MX2010006214A - Unidad de recubrimiento al vacio de pvd. - Google Patents
Unidad de recubrimiento al vacio de pvd.Info
- Publication number
- MX2010006214A MX2010006214A MX2010006214A MX2010006214A MX2010006214A MX 2010006214 A MX2010006214 A MX 2010006214A MX 2010006214 A MX2010006214 A MX 2010006214A MX 2010006214 A MX2010006214 A MX 2010006214A MX 2010006214 A MX2010006214 A MX 2010006214A
- Authority
- MX
- Mexico
- Prior art keywords
- substrate carrier
- pvd coating
- sheet
- cutting edge
- coating unit
- Prior art date
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 7
- 239000011248 coating agent Substances 0.000 abstract 4
- 238000000576 coating method Methods 0.000 abstract 4
- 238000005240 physical vapour deposition Methods 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Battery Electrode And Active Subsutance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH18902007 | 2007-12-06 | ||
| PCT/CH2008/000485 WO2009070903A1 (de) | 2007-12-06 | 2008-11-17 | Pvd - vakuumbeschichtungsanlage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| MX2010006214A true MX2010006214A (es) | 2010-06-23 |
Family
ID=39186114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MX2010006214A MX2010006214A (es) | 2007-12-06 | 2008-11-17 | Unidad de recubrimiento al vacio de pvd. |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US8968830B2 (https=) |
| EP (1) | EP2220265A1 (https=) |
| JP (1) | JP5449185B2 (https=) |
| KR (1) | KR20100094558A (https=) |
| CN (1) | CN101889102B (https=) |
| BR (1) | BRPI0820014A2 (https=) |
| CA (1) | CA2707581A1 (https=) |
| MX (1) | MX2010006214A (https=) |
| RU (1) | RU2486280C2 (https=) |
| SG (2) | SG186624A1 (https=) |
| TW (1) | TWI498442B (https=) |
| WO (1) | WO2009070903A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2454393B1 (de) * | 2009-07-14 | 2016-09-28 | MSM Krystall GBR | Verfahren zur herstellung von wendeschneidplatten |
| CZ304905B6 (cs) * | 2009-11-23 | 2015-01-14 | Shm, S.R.O. | Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu |
| DE102010038077B4 (de) | 2010-10-08 | 2018-05-30 | Msm Krystall Gbr (Vertretungsberechtigte Gesellschafter: Dr. Rainer Schneider, 12165 Berlin; Arno Mecklenburg, 10999 Berlin) | Wendeschneidplatte und Verfahren zu deren Herstellung |
| ES2532898T3 (es) * | 2011-06-30 | 2015-04-01 | Lamina Technologies Sa | Deposición por arco catódico |
| CN104004993B (zh) * | 2013-02-25 | 2018-01-12 | 北京中科三环高技术股份有限公司 | 一种表面处理装置 |
| DE102015004856A1 (de) * | 2015-04-15 | 2016-10-20 | Oerlikon Metaplas Gmbh | Bipolares Arc-Beschichtungsverfahren |
| CN108368605B (zh) | 2015-12-17 | 2020-06-19 | 株式会社爱发科 | 真空处理装置 |
| US11322338B2 (en) * | 2017-08-31 | 2022-05-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Sputter target magnet |
| DE102018004086A1 (de) * | 2018-05-18 | 2019-11-21 | Singulus Technologies Ag | Durchlaufanlage und Verfahren zum Beschichten von Substraten |
| KR102833369B1 (ko) * | 2018-12-17 | 2025-07-10 | 어플라이드 머티어리얼스, 인코포레이티드 | 캡슐화를 위한 pvd 방향성 증착 |
| US20200255941A1 (en) * | 2019-02-11 | 2020-08-13 | Kennametal Inc. | Supports for chemical vapor deposition coating applications |
| CN112204731B (zh) * | 2019-05-07 | 2024-07-05 | 莱特美美国股份有限公司 | 接合半导体器件和散热安装座的银铟瞬态液相方法及有银铟瞬态液相接合接头的半导体结构 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1264025A (en) | 1987-05-29 | 1989-12-27 | James A.E. Bell | Apparatus and process for coloring objects by plasma coating |
| DE4209384C1 (https=) | 1992-03-23 | 1993-04-22 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| RU2058427C1 (ru) * | 1993-06-01 | 1996-04-20 | Александр Иванович Дерюгин | Вакуумная установка для нанесения покрытий |
| RU2099439C1 (ru) * | 1995-05-06 | 1997-12-20 | Самарская государственная архитектурно-строительная академия | Устройство для нанесения покрытий (варианты) |
| DE29615190U1 (de) | 1996-03-11 | 1996-11-28 | Balzers Verschleissschutz GmbH, 55411 Bingen | Anlage zur Beschichtung von Werkstücken |
| CN1169477A (zh) * | 1996-05-10 | 1998-01-07 | 萨蒂斯真空工业销售股份公司 | 在光学基片上蒸镀镀膜的方法 |
| US5803971A (en) * | 1997-01-13 | 1998-09-08 | United Technologies Corporation | Modular coating fixture |
| JP4345869B2 (ja) | 1997-05-16 | 2009-10-14 | Ｈｏｙａ株式会社 | スパッタ成膜用の膜厚補正機構 |
| CN1130575C (zh) | 1997-05-16 | 2003-12-10 | 保谷株式会社 | 具有抗反射膜的塑料光学器件以及用来使抗反射膜的厚度均一的机构 |
| SE517046C2 (sv) | 1997-11-26 | 2002-04-09 | Sandvik Ab | Plasmaaktiverad CVD-metod för beläggning av skärverktyg med finkornig aluminiumoxid |
| JP2000141108A (ja) | 1999-01-01 | 2000-05-23 | Hitachi Tool Engineering Ltd | 被覆スロ―アウェイチップの製造方法 |
| JP2001049428A (ja) * | 1999-08-05 | 2001-02-20 | Nippon Sheet Glass Co Ltd | 基体に被膜を被覆する方法およびその方法に用いるスパッタリング装置 |
| DE50115410D1 (de) | 2000-09-05 | 2010-05-12 | Oerlikon Trading Ag | Vakuumanlage mit koppelbarem Werkstückträger |
| US20020160620A1 (en) * | 2001-02-26 | 2002-10-31 | Rudolf Wagner | Method for producing coated workpieces, uses and installation for the method |
| DE202004011179U1 (de) * | 2003-07-21 | 2004-12-02 | Unaxis Balzers Ag | Trog zum Stapeln, Aufnehmen und Transportieren von kleinen Teilen, insbesondere Werkzeugen |
| EP1741505B8 (en) * | 2004-04-30 | 2013-07-10 | Sumitomo Electric Hardmetal Corp. | Tool of surface-coated cubic boron nitride sintered compact and process for producing the same |
| PL1863947T3 (pl) | 2005-03-24 | 2012-06-29 | Oerlikon Trading Ag | Warstwa z twardego materiału |
-
2008
- 2008-11-13 US US12/270,415 patent/US8968830B2/en not_active Expired - Fee Related
- 2008-11-17 SG SG2012089439A patent/SG186624A1/en unknown
- 2008-11-17 WO PCT/CH2008/000485 patent/WO2009070903A1/de not_active Ceased
- 2008-11-17 EP EP08856536A patent/EP2220265A1/de not_active Withdrawn
- 2008-11-17 SG SG10201604607PA patent/SG10201604607PA/en unknown
- 2008-11-17 RU RU2010127857/02A patent/RU2486280C2/ru not_active IP Right Cessation
- 2008-11-17 BR BRPI0820014-9A patent/BRPI0820014A2/pt not_active IP Right Cessation
- 2008-11-17 KR KR1020107014904A patent/KR20100094558A/ko not_active Ceased
- 2008-11-17 MX MX2010006214A patent/MX2010006214A/es unknown
- 2008-11-17 CN CN200880119186.5A patent/CN101889102B/zh not_active Expired - Fee Related
- 2008-11-17 JP JP2010536303A patent/JP5449185B2/ja not_active Expired - Fee Related
- 2008-11-17 CA CA2707581A patent/CA2707581A1/en not_active Abandoned
- 2008-12-04 TW TW097147045A patent/TWI498442B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011505262A (ja) | 2011-02-24 |
| EP2220265A1 (de) | 2010-08-25 |
| RU2010127857A (ru) | 2012-01-20 |
| BRPI0820014A2 (pt) | 2015-05-19 |
| SG10201604607PA (en) | 2016-07-28 |
| WO2009070903A1 (de) | 2009-06-11 |
| TWI498442B (zh) | 2015-09-01 |
| US20090148599A1 (en) | 2009-06-11 |
| KR20100094558A (ko) | 2010-08-26 |
| CA2707581A1 (en) | 2009-06-11 |
| SG186624A1 (en) | 2013-01-30 |
| CN101889102A (zh) | 2010-11-17 |
| US8968830B2 (en) | 2015-03-03 |
| JP5449185B2 (ja) | 2014-03-19 |
| RU2486280C2 (ru) | 2013-06-27 |
| CN101889102B (zh) | 2013-04-10 |
| TW200936795A (en) | 2009-09-01 |
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