DE69626449T2 - Fluidregelvorrichtung - Google Patents

Fluidregelvorrichtung Download PDF

Info

Publication number
DE69626449T2
DE69626449T2 DE69626449T DE69626449T DE69626449T2 DE 69626449 T2 DE69626449 T2 DE 69626449T2 DE 69626449 T DE69626449 T DE 69626449T DE 69626449 T DE69626449 T DE 69626449T DE 69626449 T2 DE69626449 T2 DE 69626449T2
Authority
DE
Germany
Prior art keywords
management device
fluid management
fluid
management
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69626449T
Other languages
English (en)
Other versions
DE69626449D1 (de
Inventor
Tadahiro Ohmi
Keiji Hirao
Michio Yamaji
Shigeru Itoi
Tsutomu Shinohara
Nobukazu Ikeda
Tetsuya Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of DE69626449D1 publication Critical patent/DE69626449D1/de
Application granted granted Critical
Publication of DE69626449T2 publication Critical patent/DE69626449T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/08—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type controlled by valves affecting the fluid feed or the fluid outlet of the servomotor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0832—Modular valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0807—Manifolds
    • F15B13/0817—Multiblock manifolds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08—Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803—Modular units
    • F15B13/0871—Channels for fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/5109—Convertible
    • Y10T137/5283—Units interchangeable between alternate locations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Valve Housings (AREA)
  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
DE69626449T 1995-06-30 1996-06-28 Fluidregelvorrichtung Expired - Fee Related DE69626449T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16490295A JP3546275B2 (ja) 1995-06-30 1995-06-30 流体制御装置

Publications (2)

Publication Number Publication Date
DE69626449D1 DE69626449D1 (de) 2003-04-10
DE69626449T2 true DE69626449T2 (de) 2004-01-15

Family

ID=15802045

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69626449T Expired - Fee Related DE69626449T2 (de) 1995-06-30 1996-06-28 Fluidregelvorrichtung

Country Status (8)

Country Link
US (1) US5769110A (de)
EP (1) EP0751301B1 (de)
JP (1) JP3546275B2 (de)
KR (1) KR100453789B1 (de)
CA (1) CA2180204A1 (de)
DE (1) DE69626449T2 (de)
IL (1) IL118762A (de)
TW (1) TW293075B (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use
JP3726168B2 (ja) 1996-05-10 2005-12-14 忠弘 大見 流体制御装置
JP3650859B2 (ja) * 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
JP3997338B2 (ja) * 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
DE29706400U1 (de) * 1997-04-11 1997-05-28 Roetelmann Gmbh & Co Vorrichtung zum Verteilen oder Mischen von fluiden Medien
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
US5860676A (en) * 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components
JP4235759B2 (ja) 1997-08-05 2009-03-11 忠弘 大見 流体制御装置
US6026834A (en) * 1997-10-17 2000-02-22 Azima; Faramarz Fluid mass flow controller device and method
US7048007B2 (en) * 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
CN1289851C (zh) * 1998-03-05 2006-12-13 斯瓦戈洛克公司 歧管系统
JP3780096B2 (ja) * 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
WO1999064772A1 (en) 1998-06-12 1999-12-16 Hollingshead J Gregory Modular chemical delivery blocks
US6085783A (en) * 1998-09-02 2000-07-11 Hollingshead; J. Gregory Unified modular multi-directional flow chemical distribution block
US6260581B1 (en) 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
JP3921565B2 (ja) * 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
WO2000031462A1 (en) * 1998-11-20 2000-06-02 Mykrolis Corporation System and method for integrating gas components
AU6524100A (en) 1999-08-06 2001-03-05 Thermo Biostar Inc. An automated point of care detection system including complete sample processingcapabilities
JP4570748B2 (ja) * 1999-08-24 2010-10-27 東京エレクトロン株式会社 ガス処理装置およびそれに用いられる集合バルブ
US6817381B2 (en) * 1999-08-24 2004-11-16 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
US6824825B2 (en) * 1999-09-13 2004-11-30 Tokyo Electron Limited Method for depositing metallic nitride series thin film
US6125887A (en) * 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
US7334605B2 (en) * 2002-08-27 2008-02-26 Celerity, Inc. Modular substrate gas panel having manifold connections in a common plane
EP1555471A4 (de) * 2002-10-21 2005-12-14 Ckd Corp Integriertes gasventil
RU2356653C2 (ru) * 2003-04-11 2009-05-27 Грейт Стафф, Инк. Система управления потоком для воздуха/жидкости
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
JP4555052B2 (ja) * 2004-11-04 2010-09-29 シーケーディ株式会社 ガス供給集積ユニット
JP2006234110A (ja) * 2005-02-25 2006-09-07 Ckd Corp ガス供給ユニット及びガス供給システム
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
KR100990695B1 (ko) 2006-06-02 2010-10-29 도쿄엘렉트론가부시키가이샤 가스공급유닛 및 가스공급시스템
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
US8196609B2 (en) * 2006-08-23 2012-06-12 Horiba Stec, Co., Ltd. Integrated gas panel apparatus
US20100112814A1 (en) * 2006-09-06 2010-05-06 Sowmya Krishnan Pre-certified process chamber and method
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
JP5377513B2 (ja) * 2007-12-27 2013-12-25 ラム リサーチ コーポレーション ショートエッチングレシピのためのガス輸送遅延の解消のための装置、方法、及びプログラム格納デバイス
WO2010101077A1 (ja) * 2009-03-04 2010-09-10 株式会社堀場エステック ガス供給装置
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (zh) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US20120298238A1 (en) * 2011-05-25 2012-11-29 Parker-Hannifin Corporation Modular fluidic mixing system
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN105714271B (zh) * 2014-12-22 2020-07-31 株式会社堀场Stec 汽化系统
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN109104875B (zh) * 2017-04-20 2021-07-02 株式会社V泰克斯 真空容器内压力多控制装置与真空容器内压力多控制方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817269A (en) * 1969-08-22 1974-06-18 Int Basic Economy Corp Integrated manifold circuits
US3605805A (en) * 1969-10-24 1971-09-20 Allis Chalmers Mfg Co Stackable rotary valves
DE2340304A1 (de) * 1973-08-09 1975-02-20 Itt Ind Gmbh Deutsche Kombinierbares wegeventil
DE2547847A1 (de) * 1975-10-25 1977-05-05 Beukenberg Maschf Vorrichtung zur verteilung von hydraulischen oder pneumatischen arbeitsmedien
GB2093822B (en) * 1981-02-27 1984-06-20 Emhart Uk Ltd Valve assemblies for glassware forming machines
JPS58211001A (ja) * 1982-06-02 1983-12-08 Hitachi Constr Mach Co Ltd 制御弁集合装置
US4714091A (en) * 1985-06-10 1987-12-22 Emcore, Inc. Modular gas handling apparatus
US5054369A (en) * 1989-07-28 1991-10-08 Woodward Governor Company Multiplexed hydraulic control system with plural selector valves
US5020570A (en) * 1990-08-17 1991-06-04 Power Components, Inc. Combined valve modular control panel
DE9106236U1 (de) * 1991-05-21 1992-09-17 Imav-Hydraulik Gmbh, 4005 Meerbusch, De
US5339863A (en) * 1992-12-18 1994-08-23 Mid-America Power Drives Manufacturing & Distributing, Inc. Port mounted implement selector
DE4341266C1 (de) * 1993-12-03 1994-07-21 Becker Kg Gebr Seitenkanalverdichter
EP1222402A1 (de) * 1999-10-20 2002-07-17 Parker Hannifin Plc Fluidisches steuersystem

Also Published As

Publication number Publication date
JP3546275B2 (ja) 2004-07-21
DE69626449D1 (de) 2003-04-10
IL118762A0 (en) 1996-10-16
CA2180204A1 (en) 1996-12-31
TW293075B (de) 1996-12-11
JPH0916267A (ja) 1997-01-17
KR100453789B1 (ko) 2004-12-31
US5769110A (en) 1998-06-23
KR970002002A (ko) 1997-01-24
EP0751301A2 (de) 1997-01-02
EP0751301A3 (de) 1998-07-15
IL118762A (en) 1999-12-31
EP0751301B1 (de) 2003-03-05

Similar Documents

Publication Publication Date Title
DE69626449T2 (de) Fluidregelvorrichtung
DE69635878D1 (de) Dokumentverwaltungsgerät
DE69634913D1 (de) Schnittstellenvorrichtung
BR9606198A (pt) Aparelho
DK0732046T3 (da) Lokaliseringsindretning
DK136195A (da) Udskylningsindretning
NO964615L (no) Fluidström-koplingsanordning
NL1000218C2 (nl) Fluïdumverdeelinrichting.
DE69615249T2 (de) Schnittstelleneinrichtung
BR9609581A (pt) Dispositivo para aplicação de fluído
DE59602589D1 (de) Adaptervorrichtung
BR9611186A (pt) Aparelho moedor-misturador
DE29501664U1 (de) Auftragvorrichtung
IT1279616B1 (it) Dispositivo gommatore
DE29506214U1 (de) Strömungsmittel-Verbindungseinrichtung
IT1279619B1 (it) Dispositivo gommatore
KR970000276A (ko) 뇌파유도장치
BR9603137A (pt) Aparelho
IT1279608B1 (it) Dispositivo gommatore
KR970028058U (ko) 도막제거장치
ITUD950061A1 (it) Dispositivo svita-tappi
KR970025196U (ko) 볼-마우스 장치
KR970005263A (ko) 산약분할장치
DE29500205U1 (de) Fluidische Anschlagvorrichtung
FI955246A0 (fi) Virtausvoimalaite

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee