KR940001885B1 - 선택적 화학증착법(化學法, cvd법) 및 동법을 사용한 cvd장치 - Google Patents

선택적 화학증착법(化學法, cvd법) 및 동법을 사용한 cvd장치 Download PDF

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Publication number
KR940001885B1
KR940001885B1 KR1019900005518A KR900005518A KR940001885B1 KR 940001885 B1 KR940001885 B1 KR 940001885B1 KR 1019900005518 A KR1019900005518 A KR 1019900005518A KR 900005518 A KR900005518 A KR 900005518A KR 940001885 B1 KR940001885 B1 KR 940001885B1
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South Korea
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gas
film
wafer
pressure
reaction chamber
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Expired - Fee Related
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KR1019900005518A
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English (en)
Korean (ko)
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KR900017107A (ko
Inventor
쿠니오 사이토
요시노부 아리타
타카오 아마짜와
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니혼 덴신 덴와 가부시끼가이샤
야마구찌 하루오
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    • H01L21/205—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
    • H01L21/28562—Selective deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0236—Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
KR1019900005518A 1989-04-21 1990-04-20 선택적 화학증착법(化學法, cvd법) 및 동법을 사용한 cvd장치 Expired - Fee Related KR940001885B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP10007889 1989-04-21
JP89-100078 1989-04-21
JP20782989 1989-08-14
JP89-207829 1989-08-14
JP1-207829 1989-08-14
JP1-100078 1989-08-14

Publications (2)

Publication Number Publication Date
KR900017107A KR900017107A (ko) 1990-11-15
KR940001885B1 true KR940001885B1 (ko) 1994-03-10

Family

ID=26441167

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900005518A Expired - Fee Related KR940001885B1 (ko) 1989-04-21 1990-04-20 선택적 화학증착법(化學法, cvd법) 및 동법을 사용한 cvd장치

Country Status (4)

Country Link
US (1) US5104694A (enExample)
JP (1) JP2939500B2 (enExample)
KR (1) KR940001885B1 (enExample)
DE (1) DE4013143A1 (enExample)

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JP3469251B2 (ja) * 1990-02-14 2003-11-25 株式会社東芝 半導体装置の製造方法
US5284521A (en) * 1990-09-21 1994-02-08 Anelva Corporation Vacuum film forming apparatus
FR2675309A1 (fr) * 1991-03-22 1992-10-16 Siemens Ag Procede pour eliminer localement des couches isolantes transparentes aux ultraviolets, situees sur un substrat semiconducteur.
TW203633B (enExample) * 1991-06-03 1993-04-11 L Air Liquide Sa Pour L Expl Des Proce
KR970009274B1 (ko) * 1991-11-11 1997-06-09 미쓰비시덴키 가부시키가이샤 반도체장치의 도전층접속구조 및 그 제조방법
JP3109687B2 (ja) * 1992-03-09 2000-11-20 三菱電機株式会社 半導体装置の導電層接続構造の製造方法
US5393565A (en) * 1992-06-08 1995-02-28 Fujitsu Limited Method for deposition of a refractory metal nitride and method for formation of a conductive film containing a refractory metal nitride
US5240739A (en) * 1992-08-07 1993-08-31 Micron Technology Chemical vapor deposition technique for depositing titanium silicide on semiconductor wafers
EP0606751B1 (en) * 1993-01-13 2002-03-06 Applied Materials, Inc. Method for depositing polysilicon films having improved uniformity and apparatus therefor
US5652180A (en) * 1993-06-28 1997-07-29 Kawasaki Steel Corporation Method of manufacturing semiconductor device with contact structure
EP0637063B1 (en) * 1993-07-30 1999-11-03 Applied Materials, Inc. Method for depositing silicon nitride on silicium surfaces
JPH07176627A (ja) * 1993-12-17 1995-07-14 Nec Corp 半導体装置の製造方法
US6001729A (en) * 1995-01-10 1999-12-14 Kawasaki Steel Corporation Method of forming wiring structure for semiconductor device
JPH08191054A (ja) * 1995-01-10 1996-07-23 Kawasaki Steel Corp 半導体装置及びその製造方法
DE69622017T2 (de) * 1995-02-09 2002-12-05 Puritan-Bennett Corp., Pleasanton Beatmungsgerät der kolbenbauart
KR100224654B1 (ko) * 1995-09-19 1999-10-15 윤종용 반도체장치의 커패시터 형성방법
KR100269311B1 (ko) * 1997-10-10 2000-10-16 윤종용 웨이퍼스트립방법
US5856237A (en) * 1997-10-20 1999-01-05 Industrial Technology Research Institute Insitu formation of TiSi2/TiN bi-layer structures using self-aligned nitridation treatment on underlying CVD-TiSi2 layer
US6293749B1 (en) 1997-11-21 2001-09-25 Asm America, Inc. Substrate transfer system for semiconductor processing equipment
US6068441A (en) * 1997-11-21 2000-05-30 Asm America, Inc. Substrate transfer system for semiconductor processing equipment
US6019839A (en) * 1998-04-17 2000-02-01 Applied Materials, Inc. Method and apparatus for forming an epitaxial titanium silicide film by low pressure chemical vapor deposition
US6429101B1 (en) * 1999-01-29 2002-08-06 International Business Machines Corporation Method of forming thermally stable polycrystal to single crystal electrical contact structure
US6494959B1 (en) 2000-01-28 2002-12-17 Applied Materials, Inc. Process and apparatus for cleaning a silicon surface
KR100517911B1 (ko) * 2000-05-19 2005-10-04 주식회사 하이닉스반도체 하부전극과 스토리지 노드 콘택간의 오정렬 및확산방지막의 산화를 방지할 수 있는 반도체 장치 제조 방법
JP3626115B2 (ja) * 2001-06-14 2005-03-02 沖電気工業株式会社 チタン化合物を含有するｃｖｄチタン膜の形成方法
KR100434698B1 (ko) * 2001-09-05 2004-06-07 주식회사 하이닉스반도체 반도체소자의 선택적 에피성장법
WO2004010480A1 (en) * 2002-07-24 2004-01-29 Applied Materials, Inc. Apparatus and method for thermally isolating a heat chamber
KR100725098B1 (ko) * 2005-11-17 2007-06-04 삼성전자주식회사 반도체 제조설비의 유량조절기 오동작 감지장치 및 그 방법
US8362503B2 (en) * 2007-03-09 2013-01-29 Cree, Inc. Thick nitride semiconductor structures with interlayer structures
JP5250470B2 (ja) * 2009-04-22 2013-07-31 株式会社日立ハイテクノロジーズ 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置
TW201117297A (en) * 2009-07-31 2011-05-16 Ulvac Inc Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
DE102011080202A1 (de) * 2011-08-01 2013-02-07 Gebr. Schmid Gmbh Vorrichtung und Verfahren zur Herstellung von dünnen Schichten
US11942365B2 (en) * 2017-06-02 2024-03-26 Eugenus, Inc. Multi-region diffusion barrier containing titanium, silicon and nitrogen
US10535527B2 (en) * 2017-07-13 2020-01-14 Applied Materials, Inc. Methods for depositing semiconductor films
US20220084842A1 (en) * 2020-09-11 2022-03-17 Applied Materials, Inc. Antifragile systems for semiconductor processing equipment using multiple special sensors and algorithms

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DE3211752C2 (de) * 1982-03-30 1985-09-26 Siemens AG, 1000 Berlin und 8000 München Verfahren zum selektiven Abscheiden von aus Siliziden hochschmelzender Metalle bestehenden Schichtstrukturen auf im wesentlichen aus Silizium bestehenden Substraten und deren Verwendung
JPS59112611A (ja) * 1982-12-17 1984-06-29 Matsushita Electric Ind Co Ltd 気相成長装置
US4557943A (en) * 1983-10-31 1985-12-10 Advanced Semiconductor Materials America, Inc. Metal-silicide deposition using plasma-enhanced chemical vapor deposition
US4629635A (en) * 1984-03-16 1986-12-16 Genus, Inc. Process for depositing a low resistivity tungsten silicon composite film on a substrate
US4668530A (en) * 1985-07-23 1987-05-26 Massachusetts Institute Of Technology Low pressure chemical vapor deposition of refractory metal silicides
US4647494A (en) * 1985-10-31 1987-03-03 International Business Machines Corporation Silicon/carbon protection of metallic magnetic structures
GB2195663B (en) * 1986-08-15 1990-08-22 Nippon Telegraph & Telephone Chemical vapour deposition method and apparatus therefor

Also Published As

Publication number Publication date
DE4013143A1 (de) 1990-10-31
DE4013143C2 (enExample) 1992-07-09
US5104694A (en) 1992-04-14
KR900017107A (ko) 1990-11-15
JPH03224223A (ja) 1991-10-03
JP2939500B2 (ja) 1999-08-25

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