KR970022254A - 저항온도계 - Google Patents

저항온도계 Download PDF

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Publication number
KR970022254A
KR970022254A KR1019960049412A KR19960049412A KR970022254A KR 970022254 A KR970022254 A KR 970022254A KR 1019960049412 A KR1019960049412 A KR 1019960049412A KR 19960049412 A KR19960049412 A KR 19960049412A KR 970022254 A KR970022254 A KR 970022254A
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KR
South Korea
Prior art keywords
resistance
resistance thermometer
layer
gas
ceramic
Prior art date
Application number
KR1019960049412A
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English (en)
Inventor
비난트 칼하인츠
디이트만 스테판
조엘 에바
Original Assignee
에릭 얀센스
헤래우스 센서 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 에릭 얀센스, 헤래우스 센서 게엠베하 filed Critical 에릭 얀센스
Publication of KR970022254A publication Critical patent/KR970022254A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element

Abstract

주로 백금계의 한 금속, 특히 백금으로 구성되어 있는 저항층의 형태로 된 계층저항을 가진 저항온도계는 열팽창계수의 범위가 8.5 내지 10.5ppm/K인 지지판의 전기절연표면위에 얹혀 있으며 진기절연 덮개층으로 된 저항층의 지지판은 다음과 같은 구조로 되어 있다.
a) 마그네슘 화합물의 재료로 된 기체로서 또는 b) 기체에 얹힌 중간층으로서 기체재료는 최소한 마그네슘 화합물로 되어 있거나 또는 c) 기체에 엊힌 중간층으로서 이때 기체는 산화알미늄으로 되어 있다.
이러한 저항온도계로서 고온범위(500℃ 이상)에서 상당히 장기간의 안정을 도모할 수가 있다·

Description

저항온도계
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 저항온도계의 계측저항을 보여주는데 여기서 저항층은 직접 전기 절연 기체의 표면위에 직접 놓여있다,
제2도는 저항층과 지지판 사이의 중간층을 가진 계측저항을 보여주고 있다.

Claims (7)

  1. 열팽창계수가 8.5 내지 10.5ppm/K인 지지판의 전기절연면에 부착된 두께 0.1 내지 10미크론(μm)의 주로 백금계 금속으로 구성된 저항층의 형태로 된 계측저항을 가진 저항온도계에 있어서, 지지판으로서는 주로 마그네슘티탄산염의 기체(1)(基體)로 되어 있는 것을 특징으로 하는 저항온도계.
  2. 제1항에 있어서, 기체(1)와 저항층(4) 사이에는 주로 산화알미늄이나 또는 산화마그네슘이 입혀져 있는 것을 특징으로 하는 저항온도계.
  3. 제1항 또는 제2항에 있어서, 덮개층(5)은 브론규산염유리로 되어 있는 것을 특징으로 하는 저항온도계.
  4. 제3항에 있어서, 브론규산염유리층이 10미크론메타(μm) 내지 100미크론메타(μm)범위의 두께로 되어 있는 것을 특징으로 하는 저항온도계.
  5. 제1항 또는 제2항에 있어서, 덮개층(5)이 세라믹 미소판으로 되어 있는 것을 특징으로 하는 저항온도계.
  6. 제5항에 있어서, 세라믹 미소판이 두께 0.1 내지 1mm로 되어 있는 것을 특징으로 하는 저항온도계.
  7. 제5항 또는 제6항에 있어서, 세라믹 미소판은 덮개층(5)으로서 세라믹 접착제나 또는 유리땜에 의하여 저항층(4)과 기체(1)에 부착되는 것을 특징으로 하는 저항온도계.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960049412A 1995-10-30 1996-10-29 저항온도계 KR970022254A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19540194.8 1995-10-30
DE19540194A DE19540194C1 (de) 1995-10-30 1995-10-30 Widerstandsthermometer aus einem Metall der Platingruppe

Publications (1)

Publication Number Publication Date
KR970022254A true KR970022254A (ko) 1997-05-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960049412A KR970022254A (ko) 1995-10-30 1996-10-29 저항온도계

Country Status (11)

Country Link
US (1) US5831512A (ko)
EP (1) EP0772031A1 (ko)
JP (1) JPH09145489A (ko)
KR (1) KR970022254A (ko)
CN (1) CN1046029C (ko)
BR (1) BR9605342A (ko)
CA (1) CA2189197A1 (ko)
DE (1) DE19540194C1 (ko)
NO (1) NO963449L (ko)
SG (1) SG46750A1 (ko)
TW (1) TW314593B (ko)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19633486C1 (de) * 1996-08-20 1998-01-15 Heraeus Sensor Nite Gmbh Verfahren zur Herstellung einer Leiterplatte mit dünnen Leiterbahnen und Anschluß-Kontaktierungsbereichen sowie deren Verwendung
DE19742696A1 (de) * 1997-09-26 1999-05-06 Siemens Matsushita Components Bauelement mit planarer Leiterbahn
EP0905494A3 (de) * 1997-09-26 2000-02-23 SIEMENS MATSUSHITA COMPONENTS GmbH & CO. KG Hochtemperatursensor
DE19813468C1 (de) * 1998-03-26 1999-07-22 Sensotherm Temperatursensorik Sensorbauelement
EP0973020B1 (de) * 1998-07-16 2009-06-03 EPIQ Sensor-Nite N.V. Elektrischer Temperatur-Sensor mit Mehrfachschicht
EP0987529A1 (de) 1998-09-14 2000-03-22 Heraeus Electro-Nite International N.V. Elektrischer Widerstand mit wenigstens zwei Anschlusskontaktfeldern auf einem Substrat mit wenigstens einer Ausnehmung sowie Verfahren zu dessen Herstellung
DE19901184C1 (de) * 1999-01-14 2000-10-26 Sensotherm Temperatursensorik Platintemperatursensor und Verfahren zur Herstellung desselben
DE19901183C2 (de) * 1999-01-14 2001-01-25 Sensotherm Temperatursensorik Platintemperatursensor und Herstellungsverfahren für denselben
DE19959243A1 (de) * 1999-12-08 2001-06-13 Abb Research Ltd Sicherung
US6341892B1 (en) 2000-02-03 2002-01-29 George Schmermund Resistance thermometer probe
DE10016415A1 (de) * 2000-04-01 2001-10-11 Bosch Gmbh Robert Sensorelement, insbesondere Temperaturfühler
US6995691B2 (en) * 2001-02-14 2006-02-07 Heetronix Bonded structure using reacted borosilicate mixture
JP2003031579A (ja) * 2001-07-18 2003-01-31 Denso Corp センサ及びその製造方法
US7106167B2 (en) * 2002-06-28 2006-09-12 Heetronix Stable high temperature sensor system with tungsten on AlN
US6762671B2 (en) * 2002-10-25 2004-07-13 Delphi Technologies, Inc. Temperature sensor and method of making and using the same
US7632537B2 (en) * 2002-10-30 2009-12-15 Hybird Electronics Australia Pty Ltd. Circuits including a titanium substrate
JP4009520B2 (ja) * 2002-11-05 2007-11-14 日東電工株式会社 温度測定用フレキシブル配線回路基板
US7915994B2 (en) * 2003-11-13 2011-03-29 Harco Laboratories, Inc. Thermal variable resistance device with protective sheath
US7339455B2 (en) * 2004-03-08 2008-03-04 Ngk Spark Plug Co., Ltd. Platinum resistor temperature sensor
DE202006001883U1 (de) * 2006-02-03 2007-03-08 Ephy-Mess Gesellschaft für Elektro-Physikalische Meßgeräte mbH Widerstandsthermometer
JP4906388B2 (ja) * 2006-04-07 2012-03-28 生活協同組合コープさっぽろ 鮮度情報検出用インジケータホルダ
CN100405032C (zh) * 2006-05-29 2008-07-23 云南瑞升烟草技术（集团）有限公司 卷烟内部动态温度测量设备
JP5607285B2 (ja) * 2006-06-23 2014-10-15 日本精工株式会社 軸受装置
DE102007023434B4 (de) 2007-05-16 2017-07-06 Innovative Sensor Technology Ist Ag Widerstandsthermometer
