KR910005340A - 연질자기층을 갖는 영구자석 센서소자의 제조방법 - Google Patents
연질자기층을 갖는 영구자석 센서소자의 제조방법 Download PDFInfo
- Publication number
- KR910005340A KR910005340A KR1019900013323A KR900013323A KR910005340A KR 910005340 A KR910005340 A KR 910005340A KR 1019900013323 A KR1019900013323 A KR 1019900013323A KR 900013323 A KR900013323 A KR 900013323A KR 910005340 A KR910005340 A KR 910005340A
- Authority
- KR
- South Korea
- Prior art keywords
- layer
- magnet
- permanent magnet
- melting
- surface layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/147—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Hard Magnetic Materials (AREA)
- Laser Beam Processing (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
Abstract
내용 없음.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 방법으로 제조된 위치 센서의 개략도.
Claims (10)
- 영구자석(14), 영구자석(14)상의 고 투자율층(16), 고투자율층(16)상의 자기 감지소자 및 감지소자(18)에 관련한 이동을 위해 설치된 여기 소자(20)를 조립함을 포함하는 위치 센서(10)의 제조방법에 있어서, 고보자력을 가지는 철 기초-합금으로 영구자석(14)을 형성하는 단계와, 고-에너지 비임으로써 상기 자석(14)의 표면을 급속 용융시킨후 보자력을 감소시키기 위해 표면을 냉각시킴으로써 자석(14)의 표면을 처리하여 저보자력 고투자율이 얇은 층을 포함하는 영구자석 센서소자제조방법.
- 1항에 있어서, 상기 영구자석(14)은 고보자력을 나타내는 미세한 구조의 Nb-Fe-B 합금으로 형성되고, 상기 고-투자율 저-보자력층(16)은 얇은 층(16)을 용융시키기에 충분한 비임 파워밀도를 갖는 에너지비임으로써 자석의 표면층을 금속 용융 한 후, 저보자력 및 고투자율을 갖는 본질적으로 비정질인 미세구조를 형성하기 위해 표면을 급속 재-고화(固化)(re-solidify)시키도록 층(16)을 냉각함으로써, 자석상에 원위치(in-situ) 형성됨을 특징으로 하는 방법.
- 제1항 또는 제2항에 있어서, 상기 용융단계는 자석표면의 희망영역을 점진적으로 높이기 위한 패턴으로 레이저 비임으로 표면을 스캔함을 포함하는 방법.
- 제1항 또는 제2항에 있어서, 상기 표면층(16)은 층(16)의 연질자기 특성을 점진적으로 증가하기 위해 반복적으로 용융되고 재고화됨을 특징으로 하는 방법.
- 1항에 있어서, 영구자석(14)은 고보자력을 나타내는 미세구조를 갖는 Nb-Fe-B 합금으로 형성되며, 상기 고-투자율, 저-보자력 층(16)은 얇은 층(16)을 용융시키기에 충분한 비임 파워밀도를 갖는 에너지 비임으로써 자석의 표면층을 급속 용융 한 후, 상분리 및 표면층 미세구조내에 Nd-Fe-b상 뿐 아니라 알파-고철 그레인이 형성되도록 층(16)을 서서히 냉각시키고 재-고화, 시킴으로서 층(16)의 연질자기특성을 증진시킴을 특징으로 하는 방법.
- 제5항에 있어서, 상기 용융 단계는 자석표면의 희망영역을 점진적으로 녹이기 위한 패턴 레이저 비임으로 표면을 스캔하는 것을 특징으로 하는 방법.
- 제5항에 있어서, 상기 표면층(16)은 층(16)의 연질자기 특성을 점진적으로 증가하기 위해 반복적으로 용융되고 재 고화됨을 특징으로 하는 방법.
- 제1항에 있어서, 상기 영구자석(14)은 고 보자력을 나타내는 미세구조를 갖는 Nb-Fe-B 합금으로 형성되며, 상기 얇은 층(16)을 용융시키기에 충분한 비임 파워밀도를 갖는 상기 에너지 비임으로 표면층(16)을 처리할 때 표면층(16)과 결합하는 성분의 존재하에 자석(14)을 위치시킴으로써 자석(14)의 표면층(16)을 화학적으로 변환하고, 이어서 표면층 미세구조내에 철 그레인 형성을 일으키는 용융층(16)을 냉각 및 재-고화, 시킴으로써 층(16)의 유연자기특성을 증진시킴으로 특징으로 하는 방법.
- 제8항에 있어서, 상기 용융 및 냉각 단계는 Nb-Fe-B 상의 양을 감소하고 재고화된 층(16)의 알파 철 함량을 증가하기 위하여 Nd를 산화시키기 위한 반응분위기내에서 수행됨을 특징으로 하는 방법.
- 제8항에 있어서, 상기 표면층(16)을 화학적으로 변환하는 단계는 레이저 비임으로 표면을 표면 합금으로 것을 포함하며, 첨가된 철이 표면층(16)의 용융된 물질과 합금되도록 표면층에 철 분말을 첨가하는 단계를 포함하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US399789 | 1989-08-28 | ||
US07/399,789 US5074929A (en) | 1989-08-28 | 1989-08-28 | Method of making a permanent magnet sensor element with a soft magnetic layer |
Publications (2)
Publication Number | Publication Date |
---|---|
KR910005340A true KR910005340A (ko) | 1991-03-30 |
KR930011893B1 KR930011893B1 (ko) | 1993-12-22 |
Family
ID=23580973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900013323A KR930011893B1 (ko) | 1989-08-28 | 1990-08-28 | 연질자기층을 갖는 영구자석 센서소자의 제조방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5074929A (ko) |
EP (1) | EP0415576B1 (ko) |
JP (1) | JPH0693411B2 (ko) |
KR (1) | KR930011893B1 (ko) |
DE (1) | DE69002140T2 (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4203073C2 (de) * | 1992-02-04 | 1994-12-15 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
DE4401476A1 (de) * | 1993-01-20 | 1994-07-28 | Fuji Electric Co Ltd | Magneto-resistives Element, magnetisches Induktionselement und solche enthaltender Dünnschicht-Magnetkopf |
DE4404716A1 (de) * | 1994-02-15 | 1995-08-17 | Hottinger Messtechnik Baldwin | Dehnungsmeßstreifen und Verfahren zur Herstellung eines Dehnungsmeßstreifens sowie Meßgrößenaufnehmer |
JPH08249602A (ja) * | 1995-03-06 | 1996-09-27 | Mitsubishi Electric Corp | 磁気式記憶再生方法ならびにそれに用いる磁気再生装置、磁気記憶媒体およびその製法 |
JP3690616B2 (ja) * | 1996-04-15 | 2005-08-31 | 日立金属株式会社 | 回転機 |
US6768409B2 (en) * | 2001-08-29 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magnetic device, method for manufacturing the same, and power supply module equipped with the same |
JP2006049801A (ja) * | 2004-06-28 | 2006-02-16 | Aisin Seiki Co Ltd | 耐食性磁石及びその製造方法 |
DE102006057970B4 (de) * | 2006-12-08 | 2020-01-02 | Infineon Technologies Ag | Halbleiterbauteil mit einem Magnetfeldsensor und Verfahren zur Herstellung |
US9076717B2 (en) | 2006-12-08 | 2015-07-07 | Infineon Technologies Ag | Semiconductor component comprising magnetic field sensor |
US9121885B2 (en) * | 2010-08-16 | 2015-09-01 | Infineon Technologies Ag | Sensor package and method of manufacturing thereof |
CN102350560B (zh) * | 2011-09-30 | 2013-09-04 | 台达电子(郴州)有限公司 | 用于平面磁性元件的焊接治具及焊接工艺 |
WO2020138094A1 (ja) | 2018-12-25 | 2020-07-02 | ダイセルポリマー株式会社 | 表面に粗面化構造を有する希土類磁石前駆体または希土類磁石成形体とそれらの製造方法 |
CN113950728B (zh) * | 2019-06-18 | 2023-07-04 | 三菱电机株式会社 | 稀土烧结磁铁及使用其的旋转电机 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4312684A (en) * | 1980-04-07 | 1982-01-26 | General Motors Corporation | Selective magnetization of manganese-aluminum alloys |
US4347086A (en) * | 1980-04-07 | 1982-08-31 | General Motors Corporation | Selective magnetization of rare-earth transition metal alloys |
US4792367A (en) * | 1983-08-04 | 1988-12-20 | General Motors Corporation | Iron-rare earth-boron permanent |
US4926122A (en) * | 1988-08-08 | 1990-05-15 | General Motors Corporation | High sensitivity magnetic circuit |
-
1989
- 1989-08-28 US US07/399,789 patent/US5074929A/en not_active Expired - Fee Related
-
1990
- 1990-08-06 DE DE90308620T patent/DE69002140T2/de not_active Expired - Fee Related
- 1990-08-06 EP EP90308620A patent/EP0415576B1/en not_active Expired - Lifetime
- 1990-08-28 JP JP2224561A patent/JPH0693411B2/ja not_active Expired - Lifetime
- 1990-08-28 KR KR1019900013323A patent/KR930011893B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR930011893B1 (ko) | 1993-12-22 |
EP0415576B1 (en) | 1993-07-07 |
JPH03105210A (ja) | 1991-05-02 |
US5074929A (en) | 1991-12-24 |
DE69002140T2 (de) | 1993-10-14 |
DE69002140D1 (de) | 1993-08-12 |
JPH0693411B2 (ja) | 1994-11-16 |
EP0415576A1 (en) | 1991-03-06 |
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