KR900016068A - 질화알루미늄 소결체의 제조방법 - Google Patents

질화알루미늄 소결체의 제조방법 Download PDF

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Publication number
KR900016068A
KR900016068A KR1019900005260A KR900005260A KR900016068A KR 900016068 A KR900016068 A KR 900016068A KR 1019900005260 A KR1019900005260 A KR 1019900005260A KR 900005260 A KR900005260 A KR 900005260A KR 900016068 A KR900016068 A KR 900016068A
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KR
South Korea
Prior art keywords
metal
weight
parts
aluminum nitride
group
Prior art date
Application number
KR1019900005260A
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English (en)
Inventor
다다시 나카노
마고토 오코이
다카오 가네마루
메가데쓰야
다카시 야마무라
도시히코 후나하시
마사토 구마가이
Original Assignee
야기 야수히로
가와사키세이데쓰 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from JP1095384A external-priority patent/JPH02275770A/ja
Priority claimed from JP1095385A external-priority patent/JPH02275765A/ja
Application filed by 야기 야수히로, 가와사키세이데쓰 가부시키가이샤 filed Critical 야기 야수히로
Publication of KR900016068A publication Critical patent/KR900016068A/ko

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

내용 없음.

Description

질화알루미늄 소결체의 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (3)

  1. 질화알루미늄 분말 100중량부에 소결조제로서 (A) 잇토륨, 스캔듐, 및 탄타노이드의 산화물 무리에서 선택한 1종 또는 2종 이상을 산화물로 환산하여 0.05-5중량부, 및 (B) 금속리륨. 금속베리륨, 금속마그네슘, 붕소, 규소, 유황, 인비소 및 금속아연의 무리에서 선택한 단체의 1종 또는 2종 이상을 0.01-5중량부를 첨가하고 이 혼합분말을 성형하여 비산화성분위기속에서 1400℃-2000℃의 온도범위로 조성하는 것을 특징으로 하는 질화알루미늄 소결체의 제조방법.
  2. 질화알루미늄 분말 100중량부에 소결조제로서 (A) 잇토룸, 스캔듐 및 탄타노이드의 산화물 우리에서 선택한 1종 또는 2종 이상을 산화물로 환산하여 0.05-5중량부, (B) 금속리튬, 금속베리륨, 금속마그네슘, 붕소, 규소, 유항, 인비소 및 금속아연의 무리에서 선택한 단체의 1종 또는 2종 이상을 0.01-5중량부, 및 (C) 금속붕화물, 금속질화뭍, 금속인화물, 금속황화물, 금속규화물, 및 금속수소화물들의 무리에서 선택한 1종 또는 2종 이상을 0.01-5중량부를 첨가하고, 이 혼합분말을 형성하여 비산화성 분위기속에서 1400℃-2000℃의 온도범위로 소성하는 것을 특징으로 하는 질화알루미늄 소결체의 제조방법.
  3. 질화알루미늄분말 100중량부에 소결조제로서 (A) 잇토륨, 스캔듐, 탄타노이드의 산화물 무리에서 선택한 1종 또는 2종 이상을 산화물로 환산하여 0.05-5중량부, (B) 탄소 및 2000℃이하의 가열로 열분해하여 탄소를 생성하는 화합물에서 선택한 1종 또는 2종 이상을 탄소로 환산하여 0.01-2중량부, 및 (C) 금속붕화물, 금속질화물, 금속인화뭍, 금속황화물, 금속규화물, 및 금속수소화물의 무리에서 선택한 1종 또는 2종 이상을 0.01-5중량부를 첨가하고, 이 혼합분말을 성형하여, 비산화성 분위기속에서 1400℃-2000℃의 온도범위로 소성하는 것을 특징으로 하는 질화알루미늄 소결체의 제조방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900005260A 1989-04-17 1990-04-16 질화알루미늄 소결체의 제조방법 KR900016068A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP1095384A JPH02275770A (ja) 1989-04-17 1989-04-17 窒化アルミニウム焼結体の製造方法
JP1-95384 1989-04-17
JP1095385A JPH02275765A (ja) 1989-04-17 1989-04-17 窒化アルミニウム焼結体の製造方法
JP1-95385 1989-04-17

Publications (1)

Publication Number Publication Date
KR900016068A true KR900016068A (ko) 1990-11-12

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Application Number Title Priority Date Filing Date
KR1019900005260A KR900016068A (ko) 1989-04-17 1990-04-16 질화알루미늄 소결체의 제조방법

Country Status (3)

Country Link
EP (1) EP0393524A3 (ko)
KR (1) KR900016068A (ko)
CA (1) CA2014630A1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0881267A (ja) * 1994-09-16 1996-03-26 Toshiba Corp 窒化アルミニウム焼結体、その製造方法と窒化アルミニウム回路基板、その製造方法
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
DE19746010A1 (de) * 1997-10-17 1999-04-22 Fraunhofer Ges Forschung Verfahren zur Herstellung von drucklos gesinterten Aluminiumnitrid-Keramiken mit hoher Wärmeleitfähigkeit
US7011874B2 (en) 2000-02-08 2006-03-14 Ibiden Co., Ltd. Ceramic substrate for semiconductor production and inspection devices
US6861165B2 (en) 2000-02-24 2005-03-01 Ibiden Co., Ltd. Aluminum nitride sintered compact, ceramic substrate, ceramic heater and electrostatic chuck
JP4245125B2 (ja) * 2001-11-26 2009-03-25 日本碍子株式会社 窒化アルミニウム質セラミックス、半導体製造用部材、耐蝕性部材および導電性部材
JP4987238B2 (ja) 2005-03-25 2012-07-25 日本碍子株式会社 窒化アルミニウム焼結体、半導体製造用部材及び窒化アルミニウム焼結体の製造方法

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DE1906522B2 (de) * 1968-02-10 1972-01-13 Tokyo Shibaura Electric Co. Ltd., Kawasaki, Kanagawa (Japan) Verfahren zur herstellung eines gesinterten aluminiumnitrid yttriumoxid gegenstands
JPS5849510B2 (ja) * 1973-06-30 1983-11-04 株式会社東芝 チツカアルミニウムシヨウケツタイノ セイゾウホウホウ
JPS57181356A (en) * 1981-04-30 1982-11-08 Hitachi Ltd Sintered aluminum nitride body with high heat conductivity
DE3347862C2 (ko) * 1982-09-17 1988-05-11 Tokuyama Soda K.K., Tokuyama, Yamaguchi, Jp
US4578233A (en) * 1984-11-01 1986-03-25 General Electric Company Pressureless sintering process to produce high thermal conductivity ceramic body of aluminum nitride
US4578365A (en) * 1984-11-26 1986-03-25 General Electric Company High thermal conductivity ceramic body of aluminum nitride
JPS61201668A (ja) * 1985-03-01 1986-09-06 住友電気工業株式会社 高熱伝導窒化アルミニウム焼結体及びその製造方法
DE3627317A1 (de) * 1985-08-13 1987-02-19 Tokuyama Soda Kk Sinterbare aluminiumnitridzusammensetzung, sinterkoerper aus dieser zusammensetzung und verfahren zu seiner herstellung
JPS6241768A (ja) * 1985-08-19 1987-02-23 富士通株式会社 窒化アルミニウム焼結体の製造方法
JPS6252181A (ja) * 1985-08-31 1987-03-06 京セラ株式会社 窒化アルミニウム焼結体の製造方法
JPH0717453B2 (ja) * 1985-11-28 1995-03-01 京セラ株式会社 窒化アルミニウム質焼結体およびその製造方法
JPS62252374A (ja) * 1986-04-24 1987-11-04 株式会社村田製作所 窒化アルミニウム焼結体の製造方法
JPH0832597B2 (ja) * 1986-11-21 1996-03-29 住友電気工業株式会社 窒化アルミニウム焼結体の製造方法
US4778778A (en) * 1987-06-03 1988-10-18 Keramont Advanced Ceramic Products Corporation Process for the production of sintered aluminum nitrides
JPH01115856A (ja) * 1987-10-27 1989-05-09 Hitachi Metals Ltd セラミック抵抗体の製造方法
DE3737638A1 (de) * 1987-11-06 1989-05-18 Bayer Ag Keramische koerper, verfahren zu ihrer herstellung und deren verwendung

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EP0393524A3 (en) 1993-02-10
CA2014630A1 (en) 1990-10-17
EP0393524A2 (en) 1990-10-24

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