KR960011891A - 광학적정보기록매체의 제조방법 및 제조장치 - Google Patents

광학적정보기록매체의 제조방법 및 제조장치 Download PDF

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Publication number
KR960011891A
KR960011891A KR1019950032023A KR19950032023A KR960011891A KR 960011891 A KR960011891 A KR 960011891A KR 1019950032023 A KR1019950032023 A KR 1019950032023A KR 19950032023 A KR19950032023 A KR 19950032023A KR 960011891 A KR960011891 A KR 960011891A
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KR
South Korea
Prior art keywords
recording medium
information recording
optical information
manufacturing
optical
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KR1019950032023A
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English (en)
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KR100218211B1 (ko
Inventor
노보루 야마다
카츠미 카와라
시게아키 후루카와
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시기가이샤
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Publication of KR960011891A publication Critical patent/KR960011891A/ko
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Publication of KR100218211B1 publication Critical patent/KR100218211B1/ko

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Abstract

본 발명은, 레이저광선 등의 에너지빔조사에 의해서 광학적특성의 가역적변화를 발생하는 제료박막(1)을 기판(2)상에 구비한 상변화형 광학적정보기록매체(3)의 제조방법 및 제조장치에 관한 것이다. 초기결정화공정을 플래시광원(7)으로부터의 조사광원(4)에 의해 행할때, 소정의 시간 발광시킨 후에는 순간에 발광강도를 실질적으로 0레벨까지 강하시키는 수단(차단회로부(10)을 구비함으로써 큰 조사파워와 짧은 조사시간을 양립시키고, 여러가지의 열피해를 저감시킨다.이 방법에서는, 쓸데없는 전기에너지를 소비하지 않으므로 다음의 방전발광을 위한 전기에너지의 충전완료시간을 단축할 수 있다. 또, 인가전압과 충전전압과의 차를 크게 유지하는 수단(축적회로부(8), 트리거회로(9)를 구비함으로써 충전완료시간을 한층 단축할 수 있고 ,초기화공정의 처리 속도를 높일 수 있다. 또, 특히 단일판구성의 광학적정보기록부재의 제조공정에서는, 수지보호층의 형성공정 혹은 기록박막초기화공정과 조합해서 어닐링공정을 부가함으로써, 자외선경화수지층이나 기록박막층의 수축에 기인하는 매체의 휘어짐이나 비뚤어짐을 저감하고, 혹은 교정할 수 있고,서보특성이 뛰어난 광학적정보기록매체를 얻을 수 있다. 또, 휘어짐이나 비뚤어짐을 발생하기 어려운 양면형의 광학적정보기록매체의 구성방법으로서, 접착하는 2매의 매체의 한쪽을 적어도 3% 이상의 자외광선이 투과하도록 구성함으로써, 자외선경화수지를 접착제로 할 수 있고, 그 결과 제조공정을 간략화할 수 있다.

Description

광학적정보기록매체의 제조방법 및 제조장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 초기화방법에 적용되는 차단회로를 구비한 초기화장치의 일실시예에 있어서의 주요구성을 표시한 도면,
제9도는 본 발명의 광학적정보기록매체의 제조방법의 일실시예의 공정도.

Claims (36)

  1. 결정-비정질간의 상변화를 발생하는 기록박막층을 기판상에 구비한 광학적정보기록매체에 플래시광을 조사하고, 상기 기록박막의 소정의 부분을 일괄해서 초기상태인 결정상태로 전환하는 방법에 있어서, 상기 광학적정보기록매체를 소정의 위치에 지지하는 공정과, 플래시광원에 공급하는 전기에너지를 축적회로부에 충전하는 공정과, 상기 플래시광원에 트리거를 동작시켜서 발광을 개시시키는 공정과, 상기 발광을 소정의 시간 계속시킨 후, 상기 플래시광원에 접속된 차단회로부를 작동시키고, 상기 방전을 강제적으로 순간에 종료시켜서 발광강도를 실질적으로 0레벨까지 강하시키는 공정을 구비한 것을 특징으로 하는 광학적정보기록매체의 초기화방법.
  2. 제1항에 있어서, 방전시간을 최대 2ms로 한 것을 특징으로 하는 광학적정보기록매체의 초기화방법.
  3. 제1항에 있어서, 기록박막층을 Ge-Sb-Te 합금을 주성분으로 하는 박막으로 한 것을 특징으로 하는 광학적 정보기록매체 초기화방법.
  4. 결정-비정질간의 상변화를 발생하는 기록박막층을 기판상에 구비한 광학적정보기록매체에 플래시광을 조사하고 상기 기록박막의 소정의 부분을 일괄해서 초기상태인 결정상태로 전환하는 방법에 있어서, 상기 광학적정보기록매체를 지지하는 지지대와, 방전에 의해 플래시광을 방출하는 광원과, 상기 광원에 공급하는 전기 에너지를 축적해두는 축적회로부와 상기 광원의 방전을 개시시키기위한 트리거회로부와, 상기 방전을 소정의 발광시간후에 강제적으로 중단하고, 발광의 강도를 소정의 강도로부터 실효적으로 0레벨까지 순간에 저감시키는 차단회로부를 구비한 것을 특징으로하는 광학적정보기록매체의 초기화장치.
  5. 결정상태와 비정질상태의 사이에서 상변화를 발생하는 기록박막을 기판상에 구비한 광학적기록매체에 플래시광을 조사하고, 상기 기록박막의 소정의 영역을 일괄해서 초기상태인 결정상태로 전환하는 장치에 있어서, 상기 광학적 기록매체를 지지하는 수단과, 방전에 의해 플래시광을 조사하는 광원과, 이 광원에 공급하는 에너지를 축적해두는 축적수단과, 이 축적수단에 에너지를 보내는 공급수단과, 상기 광원의 방전을 개시시키기 위한 방전개시수단과, 상기 축적수단에는 축적된 에너지량을 검출하는 축적량검출수단과, 상기 공급수단에는 에너지를 공급하는 양을 설정하는 공급량설정수단과, 상기 축적량검출수단에 의해서 검출한 검출량에 따라서, 상기 공급량설정수단에 의해서 설정하는 공급량을 상기 축적수단의 에너지의 도달량 또는 도달량의 규정치의 어느 하나보다도 크게 되도록 상기 공급수단을 제어하고,상기 축적수단의 에너지량이 소정의 값에 도달했을때에, 상기 공급수단으로부터 상기 축적수단으로의 에너지의 공급을 차단하는 절환수단에 의해 차단하고, 방전개시수단에 의해 광원을 발광시키도록 제어하는 제어수단을 구비한 것을 특징으로 하는 광학적기록매체의 초기화장치.
  6. 제5항에 있어서, 공급수단의 에너지공급량 및 축적수단의 에너지축적량을 전압치에 의해서 검지하고, 상기 축적수단의 축적완료시의 전압치보다도, 상기 공급수단의 전압치의 쪽을 높게 하는 것을 특징으로 하는 광학적기록매체의 초기화장치.
  7. 제5항에 있어서, 공급수단의 에너지공급량 및 축적수단의 에너지축적량을 전압치에 의해서 검지하고, 상기 공급수단의 전압치와 상기 축적수단의 도달전압치와의 차가 대략 일정한 것을 특징으로 하는 광학적기록매체의 초기화장치.
  8. 기판상에 결정-비정질간의 상변화를 발생하는 기록박막층을 포함한 다층구성의 기록층과, 상기 기록층의 상층에 자외선경화수지를 함유하는 경화피막의 보호층을 포함한 구조의 광학적기록부재의 제조방법에 있어서, 상기 자외선경화수지막을 형성한 후, 상기 광학적기록부재의 상기 기록층 및 상기 보호층을 형성한 기판면과 대향하는 기판면에, 교정력을 가하면서 자외광선의 조사를 행하는 자외선조사공정과, 상기 자외선조사공정 종료후에 행하는 초기결정화공정을 구비하고 있는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  9. 제8항에 있어서, 자외광조사공정과 초기화공정과의 사이에, 광학적기록매체를 가열하는 어닐링공정을 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  10. 제9항에 있어서, 어닐링공정을, 교정력을 인가한 상태에서 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  11. 제9항 또는 제10항의 어느 한 항에 있어서, 어닐링공정의 열원이, 적외광램프의 조사인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  12. 제8항에 있어서, 초기화공정을 교정력을 가한 상태에서 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  13. 제8항, 제9항 또는 제12항에 있어서, 초기화공정을 플래시광조사에 의해 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  14. 기판상에 결정-비정질간의 상변화를 발생하는 기록박막층을 구비하고, 또한 최상층에 자외선경화수지를 포함하는 경황성수지를 경화시킨 보호층을 구비한 광학적정보기록매체의 제조방법에 있어서, 초기결정화공정을 종료한 후, 어닐링공정을 실시해서 상기 보호층을 완전경화하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  15. 제14항에 있어서, 광학적정보기록매체가 기판의 위에, 제1유전체층, 기록박막층, 제2유전체층,반사층을 적층하고, 최상층에 형성해서 구성되어 있는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  16. 제14항 또는 제15항에 있어서, 기록박막층이 Ge-Sb-Te를 주성분으로 하는 합금박막인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  17. 제14항에 있어서, 어닐링공정에 있어서, 광학적정보기록매체를 휘어짐이 없는 상태로 교정하는 처리 또는 휘어짐을 교정하는 방향으로 외력을 부여하는 처리를 행하는 것을 특징으로 하는 광학적 정보기록매체의 제조방법.
  18. 제14항 또는 제17항에 있어서, 어닐링공정에 있어서, 디스크형상을 가진 광학적정보기록매체의 외경보다 약간 작은 직경의 구멍을 가진 받침대의 위에 상기 광학적정보기록매체의 외주부가 지지되도록, 또한 상기 광학적정보기록매체의 중심과 상기 구멍과의 중심을 맞춘 상태에서, 상기 광학적정보기록매체의 볼록면이 위가 되도록 상기 광학적정보기록매체를 유지하고,상기 광학적정보기록매체의 반대방향으로 볼록하게, 또는 평탄해지도록, 상기 광학적정보기록매체의 센터부에 가중하고, 또는 센터부를 고정하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  19. 제14항 또는 제17항에 있어서, 어닐링공정에서 교정처리를 행하고, 기판면 또는 보호층면의 적어도 어느 한쪽의 면을 평활한 면위에 엎어높은 상태로 방치하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  20. 제14항 또는 제17항에 있어서, 어닐링공정에서 교정처리를 행하고, 기판면 또는 보호층면의 최내주부 또는 최외주부의 적어도 어느 1개를, 평탄한 면을 가진 물체에 압압하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  21. 제14항, 제19항 또는 제20항에 있어서, 평탄한 면이 어닐링공정의 온도이상의 내열성을 가진 물체의 일면이고, 미리 소정의 온도로 가열한 상기 물체의 평탄면 위에 광학적정보기록매체를 놓은 것을 특징으로하는 광학적정보기록매체의 제조방법.
  22. 제14항, 제17항 또는 제20항에 있어서, 어닐링공정에서 교정처리를 행하고, 단일판구조의 광학적정보기록매체를 복수매겹쳐 쌓은 상태에서 양쪽으로 부터 힘을 가하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  23. 제14항 또는 제17항~제22항의 어느 한 항에 있어서, 어닐링공정의 온도가 기록박막층의 상변화가 발생하는 온도이하인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  24. 제23항에 있어서, 어닐링공정의 온도가 100℃이하인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  25. 제14항에 있어서, 초기결정화공정을 플래시노광에 의해 행하는 것을 특징으로하는 광학적정보기록매체의 제조방법.
  26. 레이저광선의 조사에 의해서 광학적으로 검출가능한 변화를 발생하는 기록박막층 및 금속반사층을 포함한 다층구조막을 투명기판상에 구비한 광학적기록부재를 2매 맞붙인 광학적정보기록매체에 있어서, 상기 2매의 광학적정보기록부재를, 상기 다층구조막이 안쪽이 되도록 대향시키고, 자외선에 감응해서 경화하는 성분을 함유하는 수지를 개재해서 상기 2매의 광학적정보기록부재를 맞붙이고, 상기 2개의 광학적기록부재중의 적어도 한쪽이, 상기 수지의 자외선감응파장영역에 있어서 대략 3% 이상의 투과율을 가진 것을 특징으로 하는 광학적정보기록매체.
  27. 제26항에 있어서, 상기 기록박막층은, 비정질상-결정상간의 상변화현상에 따른 광학적특성의 변화를 응용하는 것으로서, 상기 2매의 광학적기록부채중의 적어도 한쪽의 기록박막층이 비정질상태일 경우에는, 수지의 자외선감응파장영역에 있어서, 대략 3%이상의 투과율을 가진 것을 특징으로 하는 광학적정보기록매체.
  28. 제26항에 있어서, 금속반사층이 Au를 주성분으로 하는 합금 Au100xMx(M은 금속원소, 100>x≥0)인 것을 특징으로 하는 광학적정보기록매체.
  29. 투명기판상에, 레이저광선의 조사에 의해서 광학적으로 검출가능한 변화를 발생하는 기록박막층 및 금속반사층을 포함한 다층구조막을 구비해서 이루어진 2매의 광학적기록부재를, 자외선감응경화성분을 함유하는 수지를 사용해서 맞붙이는 공정을 가진 제조방법에 있어서, 상기 2매의 광학적기록부재의 적어도 한쪽의 상기 다층구조막에 대해서 상기 수지의 자외선감응파장영역에 있어서 대략 3%이상의 투과율을 가진 막을 형성하는 성막공적과, 상기 2매의 광학적기록부재를 서로 상기 다층구조막이 형성된 면이 마주보도록 배치하는 배치공정과, 상기 대향하는 다층구조막간의 공간에 상기 수지를 충전하는 충전공정과, 자외광의 노광에 의해서 상기 수지를 경화시키는 노광공정을 구비한 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  30. 제29항에 있어서, 상기 노광을 광학적기록부재의 양쪽의 면으로부터 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  31. 제29항 또는 제30항에 있어서, 노광공정후, 광학적정보기록매체에 에너지선을 조사해서 초기화를 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  32. 제31항에 있어서, 상기 에너지선이 레이저빔인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  33. 제31항에 있어서, 상기 에너지선이 플래시광인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  34. 제26항에 있어서, 상기 2매의 광학적기록부재중의 적어도 한쪽이 재생전용타입인 것을 특징으로 하는 것을 특징으로 하는 광학적정보기록매체.
  35. 제29항에 있어서, 상기 2매의 광학적기록부재중의 적어도 한쪽이 재생전용 타입인 것을 특징으로 하는 광학적정보기록매체의 제조방법.
  36. 제8항에 있어서, 상기 광학적정보기록매체를, 그 자체의 무게에 의해서 휘어짐이 교정되는 방향으로 배치해서 자외선의 조사를 행하는 것을 특징으로 하는 광학적정보기록매체의 제조방법.
    ※참고사항 : 최초출원 내용에 의하여 공개하는 것임.
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