KR950005390A - 제진장치 - Google Patents

제진장치 Download PDF

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Publication number
KR950005390A
KR950005390A KR1019930030761A KR930030761A KR950005390A KR 950005390 A KR950005390 A KR 950005390A KR 1019930030761 A KR1019930030761 A KR 1019930030761A KR 930030761 A KR930030761 A KR 930030761A KR 950005390 A KR950005390 A KR 950005390A
Authority
KR
South Korea
Prior art keywords
jet nozzle
nozzle
disposed
suction
chamber
Prior art date
Application number
KR1019930030761A
Other languages
English (en)
Other versions
KR970009001B1 (ko
Inventor
히로시 우자와
순지 하야시
Original Assignee
구마자키 다다시
가부시키가이샤 신코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 구마자키 다다시, 가부시키가이샤 신코 filed Critical 구마자키 다다시
Publication of KR950005390A publication Critical patent/KR950005390A/ko
Application granted granted Critical
Publication of KR970009001B1 publication Critical patent/KR970009001B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023—Cleaning travelling work
    • B08B5/026—Cleaning moving webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action

Landscapes

  • Cleaning In General (AREA)

Abstract

워크에 부착한 먼지를 제거하는 세정효과에 우수하며 또한 소음을 저감할 수 있는 제진장치를 제공한다.
에어배출실(2)과 에어흡입실(3)과를 가지는 케이싱(4)의 하면측에 상호로 접근하는 방향으로 초음파에어를 분출하는 제1 분출노즐(11)과 제2 분출노즐(12)을 설치한다.
또한 제1 분출노즐(11)과 제2 분출노즐(12)의 사이에 흡인노즐(9)을 배설한다.
제1 분출노즐(11)과 제2 분출노즐(12)과 제2 분출노즐(12)과 워크(W) 표면과의 사이에, 합류난류공실(16)을 형성한다.
흡인노즐(9)의 개구부를 가지는 벽면(17, 17)을 측면에서 보는데 있어서 뒷쪽으로 호상으로 만곡하는 오목면(24)으로 형성한다. 오목면(24)의 상류측 끝가장자리에 제1 분출노즐(11)을 배설하고 또한 오목면(24)의 하류측 끝가장자리에 제2 분출노즐(12)을 배설한다.

Description

제진장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (5)

  1. 서로 접근하는 방향으로 초음파에어(E1, E2)를 분출하는 제1 분출노즐(11)과 제2 분출노즐(12)을 설치하는 동시에 그 제1 분출노즐(11)과 제2 분출노즐(12)의 사이에 흡인노즐(9)을 배설한 것을 특징으로 하는 제진장치.
  2. 제1항에 있어서, 제1 분출노즐(11)과 제2 분출노즐(12)과 워크(W) 표면과의 합류난류공실(16)을 형성한 것을 특징으로 하는 제진장치.
  3. 제1항에 있어서, 흡인노즐(9)의 개구부를 가지는 벽면(17, 17)을 측면에서 보아 윗쪽으로 호상으로 만곡하는 오목면(24)으로 형성한 것을 특징으로 하는 제진장치.
  4. 제3항에 있어서, 오목면(24)의 상류측 끝가장자리에 제1 분출노즐(11)을 배설하고 또한 오목면(24)의 하류측 끝가장자리에 제2 분출노즐(12)을 배설한 것을 특징으로 하는 제진장치.
  5. 제1항에 있어서, 제1 분출노즐(11)과 제2 분출노즐(12)과 흡인노즐(9)과를 에어배출실(2)과 에어흡입실(3)과를 가지는 케이싱(4)의 하면측에 배설한 것을 특징으로 하는 제진장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930030761A 1993-08-31 1993-12-29 제진장치 KR970009001B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP93-240672 1993-08-31
JP5240672A JP2820599B2 (ja) 1993-08-31 1993-08-31 除塵装置

Publications (2)

Publication Number Publication Date
KR950005390A true KR950005390A (ko) 1995-03-20
KR970009001B1 KR970009001B1 (ko) 1997-06-03

Family

ID=17062992

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930030761A KR970009001B1 (ko) 1993-08-31 1993-12-29 제진장치

Country Status (6)

Country Link
US (1) US5457847A (ko)
EP (1) EP0640411B1 (ko)
JP (1) JP2820599B2 (ko)
KR (1) KR970009001B1 (ko)
DE (1) DE69409314T2 (ko)
TW (1) TW231974B (ko)

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JP4045483B2 (ja) 2002-03-13 2008-02-13 フジノン株式会社 ピント状態検出装置
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CN103341405B (zh) * 2013-07-24 2015-09-09 深圳市华星光电技术有限公司 玻璃基板的清洗方法及实现该方法的装置
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Also Published As

Publication number Publication date
EP0640411B1 (en) 1998-04-01
TW231974B (en) 1994-10-11
DE69409314T2 (de) 1998-09-03
US5457847A (en) 1995-10-17
DE69409314D1 (de) 1998-05-07
JPH0760211A (ja) 1995-03-07
KR970009001B1 (ko) 1997-06-03
JP2820599B2 (ja) 1998-11-05
EP0640411A1 (en) 1995-03-01

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