KR940016526A - 반도체 세정방법 및 세정용액 - Google Patents
반도체 세정방법 및 세정용액 Download PDFInfo
- Publication number
- KR940016526A KR940016526A KR1019920025455A KR920025455A KR940016526A KR 940016526 A KR940016526 A KR 940016526A KR 1019920025455 A KR1019920025455 A KR 1019920025455A KR 920025455 A KR920025455 A KR 920025455A KR 940016526 A KR940016526 A KR 940016526A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor
- cleaning
- solution
- cleaning tank
- ions
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G3/00—Compounds of copper
- C01G3/04—Halides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Inorganic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
본 발명은 64M 디램급에서 요구하는 109atoms/㎠의 금속이온 특히 Cu 이온을 제어할 수 있게 하며, HF+H2O2용액에서 발행하는 파티클(particle) 문제 및 불순물 문제를 해결하기 위한 반도체 세정방법으로서, HF 용액이 든 세정조에 N2버브링방식과 동일하게 구멍 뚫린 석영관을 삽입한 후 원하는 양의 O3을 공급하여 HF+O2세정액으로 세정하는 방법이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (2)
- HF 용액을 담은 세정조에 뚫린 석영관을 통하여 소정량의 O3을 세정조내에 공급하면서 반도체를 세정조에 놓어 세정하는 반도체 세정방법.
- 세정액을 넣은 세정조에 반도체를 넣어서 반도체표면에 있는 Cu 금속이온을 제거하는 반도체 세정방법에 있어서, O3를 공급하여 발생기산소가 생성되고, Cu와 반응하여 CuO를 생성시키고, 생성된 CuO에 2 HF가 반응하여 CuF2와 H2O가 되게 하므로써 Cu 이온을 제거하는 것이 특징인 반도체 세정방법.참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019920025455A KR960002763B1 (ko) | 1992-12-24 | 1992-12-24 | 반도체 세정방법 및 세정용액 |
DE4340589A DE4340589A1 (de) | 1992-12-24 | 1993-11-29 | Verfahren zur Reinigung von Halbleiterbauelementen |
JP5321478A JPH076993A (ja) | 1992-12-24 | 1993-12-21 | 半導体素子の洗浄方法 |
US08/172,463 US5567244A (en) | 1992-12-24 | 1993-12-23 | Process for cleaning semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019920025455A KR960002763B1 (ko) | 1992-12-24 | 1992-12-24 | 반도체 세정방법 및 세정용액 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940016526A true KR940016526A (ko) | 1994-07-23 |
KR960002763B1 KR960002763B1 (ko) | 1996-02-26 |
Family
ID=19346630
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920025455A KR960002763B1 (ko) | 1992-12-24 | 1992-12-24 | 반도체 세정방법 및 세정용액 |
Country Status (4)
Country | Link |
---|---|
US (1) | US5567244A (ko) |
JP (1) | JPH076993A (ko) |
KR (1) | KR960002763B1 (ko) |
DE (1) | DE4340589A1 (ko) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2760418B2 (ja) * | 1994-07-29 | 1998-05-28 | 住友シチックス株式会社 | 半導体ウエーハの洗浄液及びこれを用いた半導体ウエーハの洗浄方法 |
US5565707A (en) * | 1994-10-31 | 1996-10-15 | International Business Machines Corporation | Interconnect structure using a Al2 Cu for an integrated circuit chip |
JPH08172068A (ja) * | 1994-12-19 | 1996-07-02 | Fujitsu Ltd | 半導体基板の洗浄方法及び半導体装置の製造方法 |
DE59508757D1 (de) * | 1995-03-10 | 2000-11-02 | Astec Halbleitertechnologie Gm | Verfahren und Vorrichtung zum Reinigen von Siliziumscheiben |
US6532976B1 (en) | 1995-07-10 | 2003-03-18 | Lg Semicon Co., Ltd. | Semiconductor wafer cleaning apparatus |
DE19655219C2 (de) * | 1996-04-24 | 2003-11-06 | Steag Micro Tech Gmbh | Vorrichtung zum Behandeln von Substraten in einem Fluid-Behälter |
DE19701971C1 (de) * | 1997-01-22 | 1998-11-26 | Invent Gmbh Entwicklung Neuer Technologien | Verfahren und Vorrichtung zur Reinigung von Substratoberflächen |
US7264680B2 (en) * | 1997-05-09 | 2007-09-04 | Semitool, Inc. | Process and apparatus for treating a workpiece using ozone |
JPH11121417A (ja) | 1997-10-09 | 1999-04-30 | Mitsubishi Electric Corp | 半導体基板の処理システムおよび処理方法 |
DE19833257C1 (de) * | 1998-07-23 | 1999-09-30 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer Halbleiterscheibe |
US6440852B1 (en) * | 1999-01-26 | 2002-08-27 | Agere Systems Guardian Corp. | Integrated circuit including passivated copper interconnection lines and associated manufacturing methods |
FR2790768A1 (fr) * | 1999-03-08 | 2000-09-15 | Commissariat Energie Atomique | Procede d'attaque chimique du cuivre pour composants microelectroniques |
JP3907151B2 (ja) | 2000-01-25 | 2007-04-18 | 株式会社東芝 | 半導体装置の製造方法 |
DE10064081C2 (de) * | 2000-12-21 | 2002-06-06 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer Halbleiterscheibe |
US6350689B1 (en) | 2001-04-23 | 2002-02-26 | Chartered Semiconductor Manufacturing Ltd. | Method to remove copper contamination by using downstream oxygen and chelating agent plasma |
US6656852B2 (en) | 2001-12-06 | 2003-12-02 | Texas Instruments Incorporated | Method for the selective removal of high-k dielectrics |
DE102011000861A1 (de) * | 2011-02-22 | 2012-08-23 | Rena Gmbh | Verfahren zum Behandeln eines Objekts, insbesondere eines Solarzellensubstrats, und Vorrichtung zur Durchführung des Verfahrens |
US9627534B1 (en) * | 2015-11-20 | 2017-04-18 | United Microelectronics Corp. | Semiconductor MOS device having a dense oxide film on a spacer |
US9999907B2 (en) * | 2016-04-01 | 2018-06-19 | Applied Materials, Inc. | Cleaning process that precipitates yttrium oxy-flouride |
CN105931947A (zh) * | 2016-05-20 | 2016-09-07 | 浙江晶科能源有限公司 | 一种硅片的清洗方法 |
CN111112219B (zh) * | 2020-01-22 | 2021-10-29 | 河南职业技术学院 | 一种高效汽车零件浸泡冲洗装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171242A (en) * | 1976-12-17 | 1979-10-16 | International Business Machines Corporation | Neutral pH silicon etchant for etching silicon in the presence of phosphosilicate glass |
SU1089674A1 (ru) * | 1982-08-11 | 1984-04-30 | Институт электроники АН БССР | Способ очистки полупроводниковых пластин и устройство дл его осуществлени |
JP2733771B2 (ja) * | 1988-07-29 | 1998-03-30 | 日本テキサス・インスツルメンツ株式会社 | 液体による処理装置 |
US5232511A (en) * | 1990-05-15 | 1993-08-03 | Semitool, Inc. | Dynamic semiconductor wafer processing using homogeneous mixed acid vapors |
JPH04128010A (ja) * | 1990-09-19 | 1992-04-28 | Kyoto Handotai Kk | シリコン単結晶の切断方法 |
JP2984348B2 (ja) * | 1990-10-05 | 1999-11-29 | 株式会社東芝 | 半導体ウェーハの処理方法 |
US5261966A (en) * | 1991-01-28 | 1993-11-16 | Kabushiki Kaisha Toshiba | Method of cleaning semiconductor wafers using mixer containing a bundle of gas permeable hollow yarns |
JPH04263086A (ja) * | 1991-02-18 | 1992-09-18 | Mitsubishi Electric Corp | シリコン基板のエッチング方法 |
WO1992022084A1 (en) * | 1991-05-21 | 1992-12-10 | Advantage Production Technology, Inc. | Organic preclean for improving vapor phase wafer etch uniformity |
-
1992
- 1992-12-24 KR KR1019920025455A patent/KR960002763B1/ko not_active IP Right Cessation
-
1993
- 1993-11-29 DE DE4340589A patent/DE4340589A1/de not_active Ceased
- 1993-12-21 JP JP5321478A patent/JPH076993A/ja active Pending
- 1993-12-23 US US08/172,463 patent/US5567244A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE4340589A1 (de) | 1994-06-30 |
US5567244A (en) | 1996-10-22 |
KR960002763B1 (ko) | 1996-02-26 |
JPH076993A (ja) | 1995-01-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR940016526A (ko) | 반도체 세정방법 및 세정용액 | |
KR960035859A (ko) | 반도체기판의 표면처리액과 이 처리액을 사용한 표면처리방법 및 표면처리장치 | |
KR950007011A (ko) | 반도체 웨이퍼 처리방법 | |
UA27039C2 (uk) | Спосіб видалеhhя сполук сірки з потоку газів | |
TW326549B (en) | Method and apparatus for cleaning electronic device | |
KR970060426A (ko) | 세정액 및 세정방법 | |
ZA919906B (en) | Process for working up aqueous solutions containing hydrogen sulfide,hydrogen cyanide and ammonia | |
KR960026331A (ko) | 반도체기판의 세정방법 및 반도체장치의 제조방법 | |
JPS5271386A (en) | Method of removing membrane contaminants | |
TW427952B (en) | Procedure for drying silicon | |
ATE112544T1 (de) | Verfahren zur entfernung von vinylidenchlorid und anderen ungesättigten verbindungen aus 1,1- dichlor-1-fluorethan. | |
JPS57204132A (en) | Washing method for silicon wafer | |
JPS57180132A (en) | Washing method of substrate | |
CA2027913A1 (en) | Dissolved gas stripping apparatus and methods | |
ZA928056B (en) | Method and system for removing contaminants. | |
ES2191337T3 (es) | Procedimiento de limpieza de suelos contaminados con mercurio. | |
KR100190081B1 (ko) | 반도체 기판의 유기물 제거용 세정장치 | |
JPS5554086A (en) | Method and apparatus for ammonia nitrogen removal by zeolite and adsorption of saturated zeolite | |
KR100373307B1 (ko) | 반도체소자의세정방법 | |
ZA831388B (en) | Process for maximum reduction of water desorption in chemical liquid active substance composition carried on support | |
DE3163327D1 (en) | Method and device for cleaning work pieces wetted with alkali-metal | |
IT1246252B (it) | Procedimento di decapaggio acido di acciai inossidabili e speciali impiegante come ossidanti nella soluzione di decapaggio composti perossidati stabilizzati a base di alcoli alifatici terziari saturi | |
JPS5494274A (en) | Liquid terating device of semiconductor wafers | |
JPS60130832A (ja) | 半導体ウエハの水洗装置 | |
JPS5585436A (en) | Surface treating method for quartz glass |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20110126 Year of fee payment: 16 |
|
LAPS | Lapse due to unpaid annual fee |