KR970065773A - 구리 또는 구리합금의 마이크로에칭용 조성물 - Google Patents

구리 또는 구리합금의 마이크로에칭용 조성물 Download PDF

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Publication number
KR970065773A
KR970065773A KR1019970006755A KR19970006755A KR970065773A KR 970065773 A KR970065773 A KR 970065773A KR 1019970006755 A KR1019970006755 A KR 1019970006755A KR 19970006755 A KR19970006755 A KR 19970006755A KR 970065773 A KR970065773 A KR 970065773A
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KR
South Korea
Prior art keywords
acid
copper
composition
unsaturated carboxylic
microetching
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KR1019970006755A
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English (en)
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KR100470812B1 (ko
Inventor
홍영구
도시코 나카자와
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마에다 고사쿠
멧쿠 가부시키가이샤
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Publication of KR970065773A publication Critical patent/KR970065773A/ko
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Publication of KR100470812B1 publication Critical patent/KR100470812B1/ko

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/18Acidic compositions for etching copper or alloys thereof
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/383Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by microetching
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/12Using specific substances
    • H05K2203/125Inorganic compounds, e.g. silver salt
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061Etching masks
    • H05K3/064Photoresists
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

본 발명은 (a) 질산 또는 황산, 또는 양자, (b) 질산 제1철 또는 황산 제1철 또는 양자, (c) 불포화 카르복실산, 불포화 카르복실산의 염 및 불포화 카르복실산의 무수물로 이루어진 그룹으로부터 선택된 1종 이상의 성분 및 (d) 물을 포함하는, 구리 또는 구리합금의 마이크로에칭용 조성물에 관한 것이다. 상기 조성물은 프리프레그 또는 레지스트와 같은 수지에 대한 접착력이 우수하고, 납땜성이 우수한 구리 또는 구리합금 표면을 제조할 수 있다. 상기 조성물은 고도로 집적된 미세 라인 패턴을 갖는 프린트-배선 기판을 제작하는데 적합하다.

Description

구리 또는 구리합금의 마이크로에칭용 조성물
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (7)

  1. (a) 질산 또는 황산, 또는 양자, (b) 질산 제1철 또는 황산 제1철 또는 양자, (c) 불포화 카르복실산, 불포화 카르복실산의 염 및 불포화 카르복실산의 무수물로 이루어진 군에서 선택된 1종 이상의 성분 및 (d) 물을 포함하는, 구리 또는 구리합금의 마이크로에칭용 조성물.
  2. 제1항에 있어서, 황산 또는 질산, 또는 양자의 함량이 0.5~30중량%인 것을 특징으로 하는 구리 또는 구리합금의 마이크로에칭용 조성물.
  3. 제1항에 있어서, 질산 제1철 또는 황산 제1철, 또는 양자의 함량이 0.5~30중량%인 것을 특징으로 하는 구리 또는 구리합금의 마이크로에칭용 조성물.
  4. 제1항에 있어서, 불포화 카르복실산 아크릴산, 메타크릴산, 크로톤산, 이소크로톤산, 말레인산, 푸말산, 시트라콘산, 이타콘산, 프로피올산, 테트롤산 및 아세틸렌 디카르복실산으로 이루어진 군에서 선택된 것을 특징으로 하는 구리 또는 구리합금의 마이크로에칭용 조성물.
  5. 제1항에 있어서, 염이 나트륨염 또는 칼륨염인 것을 특징으로 하는 마이크로에칭용 조성물.
  6. 제1항에 있어서, 불포화 카르복실산 무수물이 무수말레인산, 무수이타콘산 또는 무수시트라콘산인 것을 특징으로 하는 구리 또는 구리합금의 마이크로에칭용 조성물.
  7. 제1항에 있어서, 불포화 카르복실산, 그 염 또는 그 무수물의 함량이 0.1~20중량%인 것을 특징으로 하는 구리 또는 구리합금의 마이크로에칭용 조성물.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970006755A 1996-03-05 1997-02-28 구리또는구리합금의마이크로에칭용조성물 KR100470812B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04758596A JP3458036B2 (ja) 1996-03-05 1996-03-05 銅および銅合金のマイクロエッチング剤
JP47585/1996 1996-03-05

Publications (2)

Publication Number Publication Date
KR970065773A true KR970065773A (ko) 1997-10-13
KR100470812B1 KR100470812B1 (ko) 2005-04-28

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ID=12779339

Family Applications (1)

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KR1019970006755A KR100470812B1 (ko) 1996-03-05 1997-02-28 구리또는구리합금의마이크로에칭용조성물

Country Status (6)