DE102007035997A1 (de) 2007-07-30 2009-02-05 Innovative Sensor Technology Ist Ag Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße
DE102007046900C5 (de) 2007-09-28 2018-07-26 Heraeus Sensor Technology Gmbh Hochtemperatursensor und ein Verfahren zu dessen Herstellung
DE102007046907B4 (de) * 2007-09-28 2015-02-26 Heraeus Sensor Technology Gmbh Schichtwiderstand und Verfahren zu dessen Herstellung
DE102007058410A1 (de) * 2007-12-03 2009-06-04 Innovative Sensor Technology Ist Ag Vorrichtung zur Bestimmung und/oder Überwachung der Temperatur
DE102009007940B4 (de) 2009-02-06 2010-11-18 Heraeus Sensor Technology Gmbh Nichtleitfähiges Zirkonoxid
DE102009017676B3 (de) * 2009-04-16 2010-08-05 Heraeus Sensor Technology Gmbh Hochtemperatursensor mit Chipdrähten aus Chromoxid bildender Eisenlegierung
JP5665408B2 (ja) * 2010-08-04 2015-02-04 国立大学法人東北大学 水分発生用反応炉
WO2012033125A1 (ja) * 2010-09-07 2012-03-15 住友電気工業株式会社 基板、基板の製造方法およびｓａｗデバイス
DE102010055934B4 (de) 2010-12-23 2018-09-06 Epcos Ag Aktuator und Verfahren zu dessen Herstellung
JP6404726B2 (ja) * 2014-03-07 2018-10-17 日本特殊陶業株式会社 感温素子及び温度センサ
DE102014104219B4 (de) * 2014-03-26 2019-09-12 Heraeus Nexensos Gmbh Keramikträger sowie Sensorelement, Heizelement und Sensormodul jeweils mit einem Keramikträger und Verfahren zur Herstellung eines Keramikträgers
DE102015223948B3 (de) * 2015-12-01 2017-03-30 TE Connectivity Sensors Germany GmbH Substrat für eine Sensoranordnung für ein Widerstandsthermometer, Sensoranordnung, Widerstandsthermometer und Verfahren zur Herstellung eines solchen Substrats
DE102015223949B4 (de) * 2015-12-01 2020-09-24 TE Connectivity Sensors Germany GmbH Sensoranordnung für ein Widerstandsthermometer, Widerstandsthermometer und Verfahren zur Herstellung einer Sensoranordnung
DE102015223950A1 (de) * 2015-12-01 2017-06-01 TE Connectivity Sensors Germany GmbH Substrat für eine Sensoranordnung für ein Widerstandsthermometer, Sensoranordnung, Widerstandsthermometer und Verfahren zur Herstellung eines solchen Substrats
DE102015223951B4 (de) * 2015-12-01 2022-12-01 TE Connectivity Sensors Germany GmbH Substrat für eine Sensoranordnung für ein Widerstandsthermometer, Sensoranordnung und Widerstandsthermometer
JP2018146404A (ja) * 2017-03-06 2018-09-20 Koa株式会社 温度センサ素子
DE102018110889A1 (de) * 2017-05-16 2018-11-22 Koa Corporation Temperatursensor-Element
US10502641B2 (en) 2017-05-18 2019-12-10 Sensata Technologies, Inc. Floating conductor housing
US10371581B2 (en) 2017-06-02 2019-08-06 Sensata Technologies, Inc. Alumina diffusion barrier for sensing elements
JP2019090785A (ja) * 2017-09-05 2019-06-13 リテルヒューズ・インク 温度感知テープ
US11300458B2 (en) 2017-09-05 2022-04-12 Littelfuse, Inc. Temperature sensing tape, assembly, and method of temperature control
WO2020032021A1 (ja) * 2018-08-10 2020-02-13 Ｓｅｍｉｔｅｃ株式会社 温度センサ及び温度センサを備えた装置
US11226244B2 (en) 2019-01-30 2022-01-18 Sensata Technologies, Inc. Automotive exhaust gas sensor with two calibration portions
CN109827671A (zh) * 2019-03-12 2019-05-31 哈尔滨理工大学 一种热电偶成型方法
US11371892B2 (en) * 2019-06-28 2022-06-28 Fluke Corporation Platinum resistance temperature sensor having floating platinum member
CN110388992B (zh) * 2019-07-19 2021-03-16 重庆斯太宝科技有限公司 一种高稳定性温度传感器敏感元件

