KR940022054A - 3차원 측정용프로우브 - Google Patents

3차원 측정용프로우브 Download PDF

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Publication number
KR940022054A
KR940022054A KR1019940004639A KR19940004639A KR940022054A KR 940022054 A KR940022054 A KR 940022054A KR 1019940004639 A KR1019940004639 A KR 1019940004639A KR 19940004639 A KR19940004639 A KR 19940004639A KR 940022054 A KR940022054 A KR 940022054A
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KR
South Korea
Prior art keywords
measuring
movable portion
coordinate
movable
measurement
Prior art date
Application number
KR1019940004639A
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English (en)
Other versions
KR0146261B1 (ko
Inventor
케이이치 요시즈미
케이시 쿠보
Original Assignee
모리시타 요이찌
마쯔시다덴기산교 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12941277&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR940022054(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 모리시타 요이찌, 마쯔시다덴기산교 가부시기가이샤 filed Critical 모리시타 요이찌
Publication of KR940022054A publication Critical patent/KR940022054A/ko
Application granted granted Critical
Publication of KR0146261B1 publication Critical patent/KR0146261B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

본 발명은 비구면렌즈등의 자유곡면의 형상측정,면조도나 단차(段差)의 형상 측정등을 고정밀도로 저측정압(低測定壓)으로 측정할 수 있는 3차원측정용프로우브를 제공하는 것을 목적으로 한것이며, 그 구성에 있어서, 에어베어링으로 구성된 Z좌표 방향으로 이동가능한 접동부를 가진 가동부의 Z방향끝부분에 장착된 스타일러스와 이 가동부의 Z좌표를 측정하는 수단을르 가지므로서, 정밀도좋게, 측정면의 Z좌표를 측정할 수 있는 것을 특징으로 한 것이다.

Description

3차원 측정용프로우브
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 프로우브를 포함한 측정기의 구성도.

Claims (4)

  1. 에어베어링으로 구성된 Z좌표방향으로 이동가능한 접동부를 가진 가동부의 Z방향 끝부분에 장착된 스타일러스와 이가동부의 Z좌표를 측정하는 측정수단을 구비한것을 특징으로 하는 3차원 측정용프로우브.
  2. 제1항에 있어서, 상기 가동부 A의 Z방향의 이동량을 규제하는 스프링을 가진 것을 특징으로 하는 3차원측정용프로우브.
  3. 제1항에 있어서, 상기 가동부 A의 Z좌표에 측정수단은, 가동부 A의 타단부에 부착된 미러면과 이 미러면에 광을 조사하여, 반사광으로부터 미러면의 위치를 측정하는 것을 특징으로 하는 3차원측정용프로우브.
  4. 제1항에 있어서, 상기 가동부 A와 상기 에어베어링으로 연결된 가동부 B와의 상대위치를 측정하는 상대위치측정수단과, 상기 스타일러스가 측정면을 주사하고, 측정면의 Z좌표의 변화에 따라서 Z방향으로 움직일 때, 이 상대위치측정수단으로부터 얻어진 가동부 A와 가동부 B의 상대위치가 거의 일정하게 되도록 상기 가동부 B을 Z방향으로 구동하는 구동수단을 구비한것을 특징으로 하는 3차원측정용 프로우브.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019940004639A 1993-03-15 1994-03-10 3차원측정용프로우브 KR0146261B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5053382A JP3000819B2 (ja) 1993-03-15 1993-03-15 三次元測定用プローブ及び形状測定方法
JP93-53382 1993-03-15

Publications (2)

Publication Number Publication Date
KR940022054A true KR940022054A (ko) 1994-10-20
KR0146261B1 KR0146261B1 (ko) 1998-08-17

Family

ID=12941277

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940004639A KR0146261B1 (ko) 1993-03-15 1994-03-10 3차원측정용프로우브

Country Status (4)

Country Link
US (1) US5455677A (ko)
JP (1) JP3000819B2 (ko)
KR (1) KR0146261B1 (ko)
CN (1) CN1047439C (ko)

