IL118762A - Fluid control apparatus - Google Patents

Fluid control apparatus

Info

Publication number
IL118762A
IL118762A IL11876296A IL11876296A IL118762A IL 118762 A IL118762 A IL 118762A IL 11876296 A IL11876296 A IL 11876296A IL 11876296 A IL11876296 A IL 11876296A IL 118762 A IL118762 A IL 118762A
Authority
IL
Israel
Prior art keywords
control apparatus
fluid control
fluid
control
Prior art date
Application number
IL11876296A
Other languages
English (en)
Other versions
IL118762A0 (en
Original Assignee
Ohmi Tadahiro
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohmi Tadahiro, Fujikin Kk filed Critical Ohmi Tadahiro
Publication of IL118762A0 publication Critical patent/IL118762A0/xx
Publication of IL118762A publication Critical patent/IL118762A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Valve Housings (AREA)
  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
IL11876296A 1995-06-30 1996-06-30 Fluid control apparatus IL118762A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16490295A JP3546275B2 (ja) 1995-06-30 1995-06-30 流体制御装置

Publications (2)

Publication Number Publication Date
IL118762A0 IL118762A0 (en) 1996-10-16
IL118762A true IL118762A (en) 1999-12-31

Family

ID=15802045

Family Applications (1)

Application Number Title Priority Date Filing Date
IL11876296A IL118762A (en) 1995-06-30 1996-06-30 Fluid control apparatus

Country Status (8)

Country Link
US (1) US5769110A (xx)
EP (1) EP0751301B1 (xx)
JP (1) JP3546275B2 (xx)
KR (1) KR100453789B1 (xx)
CA (1) CA2180204A1 (xx)
DE (1) DE69626449T2 (xx)
IL (1) IL118762A (xx)
TW (1) TW293075B (xx)

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JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
JP3997338B2 (ja) * 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
DE29706400U1 (de) * 1997-04-11 1997-05-28 Roetelmann Gmbh & Co Vorrichtung zum Verteilen oder Mischen von fluiden Medien
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
US5860676A (en) * 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components
JP4235759B2 (ja) 1997-08-05 2009-03-11 忠弘 大見 流体制御装置
US6026834A (en) * 1997-10-17 2000-02-22 Azima; Faramarz Fluid mass flow controller device and method
US7048007B2 (en) * 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
WO1999045302A1 (en) * 1998-03-05 1999-09-10 The Swagelok Company Modular surface mount manifold
JP3780096B2 (ja) * 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
US6260581B1 (en) 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
US6085783A (en) * 1998-09-02 2000-07-11 Hollingshead; J. Gregory Unified modular multi-directional flow chemical distribution block
EP1084359B1 (en) 1998-06-12 2003-03-19 J. Gregory Hollingshead Modular chemical delivery blocks
JP3921565B2 (ja) * 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
WO2000031462A1 (en) * 1998-11-20 2000-06-02 Mykrolis Corporation System and method for integrating gas components
WO2001011374A2 (en) 1999-08-06 2001-02-15 Thermo Biostar, Inc. An automated point of care detection system including complete sample processing capabilities
JP4570748B2 (ja) * 1999-08-24 2010-10-27 東京エレクトロン株式会社 ガス処理装置およびそれに用いられる集合バルブ
US6817381B2 (en) 1999-08-24 2004-11-16 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
US6824825B2 (en) * 1999-09-13 2004-11-30 Tokyo Electron Limited Method for depositing metallic nitride series thin film
US6125887A (en) * 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
CN100339629C (zh) * 2002-10-21 2007-09-26 喜开理株式会社 集成气阀
CA2521622A1 (en) * 2003-04-11 2004-10-28 Great Stuff, Inc. Fluid control system for air/liquid
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
JP4555052B2 (ja) * 2004-11-04 2010-09-29 シーケーディ株式会社 ガス供給集積ユニット
JP2006234110A (ja) * 2005-02-25 2006-09-07 Ckd Corp ガス供給ユニット及びガス供給システム
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
WO2007141828A1 (ja) 2006-06-02 2007-12-13 Ckd Corporation ガス供給ユニット及びガス供給システム
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
JP5037510B2 (ja) * 2006-08-23 2012-09-26 株式会社堀場エステック 集積型ガスパネル装置
WO2008030501A2 (en) * 2006-09-06 2008-03-13 Ultra Clean Holdings, Incorporated Pre-certified process chamber and method
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
US8794267B2 (en) * 2007-12-27 2014-08-05 Lam Research Corporation Gas transport delay resolution for short etch recipes
WO2010101077A1 (ja) * 2009-03-04 2010-09-10 株式会社堀場エステック ガス供給装置
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) * 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US20120298238A1 (en) * 2011-05-25 2012-11-29 Parker-Hannifin Corporation Modular fluidic mixing system
KR101940325B1 (ko) 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN105714271B (zh) * 2014-12-22 2020-07-31 株式会社堀场Stec 汽化系统
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP6392492B1 (ja) * 2017-04-20 2018-09-19 株式会社ブイテックス 真空容器内圧力マルチ制御装置及び真空容器内圧力マルチ制御方法

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Also Published As

Publication number Publication date
EP0751301B1 (en) 2003-03-05
KR970002002A (ko) 1997-01-24
EP0751301A3 (en) 1998-07-15
DE69626449T2 (de) 2004-01-15
DE69626449D1 (de) 2003-04-10
US5769110A (en) 1998-06-23
TW293075B (xx) 1996-12-11
JP3546275B2 (ja) 2004-07-21
JPH0916267A (ja) 1997-01-17
CA2180204A1 (en) 1996-12-31
KR100453789B1 (ko) 2004-12-31
EP0751301A2 (en) 1997-01-02
IL118762A0 (en) 1996-10-16

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Legal Events

Date Code Title Description
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KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees