KR970001008B1 - 원판형 공작물을 지지시키기 위한 캐리어 - Google Patents

원판형 공작물을 지지시키기 위한 캐리어 Download PDF

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Publication number
KR970001008B1
KR970001008B1 KR1019880014743A KR880014743A KR970001008B1 KR 970001008 B1 KR970001008 B1 KR 970001008B1 KR 1019880014743 A KR1019880014743 A KR 1019880014743A KR 880014743 A KR880014743 A KR 880014743A KR 970001008 B1 KR970001008 B1 KR 970001008B1
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KR
South Korea
Prior art keywords
carrier
shaft
annular
outer portion
rim
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019880014743A
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English (en)
Korean (ko)
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KR890008014A (ko
Inventor
숨니취 프란즈
Original Assignee
세즈 세미콘덕터-이퀴프먼트 주베회르 퓌르 디이 할블라이테르 페르티궁 게젤샤프트 엠. 베. 하
숨니취 프란즈
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Application filed by 세즈 세미콘덕터-이퀴프먼트 주베회르 퓌르 디이 할블라이테르 페르티궁 게젤샤프트 엠. 베. 하, 숨니취 프란즈 filed Critical 세즈 세미콘덕터-이퀴프먼트 주베회르 퓌르 디이 할블라이테르 페르티궁 게젤샤프트 엠. 베. 하
Publication of KR890008014A publication Critical patent/KR890008014A/ko
Priority to KR1019960060979A priority Critical patent/KR0120321B1/ko
Application granted granted Critical
Publication of KR970001008B1 publication Critical patent/KR970001008B1/ko
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0418—Apparatus for fluid treatment for etching
    • H10P72/0422—Apparatus for fluid treatment for etching for wet etching
    • H10P72/0424—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
KR1019880014743A 1987-11-09 1988-11-09 원판형 공작물을 지지시키기 위한 캐리어 Expired - Lifetime KR970001008B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960060979A KR0120321B1 (ko) 1987-11-09 1996-12-02 원판형 공작물 에칭장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATA2958/87 1987-11-09
AT0295887A AT389959B (de) 1987-11-09 1987-11-09 Vorrichtung zum aetzen von scheibenfoermigen gegenstaenden, insbesondere von siliziumscheiben

Publications (2)

Publication Number Publication Date
KR890008014A KR890008014A (ko) 1989-07-08
KR970001008B1 true KR970001008B1 (ko) 1997-01-25

Family

ID=3543072

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1019880014743A Expired - Lifetime KR970001008B1 (ko) 1987-11-09 1988-11-09 원판형 공작물을 지지시키기 위한 캐리어
KR1019960060979A Ceased KR0120321B1 (ko) 1987-11-09 1996-12-02 원판형 공작물 에칭장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1019960060979A Ceased KR0120321B1 (ko) 1987-11-09 1996-12-02 원판형 공작물 에칭장치

Country Status (7)

Country Link
US (1) US4903717A (enExample)
EP (2) EP0316296B1 (enExample)
JP (2) JPH01240682A (enExample)
KR (2) KR970001008B1 (enExample)
AT (3) AT389959B (enExample)
CA (1) CA1309929C (enExample)
DE (2) DE3889672D1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7350319B2 (en) 2004-09-06 2008-04-01 Samsung Electronics Co., Ltd. Clothing dryer

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* Cited by examiner, † Cited by third party
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JPH05283395A (ja) 1993-10-29
US4903717A (en) 1990-02-27
EP0444714A1 (de) 1991-09-04
KR890008014A (ko) 1989-07-08
EP0444714B1 (de) 1994-05-18
DE3889672D1 (de) 1994-06-23
AT389959B (de) 1990-02-26
JPH0514791B2 (enExample) 1993-02-25
EP0316296B1 (de) 1994-04-13
JPH01240682A (ja) 1989-09-26
ATE105972T1 (de) 1994-06-15
JPH0715150B2 (ja) 1995-02-22
ATE104470T1 (de) 1994-04-15
ATA295887A (de) 1989-07-15
DE3889073D1 (de) 1994-05-19
CA1309929C (en) 1992-11-10
EP0316296A3 (en) 1990-09-19
KR0120321B1 (ko) 1997-10-22
EP0316296A2 (de) 1989-05-17

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