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2450551C2 (de) * 1974-10-24 1977-01-13 Heraeus Gmbh W C Elektrischer messwiderstand fuer ein widerstandsthermometer und verfahren zu seiner herstellung
DE2527739C3 (de) * 1975-06-21 1978-08-31 W.C. Heraeus Gmbh, 6450 Hanau Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer
DE3146020C2 (de) * 1981-11-20 1985-11-07 Danfoss A/S, Nordborg Temperaturabhängiger Widerstand, insbesondere für Widerstandsthermometer
DE3630393C2 (de) * 1985-09-10 1994-06-23 Sharp Kk Widerstandsthermometer
DE3733193C1 (de) * 1987-10-01 1988-11-24 Bosch Gmbh Robert NTC-Temperaturfuehler sowie Verfahren zur Herstellung von NTC-Temperaturfuehlerelementen
JPH0328719A (ja) * 1989-06-27 1991-02-06 Ngk Insulators Ltd 検出素子
US4954926A (en) * 1989-07-28 1990-09-04 E. I. Du Pont De Nemours And Company Thick film conductor composition
DE4026061C1 (ko) * 1990-08-17 1992-02-13 Heraeus Sensor Gmbh, 6450 Hanau, De
US5430428A (en) * 1991-02-15 1995-07-04 Siemens Aktiengesellschaft High-temperature sensor made of metal of the platinum group
JPH071185B2 (ja) * 1991-08-21 1995-01-11 日本碍子株式会社 抵抗体素子
JPH05223614A (ja) * 1992-02-18 1993-08-31 Ngk Insulators Ltd 熱式流量計用検知素子
US5349322A (en) * 1992-03-27 1994-09-20 Ngk Insulators, Ltd. Resistors for thermal flowmeters
JP3203803B2 (ja) * 1992-09-01 2001-08-27 株式会社デンソー サーミスタ式温度センサ
DE4300084C2 (de) * 1993-01-06 1995-07-27 Heraeus Sensor Gmbh Widerstandsthermometer mit einem Meßwiderstand
JPH0729706A (ja) * 1993-07-08 1995-01-31 Nippondenso Co Ltd 高温用温度センサ及びその製造方法
JPH07312301A (ja) * 1994-03-24 1995-11-28 Ngk Insulators Ltd 抵抗体素子
DE4415980A1 (de) * 1994-05-06 1995-11-09 Bosch Gmbh Robert Vorrichtung zur Temperaturmessung an einer Sauerstoffsonde

Also Published As

Publication number Publication date
CN1046029C (zh) 1999-10-27
CN1158416A (zh) 1997-09-03
CA2189197A1 (en) 1997-05-01
SG46750A1 (en) 1998-02-20
TW314593B (ko) 1997-09-01
EP0772031A1 (de) 1997-05-07
JPH09145489A (ja) 1997-06-06
NO963449L (no) 1997-05-02
NO963449D0 (no) 1996-08-19
US5831512A (en) 1998-11-03
DE19540194C1 (de) 1997-02-20
BR9605342A (pt) 1998-07-28

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