KR970061806A - 알칼리금속 확산 차단 층 - Google Patents

알칼리금속 확산 차단 층 Download PDF

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KR970061806A
KR970061806A KR1019970003174A KR19970003174A KR970061806A KR 970061806 A KR970061806 A KR 970061806A KR 1019970003174 A KR1019970003174 A KR 1019970003174A KR 19970003174 A KR19970003174 A KR 19970003174A KR 970061806 A KR970061806 A KR 970061806A
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제임스 제이 핀리
에프 하워드 길러리
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버그스트롬 리타
피피지 인더스트리즈, 인코포레이티드
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Abstract

본 발명은 180A 미만의 두께에서 알칼리금속 이온 차단 층으로서 효과적인 산화티탄, 산화지르코늄 및 산화아연/산화주석의 무정형 금속 산화물 차단 층에 관한 것이다. 무정형 금속 산화물 차단 층은 층의 밀도가 결정밀도의 90% 이상인 경우 가장 효과적이다. 차단 층은 나트륨 이온 같은 알칼리금속 이온이 유리 기재로부터 매질, 예컨대 광호변성 셀의 전해질, 유리 표면과 접촉하는 액정 디스플레이 장치의 액체 물질내로 이동하지 못하도록 한다. 매질, 특히 전기전도성 금속 산화물 피막의 특성은 유리로부터 이동하는 나트륨 이온의 존재에 의해 열화되기 쉽다. 차단 층의 목적하는 밀도를 얻는 한가지 기법은 음극의 앞쪽과 뒷쪽에 차폐막을 제공하여 스퍼터링된 물질의 침착을 피복되는 표면에 통상 수직인 경로를 따라 이동하는 스퍼터링된 물질로 제한하는 것이다.

Description

알칼리금속 확산 차단 층
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (21)

  1. 표면에 알칼리금속 이온을 갖는 유리 기재; 상기 기재의 표면 위에 떨어져 위치하며, 소정 농도의 알칼리 금속 이온으로 인해 기능이 열화됨을 특징으로 하는 매질; 및 두께가 180A 미만이고 밀도가 그의 결정밀도의 90% 이상인 금속 산화물의 스퍼터링된 무정형 층을 상기 표면과 상기 매질 사이에 포함하여 상기 유리 기재와 상기 매질 사이에 알칼리금속 이온 차단 층을 제공하는 것을 특징으로 하는 제품.
  2. 제1항에 있어서, 상기 층이 30 내지 120A의 두께를 갖는 산화지르코늄 층인 제품.
  3. 제2항에 있어서, 무정형 산화지르코늄의 밀도가 5.0g/㎤ 이상인 제품.
  4. 제3항에 있어서, 산화지르코늄 차단 층의 두께가 30 내지 60A인 제품.
  5. 제1항에 있어서, 상기 층이 약 45 내지 180A의 두께를 갖는 산화티탄 층인 제품.
  6. 제5항에 있어서, 산화티탄 층의 밀도가 3.8g/㎤인 제품.
  7. 제6항에 있어서, 산화티탄 차단 층의 두께가 약 90 내지 180A인 제품.
  8. 제1항에 있어서, 차단 층이 60 내지 120A의 두께를 갖은 산화아연/산화주석 층인 제품.
  9. 제8항에 있어서, 산화아연/산화주석 층의 밀도가 5.7g/㎤인 제품.
  10. 제9항에 있어서, 산화아연/산화주석 층의 두께가 90 내지 120A인 제품.
  11. 제1항에 있어서, 매질이 산화인듐, 산화주석, 산화인듐/산화주석 및 산화아연/산화알루미늄으로 이루어진 군으로부터 선택되는 전기전도성 피막인 제품.
  12. 제1항에 있어서, 매질이 광촉매 조성물인 제품.
  13. 제12항에 있어서, 조성물이 실리콘 결합제중 산화티탄 입자를 포함하는 제품.
  14. 제1항에 있어서, 매질이 액체 전해질인 제품.
  15. 소정의 550nm에서의 투과율 및 굴절률, 및 표면에 알칼리금속 이온을 갖는 유리 기재; 기재의 표면위에 떨어져 위치하며 소정 농도의 알칼리금속 이온으로 인해 기능이 열화됨을 특징으로 하는 매질; 및 180A미만의 두께 및 유리 기재의 굴절률보다 높은 굴절률을 갖는 금속 산화물의 스퍼터링된 층으로서 유리 기재상에 직접 적용시킬 때 기재의 550nm에서의 투과율을 10% 이상 저하시키지 않는 층을 상기 표면과 상기 매질 사이에 포함하는 것을 특징으로 하는 제품.
  16. 결정밀도의 90% 이상의 밀도를 갖는 무정형 금속 산화물을 180A 미만의 두께로 유리 기재의 표면상에 스퍼터 점착시켜 알칼리금속 이온 차단체를 제공하는 단계; 및 소정 농도의 알칼리금속 이온으로 인해 외관이 열화됨을 특징으로 하는 매질을 제공하는 단계를 포함하는 것을 특징으로 하는, 제품을 제조하는 방법.
  17. 제16항에 있어서, 금속 산화물이 30 내지 120A의 두께 및 5.0g/㎤ 이상의 밀도를 갖는 무정형 산화지르코늄인 방법.
  18. 제16항에 있어서, 금속 산화물이 45 내지 180A의 두께 및 3.8g/㎤보다 큰 밀도를 갖는 무정형 산화티탄인 방법.
  19. 제16항에 있어서, 금속 산화물이 60 내지 120A의 두께 및 5.7g/㎤의 밀도를 갖는 산화아연/산화주석인 방법.
  20. 제16항에 있어서, 스퍼터링 단계가 기재 표면에 통상 수직인 경로를 따라 이동하는 스퍼터링된 금속 산화물만 침착시키는 단계를 포함하는 방법.
  21. 제16항에 있어서, 매질이 액정 물질, 전기전도성 피막 및 전해질, 및 이들의 혼합물로 이루어진 군으로부터 선택되는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970003174A 1996-02-01 1997-01-31 알칼리금속 확산 차단 층 KR100188492B1 (ko)

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US08/597,543 US5830252A (en) 1994-10-04 1996-02-01 Alkali metal diffusion barrier layer

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CA2195115A1 (en) 1997-08-02
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EP0787696A1 (en) 1997-08-06
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AU690044B2 (en) 1998-04-09
GR3033443T3 (en) 2000-09-29
US5830252A (en) 1998-11-03
BR9700148A (pt) 1998-09-29
JPH09227167A (ja) 1997-09-02
DE69701408D1 (de) 2000-04-20
ATE190595T1 (de) 2000-04-15
JP3996229B2 (ja) 2007-10-24
EP0787696B1 (en) 2000-03-15
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