KR970003246U - 웨이퍼링 검사장치 - Google Patents
웨이퍼링 검사장치Info
- Publication number
- KR970003246U KR970003246U KR2019950013172U KR19950013172U KR970003246U KR 970003246 U KR970003246 U KR 970003246U KR 2019950013172 U KR2019950013172 U KR 2019950013172U KR 19950013172 U KR19950013172 U KR 19950013172U KR 970003246 U KR970003246 U KR 970003246U
- Authority
- KR
- South Korea
- Prior art keywords
- inspection device
- wafer ring
- ring inspection
- wafer
- ring
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950013172U KR0124552Y1 (ko) | 1995-06-12 | 1995-06-12 | 웨이퍼링 검사장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950013172U KR0124552Y1 (ko) | 1995-06-12 | 1995-06-12 | 웨이퍼링 검사장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970003246U true KR970003246U (ko) | 1997-01-24 |
| KR0124552Y1 KR0124552Y1 (ko) | 1999-02-18 |
Family
ID=19415332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019950013172U KR0124552Y1 (ko) | 1995-06-12 | 1995-06-12 | 웨이퍼링 검사장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0124552Y1 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101594399B1 (ko) * | 2014-08-28 | 2016-02-16 | 주식회사 하나테크 | 반도체 웨이퍼 결함 검사 및 제거 장치 및 방법 |
| KR102222460B1 (ko) * | 2019-06-10 | 2021-03-04 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
-
1995
- 1995-06-12 KR KR2019950013172U patent/KR0124552Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR0124552Y1 (ko) | 1999-02-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| FPAY | Annual fee payment |
Payment date: 20040331 Year of fee payment: 7 |
|
| LAPS | Lapse due to unpaid annual fee |