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JP3075981B2 (ja) * 1996-04-05 2000-08-14 松下電器産業株式会社 形状測定装置
NO303595B1 (no) * 1996-07-22 1998-08-03 Metronor Asa System og fremgangsmÕte for bestemmelse av romlige koordinater
WO2001029504A1 (de) * 1999-10-18 2001-04-26 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensor zum berührenden vermessen von materialien
JP4794753B2 (ja) * 2001-06-04 2011-10-19 パナソニック株式会社 形状測定方法
US6952256B2 (en) * 2002-08-30 2005-10-04 Kla-Tencor Technologies Corporation Optical compensation in high numerical aperture photomask inspection systems for inspecting photomasks through thick pellicles
JP4436665B2 (ja) 2003-12-24 2010-03-24 パナソニック株式会社 測定用プローブ及び形状測定方法
US7208724B2 (en) * 2004-11-03 2007-04-24 Omniprobe, Inc. Apparatus and method of detecting probe tip contact with a surface
JP4291849B2 (ja) 2006-12-20 2009-07-08 パナソニック株式会社 三次元測定プローブ
JP2007114217A (ja) * 2007-02-05 2007-05-10 Hoya Corp レンズ形状または成形面形状の測定方法
JP4474443B2 (ja) * 2007-07-17 2010-06-02 キヤノン株式会社 形状測定装置および方法
GB0821015D0 (en) * 2008-11-18 2008-12-24 Univ Cranfield Apparatus and method
JP5371532B2 (ja) * 2009-04-23 2013-12-18 株式会社ミツトヨ 三次元測定機
JP2011080978A (ja) 2009-09-08 2011-04-21 Canon Inc 測定装置
CN101758424B (zh) * 2009-12-22 2011-06-15 河北科技大学 一种金属曲面数控测量头
JP5143931B2 (ja) * 2010-09-09 2013-02-13 パナソニック株式会社 三次元形状測定装置
JP5945788B2 (ja) * 2014-05-29 2016-07-05 パナソニックＩｐマネジメント株式会社 三次元形状測定装置
CN105783772B (zh) * 2016-03-07 2018-06-26 合肥工业大学 单传感器式三维微纳米接触触发测量探头
CN107152912B (zh) * 2017-06-28 2019-10-01 深圳华清精密科技有限公司 一种光学触发测头及测量方法
JP6969459B2 (ja) * 2018-03-15 2021-11-24 オムロン株式会社 センサヘッド
JP6799815B2 (ja) 2018-05-21 2020-12-16 パナソニックＩｐマネジメント株式会社 形状測定用プローブ
JP7340761B2 (ja) 2019-10-28 2023-09-08 パナソニックＩｐマネジメント株式会社 測定用プローブ
CN111267339B (zh) 2020-02-28 2020-09-29 上海复志信息技术有限公司 一种3d打印机喷嘴高度的调整方法

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US4153370A (en) * 1977-12-05 1979-05-08 The United States Of America As Represented By The United States Department Of Energy Microinterferometer transducer
US4611916A (en) * 1984-05-11 1986-09-16 Matsushita Electric Industrial Co., Ltd. Optical measuring apparatus
JPS6150007A (ja) * 1984-08-18 1986-03-12 Mitsutoyo Mfg Co Ltd 表面形状測定用トレ−サ
JPS629211A (ja) * 1985-07-05 1987-01-17 Matsushita Electric Ind Co Ltd 光学測定装置
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JP2661314B2 (ja) * 1990-03-07 1997-10-08 松下電器産業株式会社 形状測定装置及び形状測定方法

Also Published As

Publication number Publication date
CN1047439C (zh) 1999-12-15
US5455677A (en) 1995-10-03
JP3000819B2 (ja) 2000-01-17
KR0146261B1 (ko) 1998-08-17
CN1099129A (zh) 1995-02-22
JPH06265340A (ja) 1994-09-20

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