DE69626449D1 - Fluidregelvorrichtung - Google Patents
FluidregelvorrichtungInfo
- Publication number
- DE69626449D1 DE69626449D1 DE69626449T DE69626449T DE69626449D1 DE 69626449 D1 DE69626449 D1 DE 69626449D1 DE 69626449 T DE69626449 T DE 69626449T DE 69626449 T DE69626449 T DE 69626449T DE 69626449 D1 DE69626449 D1 DE 69626449D1
- Authority
- DE
- Germany
- Prior art keywords
- management device
- fluid management
- fluid
- management
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B9/00—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
- F15B9/02—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
- F15B9/08—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/0817—Multiblock manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0871—Channels for fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
- Y10T137/5283—Units interchangeable between alternate locations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Valve Housings (AREA)
- Flow Control (AREA)
- Control Of Fluid Pressure (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Fluid-Driven Valves (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16490295A JP3546275B2 (ja) | 1995-06-30 | 1995-06-30 | 流体制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69626449D1 true DE69626449D1 (de) | 2003-04-10 |
DE69626449T2 DE69626449T2 (de) | 2004-01-15 |
Family
ID=15802045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69626449T Expired - Fee Related DE69626449T2 (de) | 1995-06-30 | 1996-06-28 | Fluidregelvorrichtung |
Country Status (8)
Country | Link |
---|---|
US (1) | US5769110A (de) |
EP (1) | EP0751301B1 (de) |
JP (1) | JP3546275B2 (de) |
KR (1) | KR100453789B1 (de) |
CA (1) | CA2180204A1 (de) |
DE (1) | DE69626449T2 (de) |
IL (1) | IL118762A (de) |
TW (1) | TW293075B (de) |
Families Citing this family (52)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5810031A (en) * | 1996-02-21 | 1998-09-22 | Aeroquip Corporation | Ultra high purity gas distribution component with integral valved coupling and methods for its use |
JP3726168B2 (ja) | 1996-05-10 | 2005-12-14 | 忠弘 大見 | 流体制御装置 |
JP3650859B2 (ja) * | 1996-06-25 | 2005-05-25 | 忠弘 大見 | 遮断開放器およびこれを備えた流体制御装置 |
US6293310B1 (en) * | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
US5992463A (en) * | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
US6394138B1 (en) | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
US6302141B1 (en) * | 1996-12-03 | 2001-10-16 | Insync Systems, Inc. | Building blocks for integrated gas panel |
JP3997338B2 (ja) * | 1997-02-14 | 2007-10-24 | 忠弘 大見 | 流体制御装置 |
DE29706400U1 (de) * | 1997-04-11 | 1997-05-28 | Rötelmann GmbH & Co., 58791 Werdohl | Vorrichtung zum Verteilen oder Mischen von fluiden Medien |
JP3737869B2 (ja) * | 1997-05-13 | 2006-01-25 | シーケーディ株式会社 | プロセスガス供給ユニット |
US5860676A (en) * | 1997-06-13 | 1999-01-19 | Swagelok Marketing Co. | Modular block assembly using angled fasteners for interconnecting fluid components |
JP4235759B2 (ja) * | 1997-08-05 | 2009-03-11 | 忠弘 大見 | 流体制御装置 |
US6026834A (en) * | 1997-10-17 | 2000-02-22 | Azima; Faramarz | Fluid mass flow controller device and method |
US7048007B2 (en) * | 1998-03-05 | 2006-05-23 | Swagelok Company | Modular surface mount manifold assemblies |