Country Link
US (1) US5885476A (ko)
EP (1) EP0794269B1 (ko)
JP (1) JP3458036B2 (ko)
KR (1) KR100470812B1 (ko)
DE (1) DE69713185T2 (ko)
TW (1) TW419532B (ko)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6046110A (en) * 1995-06-08 2000-04-04 Kabushiki Kaisha Toshiba Copper-based metal polishing solution and method for manufacturing a semiconductor device
JPH1126919A (ja) * 1997-06-30 1999-01-29 Fuji Photo Film Co Ltd プリント配線板
US6141870A (en) 1997-08-04 2000-11-07 Peter K. Trzyna Method for making electrical device
US6331490B1 (en) * 1998-03-13 2001-12-18 Semitool, Inc. Process for etching thin-film layers of a workpiece used to form microelectric circuits or components
US6632292B1 (en) * 1998-03-13 2003-10-14 Semitool, Inc. Selective treatment of microelectronic workpiece surfaces
DE19850530A1 (de) * 1998-11-03 2000-05-25 Eilenburger Elektrolyse & Umwelttechnik Gmbh Kreislaufverfahren zum Beizen von Kupfer und Kupferlegierungen
US6627553B1 (en) * 1998-11-27 2003-09-30 Showa Denko K.K. Composition for removing side wall and method of removing side wall
US6830627B1 (en) * 1999-03-23 2004-12-14 International Business Machines Corporation Copper cleaning compositions, processes and products derived therefrom
US6147002A (en) * 1999-05-26 2000-11-14 Ashland Inc. Process for removing contaminant from a surface and composition useful therefor
JP2001181868A (ja) * 1999-12-20 2001-07-03 Asahi Denka Kogyo Kk 銅及び銅合金用のマイクロエッチング剤
JP2001181867A (ja) * 1999-12-20 2001-07-03 Asahi Denka Kogyo Kk マイクロエッチング剤
US6627546B2 (en) * 2001-06-29 2003-09-30 Ashland Inc. Process for removing contaminant from a surface and composition useful therefor
US6746547B2 (en) 2002-03-05 2004-06-08 Rd Chemical Company Methods and compositions for oxide production on copper
KR20030080546A (ko) * 2002-04-09 2003-10-17 삼성전기주식회사 다층 인쇄회로기판의 제조방법
KR100853216B1 (ko) * 2002-06-25 2008-08-20 삼성전자주식회사 배선용 식각액, 이를 이용한 배선의 제조 방법, 그 배선을포함하는 박막 트랜지스터 어레이 기판 및 그의 제조 방법
DE10326767B4 (de) 2003-06-13 2006-02-02 Atotech Deutschland Gmbh Verfahren zur Regenerierung von eisenhaltigen Ätzlösungen zur Verwendung beim Ätzen oder Beizen von Kupfer oder Kupferlegierungen sowie eine Vorrichtung zur Durchführung desselben
US7232478B2 (en) 2003-07-14 2007-06-19 Enthone Inc. Adhesion promotion in printed circuit boards
US20050067378A1 (en) * 2003-09-30 2005-03-31 Harry Fuerhaupter Method for micro-roughening treatment of copper and mixed-metal circuitry
KR101958606B1 (ko) 2010-07-06 2019-03-14 아토테크 도이칠란드 게엠베하 인쇄회로기판의 제조 방법
KR101730983B1 (ko) 2010-07-06 2017-04-27 나믹스 코포레이션 인쇄회로기판에서 사용하기 위한 유기 기판에의 접착을 향상시키는 구리 표면의 처리 방법
JP5576525B1 (ja) * 2013-03-29 2014-08-20 メルテックス株式会社 銅エッチング液
CN110809805B (zh) * 2017-07-10 2021-10-26 株式会社协成 使用铜银合金的导电性部件、触头引脚以及装置
CN110158071B (zh) * 2019-06-26 2021-11-23 匡云叶 一种铜用表面处理液及表面处理方法
WO2020261995A1 (ja) * 2019-06-28 2020-12-30 株式会社Adeka 組成物及びエッチング方法
KR102258702B1 (ko) * 2020-09-07 2021-06-01 주식회사 근우 전기 전도율 향상을 위한 표면 구조를 가지는 버스바
KR102258703B1 (ko) * 2020-09-07 2021-06-01 주식회사 근우 전기 전도율 향상을 위한 표면구조를 가지는 버스바 제조방법
KR102332286B1 (ko) * 2021-05-17 2021-12-01 주식회사 근우 발열성이 개선된 동 버스바의 제조방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520746A (en) * 1965-12-21 1970-07-14 Printing Dev Inc Metal etch compositions
US3736197A (en) * 1972-03-29 1973-05-29 Mona Industries Inc Powderless etching bath compositions and additives
JPS5926958B2 (ja) * 1974-07-03 1984-07-02 (有) 大野技術研究所 霧滴の帯電装置
JPS5222192A (en) * 1975-08-13 1977-02-19 Mitsubishi Gas Chem Co Inc Chemical polishing liquid
US4383857A (en) * 1980-05-28 1983-05-17 The United States Of America As Represented By The United States Department Of Energy Attack polish for nickel-base alloys and stainless steels
JPS6379983A (ja) * 1986-09-24 1988-04-09 Sumitomo Special Metals Co Ltd 鉄系金属の化学溶解処理液
GB8829253D0 (en) * 1988-12-15 1989-01-25 Imasa Ltd Method of removing deposits of tin lead or tin/lead alloys from copper substrates and compositions for use therein
JPH04173987A (ja) * 1990-11-02 1992-06-22 Kawasaki Steel Corp 銅接合体用エッチング液
DE4118764A1 (de) * 1991-06-07 1992-12-10 Chema Technologien Gmbh Verfahren zum aetzen von kupfer
JP2781954B2 (ja) * 1994-03-04 1998-07-30 メック株式会社 銅および銅合金の表面処理剤

Also Published As

Publication number Publication date
DE69713185T2 (de) 2002-11-28
JPH09241870A (ja) 1997-09-16
EP0794269A1 (en) 1997-09-10
JP3458036B2 (ja) 2003-10-20
US5885476A (en) 1999-03-23
EP0794269B1 (en) 2002-06-12
KR100470812B1 (ko) 2005-04-28
TW419532B (en) 2001-01-21
DE69713185D1 (de) 2002-07-18

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