ES2099883T3 - Procedimiento para la medicion de alta resolucion de posiciones lineales y de giro. - Google Patents

Procedimiento para la medicion de alta resolucion de posiciones lineales y de giro.

Info

Publication number
ES2099883T3
ES2099883T3 ES93118089T ES93118089T ES2099883T3 ES 2099883 T3 ES2099883 T3 ES 2099883T3 ES 93118089 T ES93118089 T ES 93118089T ES 93118089 T ES93118089 T ES 93118089T ES 2099883 T3 ES2099883 T3 ES 2099883T3
Authority
ES
Spain
Prior art keywords
procedure
linear
high resolution
resolution measurement
turn positions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93118089T
Other languages
English (en)
Inventor
Fritz Dettmann
Uwe Loreit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marzhauser Wetzlar GmbH and Co KG
Original Assignee
Marzhauser Wetzlar GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marzhauser Wetzlar GmbH and Co KG filed Critical Marzhauser Wetzlar GmbH and Co KG
Application granted granted Critical
Publication of ES2099883T3 publication Critical patent/ES2099883T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24428Error prevention
    • G01D5/24433Error prevention by mechanical means
    • G01D5/24438Special design of the sensing element or scale
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471Error correction
    • G01D5/24476Signal processing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Optical Transform (AREA)

Abstract

LA INVENCION SE REFIERE A UN METODO PARA LA MEDICION DE LA POSICION CON UNA ESCALA PERIODICA Y CON UN SENSOR MOVIL EN DIRECCION LONGITUDINAL OPUESTA, QUE SIRVE PARA LA DETERMINACION PRECISA DE DISTANCIAS Y POSICIONES EN LINEAS RECTAS O SOBRE LINEAS CURVAS, POR EJEMPLO, CIRCUNFERENCIAS. SEMEJANTES MEDICIONES SON NECESARIAS EN MEDIDA CRECIENTE EN LA CONSTRUCCION DE MAQUINAS, EN LA TECNICA DE MECANICA DE PRECISION O EN LA TECNOLOGIA DE LOS ELEMENTOS SEMICONDUCTORES.
ES93118089T 1992-11-06 1993-11-08 Procedimiento para la medicion de alta resolucion de posiciones lineales y de giro. Expired - Lifetime ES2099883T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4237540A DE4237540C2 (de) 1992-11-06 1992-11-06 Verfahren zur hochauflösenden Messung von Linear- und Drehpositionen

Publications (1)

Publication Number Publication Date
ES2099883T3 true ES2099883T3 (es) 1997-06-01

Family

ID=6472294

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93118089T Expired - Lifetime ES2099883T3 (es) 1992-11-06 1993-11-08 Procedimiento para la medicion de alta resolucion de posiciones lineales y de giro.

Country Status (5)

Country Link
EP (1) EP0596535B1 (es)
AT (1) ATE151867T1 (es)
DE (2) DE4237540C2 (es)
DK (1) DK0596535T3 (es)
ES (1) ES2099883T3 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648335C2 (de) * 1996-11-22 2000-05-25 Daimler Chrysler Ag Anordnung zur Positionsmessung
DE10011289A1 (de) * 2000-03-08 2001-09-20 Sven Harzbecker Vorrichtung zur Reinigung der Haut
ATE302937T1 (de) 2000-06-16 2005-09-15 Amo Automatisierung Messtechni Induktives längenmesssystem
DE10041089A1 (de) * 2000-08-22 2002-03-07 Bosch Gmbh Robert Verfahren zur Korrektur einer Winkelmessung
DE10158942B4 (de) * 2000-12-08 2006-05-04 Micro-Epsilon Messtechnik Gmbh & Co Kg Vorrichtung und Verfahren zur Detektion der Position eines Messobjekts
EP1366849B1 (de) 2002-05-27 2005-07-27 Schneeberger Holding AG Linearführungssystem
CN101192412B (zh) * 2006-12-01 2010-10-13 上海平信机电制造有限公司 粗节距的激光接长录磁载体及其录磁方法
US9766095B2 (en) 2013-04-23 2017-09-19 Mitsubishi Electric Corporation Magnetic position detection device and magnetic position detection method
DE102017121524B4 (de) * 2017-09-15 2019-12-24 Bogen Electronic Gmbh Messanordnung

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT339062B (de) * 1975-11-11 1977-09-26 Rieder Heinz Verfahren zur langenmessung
DE3325353A1 (de) 1983-07-14 1985-01-24 Honeywell Gmbh Positionssensor
US4725776A (en) * 1984-01-25 1988-02-16 Matsushita Electric Industry Co., Ltd. Magnetic position detector using a thin film magnetoresistor element inclined relative to a moving object
DE3611469A1 (de) * 1986-04-05 1987-10-08 Bosch Gmbh Robert Vorrichtung und verfahren zur beruehrungslosen positionsmessung
DE3612145A1 (de) * 1986-04-10 1987-10-15 Ralf Hinkel Verfahren zur kantendetektierung
DD250369A1 (de) * 1986-06-27 1987-10-08 Werkzeugmasch Forschzent Einrichtung zur positionsmessung
JPH02264818A (ja) * 1989-04-05 1990-10-29 Seiko Epson Corp 磁気エンコーダー
DE4017954C1 (es) * 1990-06-05 1991-08-29 Pav Praezisions-Apparatebau Ag, Vaduz, Li
DE4017898A1 (de) * 1990-06-02 1991-12-05 Hengstler Gmbh Optisches abtastsystem fuer dreh- oder linear-impulsgeber
DE4203073C2 (de) * 1992-02-04 1994-12-15 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung

Also Published As

Publication number Publication date
DE59306176D1 (de) 1997-05-22
DE4237540A1 (de) 1994-05-11
EP0596535B1 (de) 1997-04-16
EP0596535A2 (de) 1994-05-11
EP0596535A3 (en) 1994-09-07
ATE151867T1 (de) 1997-05-15
DE4237540C2 (de) 1996-02-29
DK0596535T3 (da) 1997-05-12

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