NL193764B - Halfgeleiderinrichting en werkwijze voor het maken daarvan. - Google Patents

Halfgeleiderinrichting en werkwijze voor het maken daarvan.

Info

Publication number
NL193764B
NL193764B NL9202131A NL9202131A NL193764B NL 193764 B NL193764 B NL 193764B NL 9202131 A NL9202131 A NL 9202131A NL 9202131 A NL9202131 A NL 9202131A NL 193764 B NL193764 B NL 193764B
Authority
NL
Netherlands
Prior art keywords
making
semiconductor device
semiconductor
Prior art date
Application number
NL9202131A
Other languages
English (en)
Other versions
NL193764C (nl
NL9202131A (nl
Inventor
Masaaki Ikegami
Tetsuo Higuchi
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of NL9202131A publication Critical patent/NL9202131A/nl
Publication of NL193764B publication Critical patent/NL193764B/nl
Application granted granted Critical
Publication of NL193764C publication Critical patent/NL193764C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/20—Resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including only semiconductor components of a single kind
    • H01L27/0802—Resistors only
NL9202131A 1992-05-20 1992-12-09 Halfgeleiderinrichting en werkwijze voor het maken daarvan. NL193764C (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12760992 1992-05-20
JP4127609A JP2748070B2 (ja) 1992-05-20 1992-05-20 半導体装置およびその製造方法

Publications (3)

Publication Number Publication Date
NL9202131A NL9202131A (nl) 1993-12-16
NL193764B true NL193764B (nl) 2000-05-01
NL193764C NL193764C (nl) 2000-09-04

Family

ID=14964323

Family Applications (1)

Application Number Title Priority Date Filing Date
NL9202131A NL193764C (nl) 1992-05-20 1992-12-09 Halfgeleiderinrichting en werkwijze voor het maken daarvan.

Country Status (4)

Country Link
US (2) US5327224A (nl)
JP (1) JP2748070B2 (nl)
DE (1) DE4240565C2 (nl)
NL (1) NL193764C (nl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5872049A (en) * 1996-06-19 1999-02-16 Advanced Micro Devices, Inc. Nitrogenated gate structure for improved transistor performance and method for making same
JPH10163429A (ja) * 1996-11-29 1998-06-19 Mitsubishi Electric Corp 半導体装置
US5937303A (en) * 1997-10-29 1999-08-10 Advanced Micro Devices High dielectric constant gate dielectric integrated with nitrogenated gate electrode
JP3214445B2 (ja) * 1998-05-21 2001-10-02 日本電気株式会社 半導体装置の製造方法
US6156603A (en) * 1998-12-01 2000-12-05 United Mircroelectronics Corp. Manufacturing method for reducing the thickness of a dielectric layer
US6069063A (en) * 1999-04-01 2000-05-30 Taiwan Semiconductor Manufacturing Company Method to form polysilicon resistors shielded from hydrogen intrusion
US6483144B2 (en) * 1999-11-30 2002-11-19 Agere Systems Guardian Corp. Semiconductor device having self-aligned contact and landing pad structure and method of forming same
US6949143B1 (en) * 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
US7115532B2 (en) * 2003-09-05 2006-10-03 Micron Technolgoy, Inc. Methods of forming patterned photoresist layers over semiconductor substrates
JP4784595B2 (ja) * 2007-12-21 2011-10-05 株式会社デンソー バイポーラ型の半導体装置の製造方法
US9646886B1 (en) * 2015-12-30 2017-05-09 International Business Machines Corporation Tailored silicon layers for transistor multi-gate control

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4010290A (en) * 1971-09-22 1977-03-01 Motorola, Inc. Method of fabricating an ensulated gate field-effect device
US4455737A (en) * 1978-05-26 1984-06-26 Rockwell International Corporation Process for and structure of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines
US4212684A (en) * 1978-11-20 1980-07-15 Ncr Corporation CISFET Processing including simultaneous doping of silicon components and FET channels
JPS607389B2 (ja) * 1978-12-26 1985-02-23 超エル・エス・アイ技術研究組合 半導体装置の製造方法
US4466172A (en) * 1979-01-08 1984-08-21 American Microsystems, Inc. Method for fabricating MOS device with self-aligned contacts
US4370798A (en) * 1979-06-15 1983-02-01 Texas Instruments Incorporated Interlevel insulator for integrated circuit with implanted resistor element in second-level polycrystalline silicon
JPS5624148U (nl) * 1979-08-01 1981-03-04
US4653026A (en) * 1981-08-12 1987-03-24 Hitachi, Ltd. Nonvolatile memory device or a single crystal silicon film
US4466177A (en) * 1983-06-30 1984-08-21 International Business Machines Corporation Storage capacitor optimization for one device FET dynamic RAM cell
DE3569172D1 (en) * 1984-08-23 1989-05-03 Toshiba Kk Semiconductor memory device having a polycrystalline silicon layer
JPS63155755A (ja) * 1986-12-19 1988-06-28 Sony Corp 半導体装置の製造方法
JPS63248157A (ja) * 1987-04-02 1988-10-14 Nec Corp 半導体装置の製造方法
US4897368A (en) * 1987-05-21 1990-01-30 Matsushita Electric Industrial Co., Ltd. Method of fabricating a polycidegate employing nitrogen/oxygen implantation
JP2548957B2 (ja) * 1987-11-05 1996-10-30 富士通株式会社 半導体記憶装置の製造方法
US5214497A (en) * 1988-05-25 1993-05-25 Hitachi, Ltd. Polycrystalline silicon resistor for use in a semiconductor integrated circuit having a memory device
JP2685498B2 (ja) * 1988-05-25 1997-12-03 株式会社日立製作所 半導体装置
US5013692A (en) * 1988-12-08 1991-05-07 Sharp Kabushiki Kaisha Process for preparing a silicon nitride insulating film for semiconductor memory device
JPH0316165A (ja) * 1989-03-09 1991-01-24 Fujitsu Ltd 半導体装置
US5047826A (en) * 1989-06-30 1991-09-10 Texas Instruments Incorporated Gigaohm load resistor for BICMOS process
US5135882A (en) * 1989-07-31 1992-08-04 Micron Technology, Inc. Technique for forming high-value inter-nodal coupling resistance for rad-hard applications in a double-poly, salicide process using local interconnect
JPH0370170A (ja) * 1989-08-10 1991-03-26 Oki Electric Ind Co Ltd 半導体素子の形成方法
JP3082923B2 (ja) * 1989-12-26 2000-09-04 ソニー株式会社 半導体装置の製法
US5250456A (en) * 1991-09-13 1993-10-05 Sgs-Thomson Microelectronics, Inc. Method of forming an integrated circuit capacitor dielectric and a capacitor formed thereby
US5182627A (en) * 1991-09-30 1993-01-26 Sgs-Thomson Microelectronics, Inc. Interconnect and resistor for integrated circuits
US5455069A (en) * 1992-06-01 1995-10-03 Motorola, Inc. Method of improving layer uniformity in a CVD reactor

Also Published As

Publication number Publication date
DE4240565A1 (de) 1993-11-25
NL193764C (nl) 2000-09-04
NL9202131A (nl) 1993-12-16
JPH05326849A (ja) 1993-12-10
US5327224A (en) 1994-07-05
US5470764A (en) 1995-11-28
JP2748070B2 (ja) 1998-05-06
DE4240565C2 (de) 1995-12-14

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Legal Events

Date Code Title Description
A1C A request for examination has been filed
V1 Lapsed because of non-payment of the annual fee

Effective date: 20080701