KR970002002A - 유체 제어 장치 - Google Patents

유체 제어 장치 Download PDF

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Publication number
KR970002002A
KR970002002A KR1019960024374A KR19960024374A KR970002002A KR 970002002 A KR970002002 A KR 970002002A KR 1019960024374 A KR1019960024374 A KR 1019960024374A KR 19960024374 A KR19960024374 A KR 19960024374A KR 970002002 A KR970002002 A KR 970002002A
Authority
KR
South Korea
Prior art keywords
control device
fluid control
connecting portion
regulator
closing valve
Prior art date
Application number
KR1019960024374A
Other languages
English (en)
Other versions
KR100453789B1 (ko
Inventor
다다히로 오미
케이지 히라오
미치오 야마지
시게루 이토이
츠토무 시노하라
노부카즈 이케다
히로시 모로코시
데츠야 고지마
Original Assignee
다다히로 오미
오가와 슈헤이
가부시키가이샤 후지킨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다다히로 오미, 오가와 슈헤이, 가부시키가이샤 후지킨 filed Critical 다다히로 오미
Publication of KR970002002A publication Critical patent/KR970002002A/ko
Application granted granted Critical
Publication of KR100453789B1 publication Critical patent/KR100453789B1/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Valve Housings (AREA)
  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

본 발명에 따른 유체 제어 장치는 질량 흐름 제어기와, 질량 흐름 제어기의 입구측에 설치된 2개의 개폐 밸브와, 질량 흐름 제어기의 출구측에 설치된 3개의 개폐 밸브를 구비한다. 입구측에서는 퍼지 유체용 개폐 밸브 위에 주유체용 개폐 밸브가 겹쳐져 배치되며, 출구측에서는 진공 흡인용 개폐 밸브 위에 배기용 개폐 밸브가 겹쳐지고 다시 이 위에 주 통로 개폐 밸브가 겹쳐져 배치된다.

Description

유체 제어 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 유체 제어 장치를 나타낸 일부가 절취된 측면도, 제2도는 제1도와의 동일부의 평면도, 제3도는 본 발명에 따른 유체 제어 장치를 병렬로 설치할 때의 접속 상태를 나타낸 사시도, 제4도는 유체 흐름의 5개의 방식을 나타낸 도면.

Claims (3)

  1. 유량 또는 압력을 조정하는 조정기의 입구측과 출구측중 적어도 한편에 다수의 밸브로 구성되고 다수의 유로를 절환하여 조정기의 유로에 연통시키는 밸비 장치가 설치된 유체 제어 장치에 있어서, 밸브 장치의 다수의 밸브는 상하로 겹쳐져 배치되는 것을 특징으로 하는 유체 제어 장치.
  2. 제1항에 있어서, 조정기에는 조정기에 연통하는 하향 개구 통로를 가진 상측 연결부가 설치되고 접속 부재에는 접속 부재에 연통하는 상향 개구 통로를 가진 하측 연결부가 설치되며, 하향 개구 통로와 상향 개구 통로가 연통하도록 하측 연결부 위에 상측 연결부가 겹쳐지며, 상측 연결부와 하측 연결부가 착탈 자유롭게 연결되는 것을 특징으로 하는 유체 제어 장치.
  3. 제1항 또는 제2항에 있어서, 유체 제어 장치가 다수의 열로 설치되는 동시에, 각각의 유체 제어 장치의 동일 높이상의 밸브끼리 조인트 및 튜브의 개재하에 접속되는 것을 특징으로 하는 유체 제어 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960024374A 1995-06-30 1996-06-27 유체제어장치및시스템 KR100453789B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-164902 1995-06-30
JP16490295A JP3546275B2 (ja) 1995-06-30 1995-06-30 流体制御装置

Publications (2)

Publication Number Publication Date
KR970002002A true KR970002002A (ko) 1997-01-24
KR100453789B1 KR100453789B1 (ko) 2004-12-31

Family

ID=15802045

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960024374A KR100453789B1 (ko) 1995-06-30 1996-06-27 유체제어장치및시스템

Country Status (8)

Country Link
US (1) US5769110A (ko)
EP (1) EP0751301B1 (ko)
JP (1) JP3546275B2 (ko)
KR (1) KR100453789B1 (ko)
CA (1) CA2180204A1 (ko)
DE (1) DE69626449T2 (ko)
IL (1) IL118762A (ko)
TW (1) TW293075B (ko)

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Also Published As

Publication number Publication date
KR100453789B1 (ko) 2004-12-31
IL118762A0 (en) 1996-10-16
EP0751301B1 (en) 2003-03-05
DE69626449D1 (de) 2003-04-10
JP3546275B2 (ja) 2004-07-21
EP0751301A3 (en) 1998-07-15
JPH0916267A (ja) 1997-01-17
US5769110A (en) 1998-06-23
TW293075B (ko) 1996-12-11
IL118762A (en) 1999-12-31
DE69626449T2 (de) 2004-01-15
CA2180204A1 (en) 1996-12-31
EP0751301A2 (en) 1997-01-02

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