KR960025385U - 일체화된 웨이퍼패턴 검사장치 - Google Patents
일체화된 웨이퍼패턴 검사장치Info
- Publication number
- KR960025385U KR960025385U KR2019940034233U KR19940034233U KR960025385U KR 960025385 U KR960025385 U KR 960025385U KR 2019940034233 U KR2019940034233 U KR 2019940034233U KR 19940034233 U KR19940034233 U KR 19940034233U KR 960025385 U KR960025385 U KR 960025385U
- Authority
- KR
- South Korea
- Prior art keywords
- inspection device
- pattern inspection
- wafer pattern
- integrated wafer
- integrated
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940034233U KR960025385U (ko) | 1994-12-15 | 1994-12-15 | 일체화된 웨이퍼패턴 검사장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940034233U KR960025385U (ko) | 1994-12-15 | 1994-12-15 | 일체화된 웨이퍼패턴 검사장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960025385U true KR960025385U (ko) | 1996-07-22 |
Family
ID=60849886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940034233U KR960025385U (ko) | 1994-12-15 | 1994-12-15 | 일체화된 웨이퍼패턴 검사장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960025385U (ko) |
-
1994
- 1994-12-15 KR KR2019940034233U patent/KR960025385U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |