JP4342331B2 - 非接触搬送装置 - Google Patents
非接触搬送装置 Download PDFInfo
- Publication number
- JP4342331B2 JP4342331B2 JP2004032476A JP2004032476A JP4342331B2 JP 4342331 B2 JP4342331 B2 JP 4342331B2 JP 2004032476 A JP2004032476 A JP 2004032476A JP 2004032476 A JP2004032476 A JP 2004032476A JP 4342331 B2 JP4342331 B2 JP 4342331B2
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- nozzle
- slit
- head
- transport head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
11 ベース板
12 搬送ヘッド
13 ボルト
14 ねじ孔
15 連通スペース
16 シール部材
17 凹部
18 気体供給面
19 気体供給孔
21 保持面
22 気体案内面
23 テーパ面
24 ノズル
24a 基部
24b 円板部
25 スリット
26 スリット形成面
27 エアポケット
31 取付孔
32 支持ブロック
33 ねじ部材
34 ねじ孔
35 ねじ部材
36 貫通孔
37 ゴム材
37a ウエーブワッシャ
38 シール部材
Claims (2)
- 気体供給孔の開口部が形成された気体供給面と、この気体供給面よりも突出した環状の保持面と、前記気体供給面から前記保持面になだらかに連なる気体案内面とが先端面に形成された搬送ヘッドと、
前記搬送ヘッドに装着される基部と、前記気体供給面に対向するとともに前記気体供給面との間で環状の気体吐出用のスリットを形成する円板部とを備えたノズルと、
前記ノズルを前記搬送ヘッドに対して軸方向に移動して前記スリットの幅を変化させるノズル移動部材とを有し、
前記円板部の外周部に前記気体供給面に対向させてシール部材を装着し、前記スリットを閉じたときに前記気体供給孔内への異物の混入を防止することを特徴とする非接触搬送装置。 - 請求項1記載の非接触搬送装置において、前記ノズル移動部材は前記ノズルに装着されて前記搬送ヘッドにねじ結合されるねじ部材であり、前記ノズルに対して前記スリットの幅を大きくする方向の弾性力を加える弾性部材を前記搬送ヘッドに設けることを特徴とする非接触搬送装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004032476A JP4342331B2 (ja) | 2004-02-09 | 2004-02-09 | 非接触搬送装置 |
PCT/JP2005/000491 WO2005076342A1 (ja) | 2004-02-09 | 2005-01-17 | 非接触搬送装置 |
US10/588,742 US7452016B2 (en) | 2004-02-09 | 2005-01-17 | Non-contact carrying device |
EP05703728A EP1715514B1 (en) | 2004-02-09 | 2005-01-17 | Non-contact carrier device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004032476A JP4342331B2 (ja) | 2004-02-09 | 2004-02-09 | 非接触搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005219922A JP2005219922A (ja) | 2005-08-18 |
JP4342331B2 true JP4342331B2 (ja) | 2009-10-14 |
Family
ID=34836090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004032476A Expired - Fee Related JP4342331B2 (ja) | 2004-02-09 | 2004-02-09 | 非接触搬送装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7452016B2 (ja) |
EP (1) | EP1715514B1 (ja) |
JP (1) | JP4342331B2 (ja) |
WO (1) | WO2005076342A1 (ja) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4491340B2 (ja) * | 2004-12-28 | 2010-06-30 | 株式会社コガネイ | 搬送装置 |
JP2007324442A (ja) * | 2006-06-02 | 2007-12-13 | Smc Corp | 非接触搬送装置 |
JP4243766B2 (ja) * | 2006-10-02 | 2009-03-25 | Smc株式会社 | 非接触搬送装置 |
KR20100022491A (ko) * | 2007-05-25 | 2010-03-02 | 코닝 인코포레이티드 | 유리 시트를 취급하기 위한 장치 |
KR100859835B1 (ko) * | 2008-05-13 | 2008-09-23 | 한국뉴매틱(주) | 비접촉식 진공패드 |
JP5239564B2 (ja) * | 2008-07-04 | 2013-07-17 | セイコーエプソン株式会社 | チャック装置および吸引保持ハンド |
DE102009051565A1 (de) * | 2009-10-22 | 2011-04-28 | Alexander Borowski | Ansaug-Greifervorrichtung für flache Substrate |
JP5384305B2 (ja) * | 2009-11-18 | 2014-01-08 | 株式会社コガネイ | ワーク搬送装置 |
DE102009059937A1 (de) * | 2009-12-22 | 2011-06-30 | Strama-MPS Maschinenbau GmbH & Co. KG, 94315 | Greifer zur nahezu berührungslosen Aufnahme von flächigen Bauteilen wie siliziumbasierte Wafer |
DE102009059936A1 (de) * | 2009-12-22 | 2011-06-30 | Strama-MPS Maschinenbau GmbH & Co. KG, 94315 | Greifer zur nahezu berührungslosen Aufnahme von flächigen Bauteilen wie siliziumbasierte Wafer |
IT1398436B1 (it) * | 2010-01-27 | 2013-02-22 | Applied Materials Inc | Dispositivo di manipolazione di substrati mediante aria compressa |
JP5198499B2 (ja) * | 2010-03-17 | 2013-05-15 | 日本特殊陶業株式会社 | 配線基板の非接触搬送装置、配線基板の製造方法 |
JP5110480B2 (ja) * | 2010-05-11 | 2012-12-26 | Smc株式会社 | 非接触搬送装置 |
JP5817043B2 (ja) * | 2010-10-29 | 2015-11-18 | 国立研究開発法人産業技術総合研究所 | ノンコンタクト搬送パッド |
JP5198550B2 (ja) * | 2010-12-23 | 2013-05-15 | 日本特殊陶業株式会社 | 配線基板の非接触搬送装置、配線基板の製造方法 |
JP5198549B2 (ja) * | 2010-12-23 | 2013-05-15 | 日本特殊陶業株式会社 | 配線基板の非接触搬送装置、配線基板の製造方法 |
CN102332420B (zh) * | 2011-05-25 | 2013-01-02 | 湖南红太阳光电科技有限公司 | 超薄伞流式非接触硅片吸盘 |
CN102794773A (zh) * | 2011-05-26 | 2012-11-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 用于抓取晶片的抓取组件和具有它的抓取装置 |
KR101190809B1 (ko) * | 2011-08-12 | 2012-10-12 | 이성일 | 정밀한 노즐 갭 유지가 가능한 비접촉 진공패드 |
JP5875294B2 (ja) * | 2011-08-29 | 2016-03-02 | 日本空圧システム株式会社 | 保持具 |
US8905680B2 (en) * | 2011-10-31 | 2014-12-09 | Masahiro Lee | Ultrathin wafer transport systems |
JP6018647B2 (ja) * | 2012-03-08 | 2016-11-02 | コーニング インコーポレイテッド | ロボットツーリング装置と案内装置を含むガラスリボン係合システム |
TWI542456B (zh) * | 2012-09-20 | 2016-07-21 | 鴻海精密工業股份有限公司 | 零件吸取裝置 |
JP6127728B2 (ja) * | 2013-05-30 | 2017-05-17 | 三星ダイヤモンド工業株式会社 | 脆性材料基板の搬送ヘッド |
JP5929947B2 (ja) * | 2014-02-28 | 2016-06-08 | 株式会社安川電機 | 吸着パッド、ロボットハンドおよびロボット |
JP5908136B1 (ja) * | 2015-03-03 | 2016-04-26 | 株式会社ハーモテック | 吸引装置 |
JP6814009B2 (ja) * | 2016-10-04 | 2021-01-13 | 株式会社ディスコ | 搬送パッド及びウエーハの搬送方法 |
JP6744630B2 (ja) * | 2016-12-16 | 2020-08-19 | 株式会社ハーモテック | 邪魔板 |
CN108735643B (zh) * | 2017-04-20 | 2020-05-15 | 上海新昇半导体科技有限公司 | 伯努利吸盘 |
US10391723B2 (en) * | 2017-08-31 | 2019-08-27 | The Boeing Company | Rotary compaction tool |
JP2022547920A (ja) * | 2019-09-10 | 2022-11-16 | アー オー フォルマフロン スイス アクチェンゲゼルシャフト | 吸引ユニット及び吸引装置 |
JP7219426B2 (ja) * | 2020-02-19 | 2023-02-08 | Smc株式会社 | 非接触搬送装置 |
JP2022112660A (ja) | 2021-01-22 | 2022-08-03 | 株式会社コガネイ | 非接触搬送装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB748138A (en) * | 1953-04-14 | 1956-04-25 | Kodak Ltd | Improved device for handling articles by suction |
DE3036829A1 (de) * | 1980-09-30 | 1982-05-13 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zum aufnehmen von kristallscheiben |
US5067762A (en) * | 1985-06-18 | 1991-11-26 | Hiroshi Akashi | Non-contact conveying device |
IT1214033B (it) * | 1987-02-03 | 1990-01-05 | Carlomagno Giovanni Maria | Procedimento e dispositivo per esercitare forze su lastre di vetro, in particolare ad elevata temperatura |
AT389959B (de) * | 1987-11-09 | 1990-02-26 | Sez Semiconduct Equip Zubehoer | Vorrichtung zum aetzen von scheibenfoermigen gegenstaenden, insbesondere von siliziumscheiben |
US5169196A (en) * | 1991-06-17 | 1992-12-08 | Safabakhsh Ali R | Non-contact pick-up head |
JPH08118280A (ja) * | 1994-10-26 | 1996-05-14 | Sony Corp | 真空ピンセット |
WO1997003456A1 (de) | 1995-07-12 | 1997-01-30 | Sez Semiconductor-Equipment Zubehör Für Die Halbleiterfertigung Gesellschaft Mbh | Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben |
JPH10181879A (ja) | 1996-12-26 | 1998-07-07 | Koganei Corp | 搬送装置 |
US6517130B1 (en) * | 2000-03-14 | 2003-02-11 | Applied Materials, Inc. | Self positioning vacuum chuck |
JP4491340B2 (ja) * | 2004-12-28 | 2010-06-30 | 株式会社コガネイ | 搬送装置 |
-
2004
- 2004-02-09 JP JP2004032476A patent/JP4342331B2/ja not_active Expired - Fee Related
-
2005
- 2005-01-17 US US10/588,742 patent/US7452016B2/en not_active Expired - Fee Related
- 2005-01-17 WO PCT/JP2005/000491 patent/WO2005076342A1/ja not_active Application Discontinuation
- 2005-01-17 EP EP05703728A patent/EP1715514B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1715514A1 (en) | 2006-10-25 |
WO2005076342A1 (ja) | 2005-08-18 |
JP2005219922A (ja) | 2005-08-18 |
EP1715514A4 (en) | 2010-07-21 |
US20070131660A1 (en) | 2007-06-14 |
US7452016B2 (en) | 2008-11-18 |
EP1715514B1 (en) | 2012-11-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4342331B2 (ja) | 非接触搬送装置 | |
US7597370B2 (en) | Carrying unit | |
CN100445049C (zh) | 真空吸头、使用该真空吸头的真空吸附装置和工作台 | |
US5067762A (en) | Non-contact conveying device | |
JP6595663B2 (ja) | ウェーハ‐ハンドリング・エンドエフェクタ | |
CN101872735A (zh) | 吸引保持装置、吸引保持方法、输送装置及输送方法 | |
JP6136084B2 (ja) | パージ装置とパージ方法 | |
JPH10181879A (ja) | 搬送装置 | |
JP4333879B2 (ja) | 非接触吸着治具及び非接触チャック装置 | |
JP2011151233A (ja) | 搬送機構 | |
TW201518641A (zh) | 氣體淨化裝置及氣體淨化方法 | |
JP2002280439A (ja) | 搬送装置 | |
TW202226437A (zh) | 基板支撐裝置 | |
JPS63225026A (ja) | 保持装置 | |
JPH11170188A (ja) | 真空吸着パッド | |
CN210113229U (zh) | 一种非接触式硅片运输装置 | |
JPH05335404A (ja) | 無接触保持装置 | |
JPS6387439A (ja) | 板状体の保持装置 | |
JPH02138044A (ja) | 板状体の保持装置 | |
KR20020077670A (ko) | 공동코어스핀들, 및 이를 포함하는 스핀, 세정 및 건조모듈 | |
JP7285677B2 (ja) | 缶搬送装置 | |
WO2023189714A1 (ja) | 拡張保持リング | |
JP4396398B2 (ja) | ベルヌーイチャック | |
JP2024070440A (ja) | 搬送パッド | |
JPS63164236A (ja) | 板状物保持装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060310 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090113 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090310 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090407 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090521 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090630 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090707 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120717 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130717 Year of fee payment: 4 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140717 Year of fee payment: 5 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |