR20150136476A (ko) | 2015-12-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM | Lapsed because of non-payment of the annual fee |
Effective date: 20220301 |