KR960025385U - 일체화된 웨이퍼패턴 검사장치 - Google Patents

일체화된 웨이퍼패턴 검사장치

Info

Publication number
KR960025385U
KR960025385U KR2019940034233U KR19940034233U KR960025385U KR 960025385 U KR960025385 U KR 960025385U KR 2019940034233 U KR2019940034233 U KR 2019940034233U KR 19940034233 U KR19940034233 U KR 19940034233U KR 960025385 U KR960025385 U KR 960025385U
Authority
KR
South Korea
Prior art keywords
inspection device
pattern inspection
wafer pattern
integrated wafer
integrated
Prior art date
Application number
KR2019940034233U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940034233U priority Critical patent/KR960025385U/ko
Publication of KR960025385U publication Critical patent/KR960025385U/ko

Links

KR2019940034233U 1994-12-15 1994-12-15 일체화된 웨이퍼패턴 검사장치 KR960025385U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940034233U KR960025385U (ko) 1994-12-15 1994-12-15 일체화된 웨이퍼패턴 검사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940034233U KR960025385U (ko) 1994-12-15 1994-12-15 일체화된 웨이퍼패턴 검사장치

Publications (1)

Publication Number Publication Date
KR960025385U true KR960025385U (ko) 1996-07-22

Family

ID=60849886

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940034233U KR960025385U (ko) 1994-12-15 1994-12-15 일체화된 웨이퍼패턴 검사장치

Country Status (1)

Country Link
KR (1) KR960025385U (ko)

Similar Documents

Publication Publication Date Title
DE19680786T1 (de) Halbleiterbauelement-Testgerät
DE59508581D1 (de) Halbleiterbauelement
DE19880680T1 (de) Halbleiterbauelement-Testgerät
DE69522789T2 (de) Halbleitervorrichtung
DE69501381D1 (de) Halbleitergerät
DE69513207T2 (de) Halbleitervorrichtung
DE69531121D1 (de) Integrierte Halbleiteranordnung
KR960012414A (ko) 웨이퍼 검사장치
KR960019102U (ko) 웨이퍼 세척장치
KR970003247U (ko) 웨이퍼 검사장치
KR960009084A (ko) 반도체장치
KR960025385U (ko) 일체화된 웨이퍼패턴 검사장치
KR960015611U (ko) 반도체 디바이스 테스트용 소켓
KR960015616U (ko) 반도체 소자 테스트용 소켓
KR960006348U (ko) 반도체칩 검사장치
KR970059856U (ko) 반도체 웨이퍼 패턴 검사장치
KR960006346U (ko) 반도체장치용 테스트소켓
KR970003246U (ko) 웨이퍼링 검사장치
KR950034346U (ko) 반도체장치의 테스트패턴칩
KR960009225A (ko) 반도체장치
KR950023961U (ko) 반도체 소자 검사용 테스트 보드
KR960024379U (ko) 웨이퍼 주변 노광장치
KR970045267U (ko) 집적 회로 검사 장치
KR950025901U (ko) 반도체 제품 검사장치
KR960025404U (ko) 웨이퍼검사용 프로브카드

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination