DE69203215D1 - Spektroskopisches Gerät und Verfahren. - Google Patents

Spektroskopisches Gerät und Verfahren.

Info

Publication number
DE69203215D1
DE69203215D1 DE69203215T DE69203215T DE69203215D1 DE 69203215 D1 DE69203215 D1 DE 69203215D1 DE 69203215 T DE69203215 T DE 69203215T DE 69203215 T DE69203215 T DE 69203215T DE 69203215 D1 DE69203215 D1 DE 69203215D1
Authority
DE
Germany
Prior art keywords
spectroscopic device
spectroscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69203215T
Other languages
English (en)
Other versions
DE69203215T2 (de
Inventor
David Neville Batchelder
Brian John Edward Smith
Chunwei Cheng
Raymond John Chaney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27517082&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69203215(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB919124409A external-priority patent/GB9124409D0/en
Priority claimed from GB919124408A external-priority patent/GB9124408D0/en
Priority claimed from GB929202588A external-priority patent/GB9202588D0/en
Priority claimed from GB929213121A external-priority patent/GB9213121D0/en
Priority claimed from GB929213120A external-priority patent/GB9213120D0/en
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of DE69203215D1 publication Critical patent/DE69203215D1/de
Publication of DE69203215T2 publication Critical patent/DE69203215T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/123—Indexed discrete filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE1992603215 1991-11-16 1992-11-13 Spektroskopisches Gerät und Verfahren. Expired - Fee Related DE69203215T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB919124409A GB9124409D0 (en) 1991-11-16 1991-11-16 Raman analysis apparatus
GB919124408A GB9124408D0 (en) 1991-11-16 1991-11-16 Raman analysis apparatus
GB929202588A GB9202588D0 (en) 1992-02-07 1992-02-07 Raman analysis apparatus
GB929213121A GB9213121D0 (en) 1992-06-20 1992-06-20 Spectroscopic apparatus and method
GB929213120A GB9213120D0 (en) 1992-06-20 1992-06-20 Spectroscopic apparatus and methods

Publications (2)

Publication Number Publication Date
DE69203215D1 true DE69203215D1 (de) 1995-08-03
DE69203215T2 DE69203215T2 (de) 1995-11-09

Family

ID=27517082

Family Applications (3)

Application Number Title Priority Date Filing Date
DE1992622191 Revoked DE69222191T2 (de) 1991-11-16 1992-11-13 Probenbeleuchtung für spektroskopisches Gerät und Verfahren
DE1992627201 Expired - Fee Related DE69227201T2 (de) 1991-11-16 1992-11-13 Spektroskopisches Verfahren
DE1992603215 Expired - Fee Related DE69203215T2 (de) 1991-11-16 1992-11-13 Spektroskopisches Gerät und Verfahren.

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE1992622191 Revoked DE69222191T2 (de) 1991-11-16 1992-11-13 Probenbeleuchtung für spektroskopisches Gerät und Verfahren
DE1992627201 Expired - Fee Related DE69227201T2 (de) 1991-11-16 1992-11-13 Spektroskopisches Verfahren

Country Status (3)

Country Link
EP (3) EP0740133B1 (de)
JP (2) JP2834954B2 (de)
DE (3) DE69222191T2 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO924443L (no) * 1992-11-18 1994-05-19 Norsk Hydro As Utstyr for spektroskopisk måling av gass
GB9410395D0 (en) * 1994-05-24 1994-07-13 Renishaw Plc Spectroscopic apparatus
US5818047A (en) * 1994-08-20 1998-10-06 Renishaw Plc Detector for explosive substances
WO1996010737A1 (en) * 1994-09-30 1996-04-11 Renishaw Plc Methods and apparatus for indentation, scratch or tribological testing
FR2726365B1 (fr) * 1994-10-28 1996-12-13 Dilor Dispositif d'analyse spectrale a filtrages complementaires combines, en particulier de spectrometrie raman
GB9426242D0 (en) 1994-12-24 1995-02-22 Renishaw Plc Laser diode for raman spectroscopy
GB9511490D0 (en) * 1995-06-07 1995-08-02 Renishaw Plc Raman microscope
US5828450A (en) * 1995-07-19 1998-10-27 Kyoto Dai-Ichi Kagaku Co., Ltd. Spectral measuring apparatus and automatic analyzer
JP2768320B2 (ja) * 1995-09-04 1998-06-25 日本電気株式会社 波長可変光フィルタ
US6885445B2 (en) 1998-05-09 2005-04-26 Renishaw Plc Electron microscope and spectroscopy system
GB2338568B (en) * 1998-06-19 2000-12-20 Optiscan Pty Ltd Two photon endoscope or microscope method and apparatus
GB9819006D0 (en) 1998-09-02 1998-10-21 Renishaw Plc Optical filter
US6690467B1 (en) 2000-05-05 2004-02-10 Pe Corporation Optical system and method for optically analyzing light from a sample
DE10038528A1 (de) * 2000-08-08 2002-02-21 Zeiss Carl Jena Gmbh Verfahren und Anordnung zur Erhöhung der spektralen und räumlichen Detektorauflösung
GB0106342D0 (en) 2001-03-15 2001-05-02 Renishaw Plc Spectroscopy apparatus and method
JP2004523770A (ja) 2001-04-06 2004-08-05 レニショウ　パブリック　リミテッド　カンパニー 光スリット
GB0206341D0 (en) * 2002-03-18 2002-05-01 Renishaw Plc Calibration of a spectrometer
DE10217545A1 (de) * 2002-04-17 2003-11-06 Zeiss Carl Jena Gmbh Mikroskop mit Positionserkennung von Wechslern optischer Elemente
DE50201771D1 (de) * 2002-05-15 2005-01-20 Acterna Germany Gmbh Verfahren und Vorrichtung zum Messen eines optischen Spektrums
JP2005121479A (ja) * 2003-10-16 2005-05-12 Tokyo Instruments Inc 共焦点顕微分光装置
JP4647288B2 (ja) * 2004-04-26 2011-03-09 株式会社リコー 回転駆動装置及び電子線描画装置
GB0510497D0 (en) * 2004-08-04 2005-06-29 Horiba Ltd Substrate examining device
DE102004048846A1 (de) * 2004-10-04 2006-04-20 Carl Zeiss Jena Gmbh Mikroskop mit einer Vorrichtung zur Erkennung optischer Bauteile
US7177022B2 (en) 2005-02-18 2007-02-13 Axsun Technologies, Inc. Method and system removing fluorescence and other slowly varying baseline in Raman spectra
JP4887989B2 (ja) * 2005-12-02 2012-02-29 ナノフォトン株式会社 光学顕微鏡及びスペクトル測定方法
US7379180B2 (en) * 2006-01-26 2008-05-27 Schlumberger Technology Corporation Method and apparatus for downhole spectral analysis of fluids
GB0620141D0 (en) * 2006-10-11 2006-11-22 Renishaw Plc Spectroscopy system
GB0701477D0 (en) * 2007-01-25 2007-03-07 Renishaw Plc Spectroscopic apparatus and methods
GB0803798D0 (en) * 2008-02-29 2008-04-09 Renishaw Plc Spectroscopic apparatus and methods
EP2257789B1 (de) * 2008-02-26 2020-10-28 Battelle Memorial Institute Biologisches und chemisches mikroskopisches targeting
JP2009222473A (ja) * 2008-03-14 2009-10-01 Panasonic Corp 画像取込装置
JP5454942B2 (ja) * 2010-11-22 2014-03-26 横河電機株式会社 分光装置とそれを用いた顕微鏡
WO2012070314A1 (ja) 2010-11-22 2012-05-31 横河電機株式会社 顕微鏡用分光分析装置、光軸ズレ補正装置、分光装置とそれを用いた顕微鏡
WO2012098297A1 (en) * 2011-01-19 2012-07-26 Teknologian Tutkimuskeskus Vtt High speed chemical imaging based on fabry-perot interferometer
GB201113066D0 (en) 2011-07-29 2011-09-14 Univ Bristol Optical device
JP6216491B2 (ja) * 2012-02-20 2017-10-18 セイコーエプソン株式会社 分光測定装置
EP2857811B1 (de) 2013-10-02 2015-09-23 Sick Ag Spektrometer zur Gasanalyse
WO2015059353A1 (en) * 2013-10-21 2015-04-30 Teknologian Tutkimuskeskus Vtt Device and method for optical measurement of a target
JP6390090B2 (ja) 2013-11-19 2018-09-19 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
GB201415238D0 (en) 2014-08-28 2014-10-15 Renishaw Plc Spectroscopy apparatus
CN105928470B (zh) * 2016-07-14 2018-12-07 哈尔滨理工大学 基于全息方法的自由曲面表面形貌在机检测方法及装置
WO2020174239A1 (en) 2019-02-27 2020-09-03 Renishaw Plc Spectroscopic apparatus

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515314B1 (de) * 1971-03-18 1976-02-19
US3733131A (en) * 1971-08-05 1973-05-15 Perkin Elmer Ltd Optical beam switching devices utilizing a pair of plane mirrors
US3853404A (en) * 1972-08-14 1974-12-10 Allied Chem Simultaneous interferometric transmission of periodic spectral components
FR2356931A1 (fr) * 1976-07-02 1978-01-27 Anvar Microsonde microscope optique moleculaire a effet raman excitee par laser
DE2935812A1 (de) * 1979-09-05 1981-03-12 Fa. Carl Zeiss, 7920 Heidenheim Verfahren zur werkstoffpruefung
JPS6053834A (ja) * 1983-09-02 1985-03-27 Hitachi Ltd レ−ザラマンマイクロプロ−ブ
GB8800583D0 (en) * 1988-01-12 1988-03-23 British Petroleum Co Plc Remote sensing system
US4965152A (en) * 1988-01-15 1990-10-23 E. I. Du Pont De Nemours And Company Holographic notch filters
GB8830039D0 (en) * 1988-12-22 1989-02-15 Renishaw Plc Raman microscope
US5153670A (en) * 1990-01-12 1992-10-06 Physical Optics Corporation Holographic lippmann-bragg filter in a spectroscopic system
GB9002335D0 (en) * 1990-02-02 1990-04-04 De La Rue Co Plc Detection apparatus
US5011284A (en) * 1990-03-22 1991-04-30 Kaiser Optical Systems Detection system for Raman scattering employing holographic diffraction
DE4017317C2 (de) * 1990-05-30 2000-02-17 Bodenseewerk Perkin Elmer Co Anodnung zur Verbesserung der Auflösung eines Spektrometers
DE69203830T3 (de) 1991-06-08 2002-08-14 Renishaw Plc Konfokale spektroskopie.

Also Published As

Publication number Publication date
JP2834954B2 (ja) 1998-12-14
EP0740133A1 (de) 1996-10-30
DE69203215T2 (de) 1995-11-09
EP0543578A1 (de) 1993-05-26
EP0740133B1 (de) 1997-09-10
EP0638788B1 (de) 1998-09-30
DE69222191D1 (de) 1997-10-16
JP3385164B2 (ja) 2003-03-10
DE69227201D1 (de) 1998-11-05
JPH05223637A (ja) 1993-08-31
DE69227201T2 (de) 1999-02-18
EP0543578B1 (de) 1995-06-28
DE69222191T2 (de) 1998-01-22
JPH09119865A (ja) 1997-05-06
EP0638788A1 (de) 1995-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8310 Action for declaration of annulment
8313 Request for invalidation rejected/withdrawn
8339 Ceased/non-payment of the annual fee