CN1289851C (zh) * | 1998-03-05 | 2006-12-13 | 斯瓦戈洛克公司 | 歧管系统 |
JP3780096B2 (ja) * | 1998-04-27 | 2006-05-31 | シーケーディ株式会社 | プロセスガス供給ユニット |
US7036528B2 (en) | 1998-05-18 | 2006-05-02 | Swagelok Company | Modular surface mount manifold assemblies |
US6260581B1 (en) | 1998-06-12 | 2001-07-17 | J. Gregory Hollingshead | Apparatus for assembling modular chemical distribution substrate blocks |
JP2002517698A (ja) | 1998-06-12 | 2002-06-18 | ジェイ. グレゴリー ホーリングスヘッド, | モジュラー化学送達ブロック |
US6085783A (en) * | 1998-09-02 | 2000-07-11 | Hollingshead; J. Gregory | Unified modular multi-directional flow chemical distribution block |
JP3921565B2 (ja) * | 1998-07-10 | 2007-05-30 | 株式会社フジキン | 流体制御装置 |
WO2000031462A1 (en) * | 1998-11-20 | 2000-06-02 | Mykrolis Corporation | System and method for integrating gas components |
KR100675698B1 (ko) | 1999-08-06 | 2007-02-01 | 써모 바이오스타, 인크. | 완전한 샘플 처리 능력을 포함하는 자동화된 진료 검출 시스템 |
JP4570748B2 (ja) * | 1999-08-24 | 2010-10-27 | 東京エレクトロン株式会社 | ガス処理装置およびそれに用いられる集合バルブ |
US6817381B2 (en) * | 1999-08-24 | 2004-11-16 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |
US6824825B2 (en) * | 1999-09-13 | 2004-11-30 | Tokyo Electron Limited | Method for depositing metallic nitride series thin film |
US6125887A (en) * | 1999-09-20 | 2000-10-03 | Pinto; James V. | Welded interconnection modules for high purity fluid flow control applications |
JP2005539375A (ja) * | 2002-08-27 | 2005-12-22 | セレリティ・インコーポレイテッド | 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル |
US20060060253A1 (en) * | 2002-10-21 | 2006-03-23 | Ckd Corporation | Integrated gas valve |
BRPI0409201A (pt) * | 2003-04-11 | 2006-03-28 | Great Stuff Inc | sistemas de mangueira, dispositivo de controle de fluido para sistema de pressão de fluido e método de provimento de fluxo de fluido |
US20060070674A1 (en) * | 2004-10-01 | 2006-04-06 | Eidsmore Paul G | Substrate with offset flow passage |
JP4555052B2 (ja) * | 2004-11-04 | 2010-09-29 | シーケーディ株式会社 | ガス供給集積ユニット |
JP2006234110A (ja) * | 2005-02-25 | 2006-09-07 | Ckd Corp | ガス供給ユニット及びガス供給システム |
US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
CN101438091B (zh) | 2006-06-02 | 2012-05-23 | 喜开理株式会社 | 气体供给单元和气体供给系统 |
US20080009977A1 (en) * | 2006-07-10 | 2008-01-10 | Ultra Clean Holdings | Apparatus and Method for Monitoring a Chemical-Supply System |
JP5037510B2 (ja) | 2006-08-23 | 2012-09-26 | 株式会社堀場エステック | 集積型ガスパネル装置 |
US20100112814A1 (en) * | 2006-09-06 | 2010-05-06 | Sowmya Krishnan | Pre-certified process chamber and method |
US20080302426A1 (en) * | 2007-06-06 | 2008-12-11 | Greg Patrick Mulligan | System and method of securing removable components for distribution of fluids |
US20090078324A1 (en) * | 2007-09-21 | 2009-03-26 | Ultra Clean Technology, Inc. | Gas-panel system |
US20090114295A1 (en) * | 2007-11-06 | 2009-05-07 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
KR101548399B1 (ko) * | 2007-12-27 | 2015-08-28 | 램 리써치 코포레이션 | 복수의 가스의 가스 혼합물을 제공하는 장치, 복수의 믹싱 매니폴드 출구 밸브를 제어하는 방법 및 이를 구현하기 위한 머신 판독가능 저장 매체 |
JP5565962B2 (ja) * | 2009-03-04 | 2014-08-06 | 株式会社堀場エステック | ガス供給装置 |
US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
US8496029B2 (en) * | 2009-06-10 | 2013-07-30 | Vistadeltek, Llc | Extreme flow rate and/or high temperature fluid delivery substrates |
WO2012151292A2 (en) | 2011-05-02 | 2012-11-08 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
US20120298238A1 (en) * | 2011-05-25 | 2012-11-29 | Parker-Hannifin Corporation | Modular fluidic mixing system |
US9188990B2 (en) * | 2011-10-05 | 2015-11-17 | Horiba Stec, Co., Ltd. | Fluid mechanism, support member constituting fluid mechanism and fluid control system |
US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
CN105714271B (zh) * | 2014-12-22 | 2020-07-31 | 株式会社堀场Stec | 汽化系统 |
US10983537B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
JP6392492B1 (ja) * | 2017-04-20 | 2018-09-19 | 株式会社ブイテックス | 真空容器内圧力マルチ制御装置及び真空容器内圧力マルチ制御方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3817269A (en) * | 1969-08-22 | 1974-06-18 | Int Basic Economy Corp | Integrated manifold circuits |
US3605805A (en) * | 1969-10-24 | 1971-09-20 | Allis Chalmers Mfg Co | Stackable rotary valves |
DE2340304A1 (de) * | 1973-08-09 | 1975-02-20 | Itt Ind Gmbh Deutsche | Kombinierbares wegeventil |
DE2547847A1 (de) * | 1975-10-25 | 1977-05-05 | Beukenberg Maschf | Vorrichtung zur verteilung von hydraulischen oder pneumatischen arbeitsmedien |
GB2093822B (en) * | 1981-02-27 | 1984-06-20 | Emhart Uk Ltd | Valve assemblies for glassware forming machines |
JPS58211001A (ja) * | 1982-06-02 | 1983-12-08 | Hitachi Constr Mach Co Ltd | 制御弁集合装置 |
US4714091A (en) * | 1985-06-10 | 1987-12-22 | Emcore, Inc. | Modular gas handling apparatus |
US5054369A (en) * | 1989-07-28 | 1991-10-08 | Woodward Governor Company | Multiplexed hydraulic control system with plural selector valves |
US5020570A (en) * | 1990-08-17 | 1991-06-04 | Power Components, Inc. | Combined valve modular control panel |
DE9106236U1 (de) * | 1991-05-21 | 1992-09-17 | IMAV-Hydraulik GmbH, 4005 Meerbusch | Verkettetes Hydrauliksystem |
US5339863A (en) * | 1992-12-18 | 1994-08-23 | Mid-America Power Drives Manufacturing & Distributing, Inc. | Port mounted implement selector |
DE4341266C1 (de) * | 1993-12-03 | 1994-07-21 | Becker Kg Gebr | Seitenkanalverdichter |
EP1222402A1 (de) * | 1999-10-20 | 2002-07-17 | Parker Hannifin Plc | Fluidisches steuersystem |
-
1995
- 1995-06-30 JP JP16490295A patent/JP3546275B2/ja not_active Expired - Fee Related
-
1996
- 1996-06-27 KR KR1019960024374A patent/KR100453789B1/ko not_active IP Right Cessation
- 1996-06-28 EP EP96110514A patent/EP0751301B1/de not_active Expired - Lifetime
- 1996-06-28 TW TW085107833A patent/TW293075B/zh active
- 1996-06-28 US US08/672,668 patent/US5769110A/en not_active Expired - Fee Related
- 1996-06-28 CA CA002180204A patent/CA2180204A1/en not_active Abandoned
- 1996-06-28 DE DE69626449T patent/DE69626449T2/de not_active Expired - Fee Related
- 1996-06-30 IL IL11876296A patent/IL118762A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
IL118762A0 (en) | 1996-10-16 |
TW293075B (de) | 1996-12-11 |
CA2180204A1 (en) | 1996-12-31 |
EP0751301A3 (de) | 1998-07-15 |
DE69626449T2 (de) | 2004-01-15 |
JP3546275B2 (ja) | 2004-07-21 |
KR100453789B1 (ko) | 2004-12-31 |
KR970002002A (ko) | 1997-01-24 |
IL118762A (en) | 1999-12-31 |
JPH0916267A (ja) | 1997-01-17 |
EP0751301B1 (de) | 2003-03-05 |
EP0751301A2 (de) | 1997-01-02 |
US5769110A (en) | 1998-06-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |