NL193563C - Boogverdampingsinrichting. - Google Patents

Boogverdampingsinrichting. Download PDF

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Publication number
NL193563C
NL193563C NL8502229A NL8502229A NL193563C NL 193563 C NL193563 C NL 193563C NL 8502229 A NL8502229 A NL 8502229A NL 8502229 A NL8502229 A NL 8502229A NL 193563 C NL193563 C NL 193563C
Authority
NL
Netherlands
Prior art keywords
electrode
arc
coil
cathode
magnetic field
Prior art date
Application number
NL8502229A
Other languages
English (en)
Dutch (nl)
Other versions
NL8502229A (nl
NL193563B (nl
Original Assignee
Hauzer Ind Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hauzer Ind Bv filed Critical Hauzer Ind Bv
Publication of NL8502229A publication Critical patent/NL8502229A/nl
Publication of NL193563B publication Critical patent/NL193563B/xx
Application granted granted Critical
Publication of NL193563C publication Critical patent/NL193563C/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Vapour Deposition (AREA)
NL8502229A 1984-08-13 1985-08-12 Boogverdampingsinrichting. NL193563C (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64035384 1984-08-13
US06/640,353 US4724058A (en) 1984-08-13 1984-08-13 Method and apparatus for arc evaporating large area targets

Publications (3)

Publication Number Publication Date
NL8502229A NL8502229A (nl) 1986-03-03
NL193563B NL193563B (nl) 1999-10-01
NL193563C true NL193563C (nl) 2000-02-02

Family

ID=24567902

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8502229A NL193563C (nl) 1984-08-13 1985-08-12 Boogverdampingsinrichting.

Country Status (8)

Country Link
US (1) US4724058A (enrdf_load_stackoverflow)
JP (1) JPH072988B2 (enrdf_load_stackoverflow)
BE (1) BE903045A (enrdf_load_stackoverflow)
CA (1) CA1278773C (enrdf_load_stackoverflow)
DE (1) DE3528677A1 (enrdf_load_stackoverflow)
FR (1) FR2568896B1 (enrdf_load_stackoverflow)
GB (1) GB2163458B (enrdf_load_stackoverflow)
NL (1) NL193563C (enrdf_load_stackoverflow)

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US5433788A (en) * 1987-01-19 1995-07-18 Hitachi, Ltd. Apparatus for plasma treatment using electron cyclotron resonance
EP0283095A1 (en) * 1987-03-16 1988-09-21 Hauzer Holding B.V. Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
DE4017111C2 (de) * 1990-05-28 1998-01-29 Hauzer Holding Lichtbogen-Magnetron-Vorrichtung
ATE80184T1 (de) * 1987-06-29 1992-09-15 Hauzer Holding Verfahren und vorrichtung zur beschichtung von aushoehlungen von gegenstaenden.
US5298136A (en) * 1987-08-18 1994-03-29 Regents Of The University Of Minnesota Steered arc coating with thick targets
JPH0668152B2 (ja) * 1988-01-27 1994-08-31 株式会社半導体エネルギー研究所 薄膜形成装置
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US5234561A (en) * 1988-08-25 1993-08-10 Hauzer Industries Bv Physical vapor deposition dual coating process
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DE4223592C2 (de) * 1992-06-24 2001-05-17 Leybold Ag Lichtbogen-Verdampfungsvorrichtung
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US5587207A (en) 1994-11-14 1996-12-24 Gorokhovsky; Vladimir I. Arc assisted CVD coating and sintering method
JP3287163B2 (ja) * 1995-01-23 2002-05-27 日新電機株式会社 アーク式蒸発源
CH689558A5 (de) 1995-07-11 1999-06-15 Erich Bergmann Bedampfungsanlage und Verdampfereinheit.
US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method
DE19702928C2 (de) * 1997-01-28 2001-06-07 Eitec Ges Fuer Metallisches Ha Lichtbogenverdampfer
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
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DE19853943B4 (de) * 1997-11-26 2006-04-20 Vapor Technologies, Inc. (Delaware Corporation), Longmont Katode zur Zerstäubung oder Bogenaufdampfung sowie Vorrichtung zur Beschichtung oder Ionenimplantation mit einer solchen Katode
JPH11200017A (ja) * 1998-01-20 1999-07-27 Nikon Corp 光学薄膜成膜装置およびこの光学薄膜成膜装置により成膜された光学素子
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US6645354B1 (en) 2000-04-07 2003-11-11 Vladimir I. Gorokhovsky Rectangular cathodic arc source and method of steering an arc spot
CA2268659C (en) * 1999-04-12 2008-12-30 Vladimir I. Gorokhovsky Rectangular cathodic arc source and method of steering an arc spot
US6929727B2 (en) * 1999-04-12 2005-08-16 G & H Technologies, Llc Rectangular cathodic arc source and method of steering an arc spot
RU2164549C2 (ru) * 1999-05-27 2001-03-27 Всероссийский научно-исследовательский институт авиационных материалов Способ испарения и конденсации токопроводящих материалов
CA2305938C (en) * 2000-04-10 2007-07-03 Vladimir I. Gorokhovsky Filtered cathodic arc deposition method and apparatus
US7300559B2 (en) * 2000-04-10 2007-11-27 G & H Technologies Llc Filtered cathodic arc deposition method and apparatus
JP4085593B2 (ja) 2001-03-29 2008-05-14 日新電機株式会社 真空アーク蒸着装置
DE10127013A1 (de) * 2001-06-05 2002-12-12 Gabriel Herbert M Lichtbogen-Verdampfungsvorrichtung
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
US7866342B2 (en) * 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
US7866343B2 (en) * 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
JP4356365B2 (ja) * 2003-06-09 2009-11-04 日新電機株式会社 真空アーク蒸着装置
US20050176251A1 (en) * 2004-02-05 2005-08-11 Duong Chau H. Polishing pad with releasable slick particles
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
ATE459734T1 (de) 2005-12-16 2010-03-15 Fundacion Tekniker Kathodenverdampfungsmaschine
BRPI0711644B1 (pt) * 2006-05-16 2019-03-19 Oerlikon Trading Ag, Trübbach Fonte de arco voltaico com um alvo e processo para a produção de peças revestidas por arco voltaico
US8443519B2 (en) * 2006-09-15 2013-05-21 The Gillette Company Blade supports for use in shaving systems
US20090242397A1 (en) * 2008-03-31 2009-10-01 General Electric Company Systems for controlling cathodic arc discharge
US20110315544A1 (en) 2008-12-26 2011-12-29 Fundacion Tekniker Arc evaporator and method for operating the evaporator
JP2012112040A (ja) * 2010-11-05 2012-06-14 Shin-Etsu Chemical Co Ltd スパッタ装置用磁気回路
US10304665B2 (en) 2011-09-07 2019-05-28 Nano-Product Engineering, LLC Reactors for plasma-assisted processes and associated methods
JP5689051B2 (ja) * 2011-11-25 2015-03-25 株式会社神戸製鋼所 イオンボンバードメント装置
US10665437B2 (en) 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
CN111315915A (zh) * 2017-10-03 2020-06-19 欧瑞康表面处理解决方案股份公司普费菲孔 具有受限磁场的电弧源
DE102020124269A1 (de) * 2020-09-17 2022-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung und Verfahren zum Abscheiden harter Kohlenstoffschichten

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Also Published As

Publication number Publication date
DE3528677C2 (enrdf_load_stackoverflow) 1990-05-17
US4724058A (en) 1988-02-09
GB2163458B (en) 1988-06-08
DE3528677A1 (de) 1986-02-20
JPS6187865A (ja) 1986-05-06
FR2568896B1 (fr) 1993-08-13
JPH072988B2 (ja) 1995-01-18
GB8520079D0 (en) 1985-09-18
FR2568896A1 (fr) 1986-02-14
GB2163458A (en) 1986-02-26
CA1278773C (en) 1991-01-08
NL8502229A (nl) 1986-03-03
BE903045A (nl) 1985-12-02
NL193563B (nl) 1999-10-01

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Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
CNR Transfer of rights (patent application after its laying open for public inspection)

Free format text: HAUZER INDUSTRIES B.V.

V1 Lapsed because of non-payment of the annual fee

Effective date: 20020301