KR970025029U - 웨이퍼 검사용 프로브의 포오즈키 구동회로 - Google Patents
웨이퍼 검사용 프로브의 포오즈키 구동회로Info
- Publication number
- KR970025029U KR970025029U KR2019950032532U KR19950032532U KR970025029U KR 970025029 U KR970025029 U KR 970025029U KR 2019950032532 U KR2019950032532 U KR 2019950032532U KR 19950032532 U KR19950032532 U KR 19950032532U KR 970025029 U KR970025029 U KR 970025029U
- Authority
- KR
- South Korea
- Prior art keywords
- poozki
- probe
- drive circuit
- wafer inspection
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950032532U KR200160147Y1 (ko) | 1995-11-07 | 1995-11-07 | 웨이퍼 검사용 프로브의 포오즈키 구동회로 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950032532U KR200160147Y1 (ko) | 1995-11-07 | 1995-11-07 | 웨이퍼 검사용 프로브의 포오즈키 구동회로 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970025029U true KR970025029U (ko) | 1997-06-20 |
| KR200160147Y1 KR200160147Y1 (ko) | 1999-11-01 |
Family
ID=19428297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019950032532U KR200160147Y1 (ko) | 1995-11-07 | 1995-11-07 | 웨이퍼 검사용 프로브의 포오즈키 구동회로 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200160147Y1 (ko) |
-
1995
- 1995-11-07 KR KR2019950032532U patent/KR200160147Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR200160147Y1 (ko) | 1999-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20090727 Year of fee payment: 11 |
|
| LAPS | Lapse due to unpaid annual fee |