KR960031399A - 강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법 - Google Patents

강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법 Download PDF

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KR960031399A
KR960031399A KR1019950003400A KR19950003400A KR960031399A KR 960031399 A KR960031399 A KR 960031399A KR 1019950003400 A KR1019950003400 A KR 1019950003400A KR 19950003400 A KR19950003400 A KR 19950003400A KR 960031399 A KR960031399 A KR 960031399A
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vapor deposition
manufacturing
electrical properties
ceramic vapor
improved strength
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KR1019950003400A
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KR970010354B1 (ko
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한경섭
배동식
정무수
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김은영
한국과학기술연구원
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Abstract

본 발명은 하기 식으로 표시되는 조성으로 이루어지는 TiB2-BN-AlN계의 세라믹스 증착 용기 및 그의 제조 방법에 관한 것이다.
wTlB2-xBN-yAlN-zWC
여기서, 0.60≤w≤0.70, 0.15≤x≤0.20, 0.08≤y≤0.17, 0.03≤z≤0.15인데, 다만 w+x+y=z=1이다.

Description

강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (2)

  1. 하기 식으로 표시되는 조성으로 이루어지는 특징인 TiB2-BN-AlN계의 세라믹스 증착 용기.
    wTiB2-xBN-yAlN-zWC
    여기서, 0.60≤w≤0.70, 0.15≤x≤0.20, 0.08≤y≤0.17, 0.03≤z≤0.15인데, 다만 w+x+y=z=1이다.
  2. TiB2-BN-AlN계의 세라믹스 재료에 소결 첨가제로서 WC를 가하고, 질소 분위기하에, 1800∼1950℃에서 가압 소결하는 것이 특징인 제1항 기재의 조성으로 이루어지는 세라믹스 증착 용기의 제조 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950003400A 1995-02-22 1995-02-22 강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법 KR970010354B1 (ko)

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KR1019950003400A KR970010354B1 (ko) 1995-02-22 1995-02-22 강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법

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KR1019950003400A KR970010354B1 (ko) 1995-02-22 1995-02-22 강도 및 전기적 물성이 개선된 세라믹스 증착 용기 및 그의 제조방법

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KR960031399A true KR960031399A (ko) 1996-09-17
KR970010354B1 KR970010354B1 (ko) 1997-06-25

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