DE69211086D1 - Messverfahren und Messgerät - Google Patents

Messverfahren und Messgerät

Info

Publication number
DE69211086D1
DE69211086D1 DE69211086T DE69211086T DE69211086D1 DE 69211086 D1 DE69211086 D1 DE 69211086D1 DE 69211086 T DE69211086 T DE 69211086T DE 69211086 T DE69211086 T DE 69211086T DE 69211086 D1 DE69211086 D1 DE 69211086D1
Authority
DE
Germany
Prior art keywords
measuring
measuring device
measuring method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69211086T
Other languages
English (en)
Other versions
DE69211086T2 (de
Inventor
Seiji Takeuchi
Tetsuharu Nishimura
Minoru Yoshii
Hiroyasu Nose
Koh Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04101319A external-priority patent/JP3109900B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69211086D1 publication Critical patent/DE69211086D1/de
Application granted granted Critical
Publication of DE69211086T2 publication Critical patent/DE69211086T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
DE69211086T 1991-10-03 1992-10-02 Messverfahren und Messgerät Expired - Lifetime DE69211086T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP28358391 1991-10-03
JP1651992 1992-01-31
JP04101319A JP3109900B2 (ja) 1992-04-21 1992-04-21 測定装置

Publications (2)

Publication Number Publication Date
DE69211086D1 true DE69211086D1 (de) 1996-07-04
DE69211086T2 DE69211086T2 (de) 1996-11-14

Family

ID=27281444

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69211086T Expired - Lifetime DE69211086T2 (de) 1991-10-03 1992-10-02 Messverfahren und Messgerät

Country Status (3)

Country Link
US (1) US5404220A (de)
EP (1) EP0536655B1 (de)
DE (1) DE69211086T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3109900B2 (ja) * 1992-04-21 2000-11-20 キヤノン株式会社 測定装置
JPH074993A (ja) * 1993-03-23 1995-01-10 Ricoh Co Ltd エンコーダ装置
JPH085314A (ja) * 1994-06-20 1996-01-12 Canon Inc 変位測定方法及び変位測定装置
JP4381671B2 (ja) * 2002-10-23 2009-12-09 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
KR100578140B1 (ko) * 2004-10-07 2006-05-10 삼성전자주식회사 변위 측정을 위한 간섭계 시스템 및 이를 이용한 노광 장치
DE102005025385B4 (de) * 2005-04-20 2007-03-22 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsanlage zur Beschichtung flächiger Substrate mit einer Messeinrichtung zur Transmissions- oder/und Reflexionsmessung
JP4791811B2 (ja) * 2005-12-06 2011-10-12 株式会社ミツトヨ 光電式ロータリエンコーダ
EP2553401B1 (de) * 2010-03-30 2015-09-02 Zygo Corporation Interferometrische encoder-systeme
US10378933B2 (en) * 2013-10-18 2019-08-13 Nikon Corporation Encoder head designs
KR102022785B1 (ko) 2014-12-24 2019-09-18 가부시키가이샤 니콘 계측 장치 및 계측 방법, 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US34010A (en) * 1861-12-24 Straw-carrier and grain-separator for threshing-machines
JPS58191907A (ja) * 1982-05-04 1983-11-09 Canon Inc 移動量測定方法
DE3316144A1 (de) * 1982-05-04 1983-11-10 Canon K.K., Tokyo Verfahren und vorrichtung zum messen des ausmasses einer bewegung
FR2598797B1 (fr) * 1986-05-07 1990-05-11 Nippon Telegraph & Telephone Procede de mesure et/ou d'ajustement du deplacement d'un objet et appareil pour la mise en oeuvre de ce procede
JPH01167607U (de) * 1988-05-16 1989-11-24
US5070250A (en) * 1989-02-28 1991-12-03 Nikon Corporation Position detection apparatus with adjustable beam and interference fringe positions
JPH02297005A (ja) * 1989-05-12 1990-12-07 Matsushita Electric Ind Co Ltd 位置合わせ装置
JP2683117B2 (ja) * 1989-10-31 1997-11-26 キヤノン株式会社 エンコーダー
US5182610A (en) * 1990-04-19 1993-01-26 Sortec Corporation Position detecting method and device therefor as well as aligning device
JP2913755B2 (ja) * 1990-04-25 1999-06-28 株式会社ニコン 位置合わせ方法及び装置
US5231467A (en) * 1990-09-20 1993-07-27 Matsushita Electric Industrial Co., Ltd. Reflective alignment position signal producing apparatus
JP2619566B2 (ja) * 1990-11-20 1997-06-11 オ−クマ株式会社 光学式位置検出器
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position

Also Published As

Publication number Publication date
EP0536655A1 (de) 1993-04-14
US5404220A (en) 1995-04-04
DE69211086T2 (de) 1996-11-14
EP0536655B1 (de) 1996-05-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition